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2023
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Invention
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Wire or rod shaped extraction electrode optics. An electrode apparatus for an ion implantation sy... |
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Invention
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Dual source injector with switchable analyzing magnet. An ion implantation system has a mass anal... |
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Invention
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Magnetic focusing device low energy ion beams.
A magnetic focusing apparatus for focusing an ion... |
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Invention
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Ion implantation system and method for implanting aluminum using non-fluorine-containing halide s... |
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Invention
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Fluorine based molecular co-gas when running dimethylaluminum chloride as a source material to ge... |
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Invention
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Hydraulic feed system for an ion source. An ion source has an arc chamber defining an arc chamber... |
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Invention
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Hydraulic feed system for an ion source. An ion source 110 has an arc chamber 116 defining an arc... |
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2022
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Invention
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High incidence angle graphite for particle control with dedicated low sputter yield ion beam.
An... |
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Invention
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High incidence angle graphite for particle control with dedicated low sputter yield ion beam. An ... |
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Invention
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Wire or rod shaped extraction electrode optics.
An electrode apparatus for an ion implantation s... |
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Invention
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Shielded gas inlet for an ion source.
An ion source has arc chamber having one or more radiation... |
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Invention
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Shielded gas inlet for an ion source. An ion source has arc chamber having one or more radiation ... |
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Invention
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Charge filter magnet with variable achromaticity. An ion implantation systemlOO has an ion source... |
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Invention
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Method and apparatus for continuous chained energy ion implantation.
An ion implantation system ... |
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Invention
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Method and apparatus for continuous chained energy ion implantation. An ion implantation system a... |
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Invention
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Blended energy ion implantation.
Ion implantation systems and methods implant varying energies o... |
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Invention
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Blended energy ion implantation. Ion implantation systems and methods implant varying energies of... |
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Invention
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Method for setting gap between cathode and filament.
A cathode apparatus for an ion source has a... |
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Invention
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Extended lifetime dual indirectly-heated cathode ion source. An ion source has an arc chamber wit... |
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Invention
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Ion source with multiple bias electrodes. An ion source has an arc chamber having first and secon... |
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2021
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Invention
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Hybrid high-temperature electrostatic clamp for improved workpiece temperature uniformity. A ther... |
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Invention
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Charge filter magnet with variable achromaticity.
An ion implantation system has an ion source t... |
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Invention
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Active workpiece heating or cooling for an ion implantation system.
A heated chuck for an ion im... |
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Invention
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Hydrogen co-gas when using a chlorine-based ion source material. An ion implantation system (101)... |
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Invention
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Stepped indirectly heated cathode with improved shielding. An ion source for forming a plasma has... |
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Invention
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Tuning apparatus for minimum divergence ion beam. An ion implantation system has an ion source co... |
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Invention
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Tuning apparatus for minimum divergence ion beam.
An ion implantation system has an ion source c... |
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Invention
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Etching aluminum nitride or aluminum oxide to generate an aluminum ion beam. An ion implantation ... |
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Invention
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Hydrogen co-gas when using a chlorine-based ion source material.
An ion implantation system has ... |
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Invention
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Ion source repeller. An ion source has an arc chamber having one or more arc chamber walls defini... |
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Invention
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Apparatus and method for metal contamination control in an ion implantation system using charge s... |
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2020
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Invention
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Hydrogen generator for an ion implanter. A terminal for an ion implantation system is provided, w... |
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Invention
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Method of enhancing the energy and beam current on rf based implanter. Methods and a system of an... |
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Invention
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Toxic outgas control post process. A workpiece processing system has a cooling chamber enclosing ... |
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Invention
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System and method for extending a lifetime of an ion source for molecular carbon implants. An ion... |
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2019
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Invention
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Method of enhancing the energy and beam current on rf based implanter.
Methods and a system of a... |
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2000
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P/S
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Electrical equipment, in particular thermal processors, photoresist processors, ashers, photostab... |
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P/S
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electrical equipment, namely, thermal processors, photoresist processors, ashers, photostabilizer... |
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P/S
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Semiconductor manufacturing equipment including thermal processing equipment, photresist processi... |
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P/S
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electrical equipment, namely, thermal processors, photoresist processors, ashers, photostablizers... |
