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2022
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Invention
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Substrate treating apparatus.
A substrate treating method for treating substrates with a substra... |
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2021
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Invention
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Substrate treating apparatus with parallel substrate treatment lines on multiple stories for simu... |
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2018
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Invention
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Substrate treating apparatus. A substrate treating apparatus includes a treating section for trea... |
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Invention
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Development processing device. A slit nozzle is moved by a nozzle lifting/lowering mechanism and ... |
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2017
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Invention
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Substrate processing apparatus and substrate processing method. An underlayer is formed to cover ... |
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2016
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Invention
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Substrate processing apparatus and substrate processing method. One processing block is arranged ... |
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Invention
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Substrate processing apparatus. A substrate processing apparatus includes an indexer block, a fir... |
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Invention
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Substrate processing method.
A substrate processing method includes forming a first film on the ... |
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Invention
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Substrate treating apparatus with parallel substrate treatment lines.
A substrate treating appar... |
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2015
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Invention
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Substrate treating apparatus with parallel gas supply pipes and a gas exhaust pipe. A substrate t... |
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Invention
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Multi-story substrate treating apparatus with flexible transport mechanisms and vertically divide... |
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Invention
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Substrate treating apparatus and substrate transporting method. A substrate transport mechanism r... |
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2014
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Invention
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Developing apparatus. A method for developing a substrate includes spinning the substrate with a ... |
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Invention
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Substrate processing method. A substrate processing apparatus comprises an indexer block, an anti... |
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Invention
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Substrate processing apparatus, storage device, and method of transporting substrate storing cont... |
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Invention
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Substrate treating apparatus with substrate reordering. A treating section has substrate treatmen... |
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Invention
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Substrate processing apparatus with a cleaning processing section for cleaning a chemical liquid ... |
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Invention
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Substrate cleaning and drying method and substrate developing method.
Provided is a substrate cl... |
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Invention
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Substrate processing apparatus. A method of processing a substrate in a substrate processing appa... |
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2013
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Invention
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Negative developing method and negative developing apparatus. After a developing step, a substrat... |
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Invention
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Alignment device and substrate processing apparatus. An aligner includes a plurality of substrate... |
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Invention
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Substrate processing method. A substrate processing method for a substrate having a photosensitiv... |
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Invention
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Substrate processing method. A method for processing a plurality of substrates after forming a ph... |
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Invention
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Substrate processing apparatus and substrate processing system. A substrate processing apparatus ... |
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Invention
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Substrate treating apparatus with inter-unit buffers. The invention provides coating units, heat-... |
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Invention
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Substrate processing apparatus and substrate processing method. Transport mechanisms are respecti... |
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Invention
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Substrate processing apparatus and substrate processing method. A substrate is transported based ... |
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Invention
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Processing cup and substrate processing apparatus. A substrate is surrounded by an inner cup and ... |
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Invention
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Substrate processing apparatus.
A platform section has an upper platform chamber and a lower pla... |
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Invention
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Exposure device, substrate processing apparatus, method for exposing substrate and substrate proc... |
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Invention
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Substrate cleaning apparatus for cleaning a lower surface of a substrate. A rotating shaft is pro... |
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2012
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Invention
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Substrate cleaning apparatus and substrate processing apparatus including the substrate cleaning ... |
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Invention
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Cup and substrate processing apparatus. A cup intermediate portion and a cup lower portion surrou... |
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Invention
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Substrate processing apparatus and substrate processing method for performing heat treatment on s... |
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Invention
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Coating method and coating apparatus. A coating head is constructed of a solvent feed mechanism c... |
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Invention
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Coating method and coating apparatus. A coating method includes a step of forming a film of a coa... |
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Invention
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Substrate processing apparatus and substrate processing method. A processing liquid is supplied o... |
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Invention
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Substrate treating apparatus. A substrate treating method for treating substrates with a substrat... |
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Invention
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Substrate treating apparatus using horizontal treatment cell arrangements with parallel treatment... |
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Invention
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Substrate treating apparatus with vertical treatment arrangement including vertical blowout and e... |
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Invention
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Developing method. A method for developing a substrate includes spinning the substrate with a spi... |
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2011
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Invention
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Apparatus for and method of heat-treating film formed on surface of substrate. The back surface o... |
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Invention
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Method of and apparatus for heat-treating exposed substrate. A substrate subjected to a pattern e... |
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2006
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P/S
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Semiconductor processing and manufacturing equipment having coating, developing, and thermal trea... |
