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2026
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Invention
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Ion source cathode with monolithic radiation shields.
An indirectly heated cathode for an ion so... |
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Invention
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System and method to enable efficient channel implant with xrd.
A workpiece having a crystalline... |
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2025
|
Invention
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Ion implantation system and method for implanting aluminum using non-fluorine-containing halide s... |
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Invention
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High temperature ion source.
An arc chamber for an ion source provides a source of thermal radia... |
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Invention
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Shielded gas inlet for an ion source.
An ion source has arc chamber having one or more radiation... |
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Invention
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High energy implanter with small footprint.
A high-energy ion implantation system has an ion sou... |
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Invention
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Ion stripping apparatus with integrated quadrupoles. A charge stripper has a stripper tube 174 wi... |
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Invention
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Ion stripping apparatus with integrated quadrupoles.
An ion implantation system has a first line... |
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Invention
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Rf resonator with high q value for ion beam accleleration. A resonator is provided for an RF line... |
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Invention
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Rf resonator with high q value for ion beam accleleration.
A resonator is provided for an RF lin... |
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Invention
|
Direct voltage control of a clamping surface of an electrostatic clamp. A system and method for c... |
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Invention
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Direct voltage control of a clamping surface of an electrostatic clamp.
A system and method for ... |
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Invention
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Ion source with multiple integrated arc chambers.
An ion source has an arc chamber and multiple ... |
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Invention
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System and method for plasma treatment with independent control of neutral particle and ion fluxe... |
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Invention
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Dual force lift and ground pins for electrostatic chuck and method for use thereof. The disclosur... |
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Invention
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Improved energy accuracy for an rf linear accelerator ion implantation system. An ion implantatio... |
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Invention
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Energy accuracy for an rf linear accelerator ion implantation system.
An ion implantation system... |
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Invention
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Dual force lift and ground pins for electrostatic chuck and method for use thereof.
The disclosu... |
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Invention
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High aspect ratio beam dump or faraday cup with neutron radiation shielding. A neutron shielding ... |
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Invention
|
Mobile radiation detector system for ion implanters.
A mobile detection system that follows the ... |
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Invention
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Semiconductor radioactive wafer decay safety and operation system.
A radiation safety apparatus ... |
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Invention
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Granular sputter source target with repeller cup and method for use thereof. The disclosure is ge... |
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Invention
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Granular sputter source target with repeller cup and method for use thereof.
The disclosure is g... |
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Invention
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Substrate including a pre-epitaxial stacking fault expansion-stop layer, devices including the sa... |
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Invention
|
Semiconductor electrical insulator with reduced arcing.
The system includes an insulative assemb... |
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Invention
|
Dopant delivery system to ion source using induction heating.
An ion source has an arc chamber d... |
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Invention
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Method and apparatus for ion beam directional deposition. A deposition system has an ion depositi... |
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Invention
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Method and apparatus for ion beam directional deposition.
A deposition system has an ion deposit... |
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Invention
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Liner with raised ribs for particle transport reduction.
A liner for an ion implanter includes a... |
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Invention
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Apparatus and method for angle control of radicals, neutral atoms, and molecules.
Apparatuses an... |
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Invention
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Method, system and apparatus for teaching and verifying end station. The disclosure generally rel... |
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Invention
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Variable vent pressure and flow for flushing loadlock chamber. A workpiece processing system has ... |
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Invention
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Variable vent pressure and flow for flushing loadlock chamber.
A workpiece processing system has... |
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Invention
|
Low-temperature vaporizer for ion implanter with in-vacuum controlled flow.
An ion source for an... |
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Invention
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Method, system and apparatus for teaching and verifying end station.
The disclosure generally re... |
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Invention
|
Ion stripping apparatus and ion implantation system with selectable stripping gas source.
An ion... |
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Invention
|
System and method for managing solid phase precursors for an ion implantation system. A filter is... |
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Invention
|
Ion implantation system and method of operation.
An ion implantation system includes an ion sour... |
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Invention
|
High temperature ion source. An arc chamber for an ion source provides a source of thermal radiat... |
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Invention
|
Semiconductor device interconnect layer formation by selective ion implantation.
A method for fo... |
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Invention
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In-situ, pre-implant wafer characterization system and method. An ion implantation system include... |
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Invention
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Spectroscopy-based safety system for nuclear reaction detection in an ion implantation system.
A... |
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Invention
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Automatic beam uniformity correction through generative ai modeling.
In one embodiment, the disc... |
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2024
|
Invention
|
In-situ, pre-implant wafer characterization system and method.
An ion implantation system includ... |
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Invention
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Liquid metal alloy feed materials for ion implantation.
Liquid metal alloy precursor composition... |
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Invention
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Liquid metal alloy feed materials for ion implantation. Liquid metal alloy precursor compositions... |
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Invention
|
System and method for dynamic loadlock pressure control. A workpiece processing system has a proc... |
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|
Invention
|
System and method for managing solid phase precursors for an ion implantation system.
A filter i... |
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Invention
|
System and method for dynamic loadlock pressure control.
A workpiece processing system has a pro... |
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Invention
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Ion beam profiling using optical tomography. An ion beam characterization system has one or more ... |
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2000
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P/S
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Electrical equipment, in particular thermal processors, photoresist processors, ashers, photostab... |
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P/S
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electrical equipment, namely, thermal processors, photoresist processors, ashers, photostabilizer... |
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P/S
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Semiconductor manufacturing equipment including thermal processing equipment, photresist processi... |
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P/S
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electrical equipment, namely, thermal processors, photoresist processors, ashers, photostablizers... |
