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2017
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Invention
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Fluid-actuated flow control valves. An apparatus is described for controlling a flow of a fluid t... |
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2015
|
Invention
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Apparatus and methods for safely providing hazardous reactants.
An apparatus for providing a rea... |
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Invention
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Face sealed fittings. Face-sealed fittings are described for joining flanged tubes. These fitting... |
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Invention
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Face sealed fittings. Aspects of the invention are directed to a kit for use with a tube terminat... |
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2014
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Invention
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Fluid-actuated flow control valves. Aspects of the invention are directed to an apparatus for con... |
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Invention
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Deposition method and apparatus.
A method of depositing a material on a substrate comprises plac... |
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2011
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Invention
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Capacitors with high energy storage density and low esr.
Electrostatic capacitors with high capa... |
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Invention
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Methods and apparatus for atomic layer deposition on large area substrates.
A method for deposit... |
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Invention
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Methods and apparatus for atomic layer deposition on large area substrates. A method for depositi... |
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2010
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Invention
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Apparatus and method for downstream pressure control and sub-atmospheric reactive gas abatement. ... |
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Invention
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Fail safe pneumatically actuated valve with fast time response and adjustable conductance. Appara... |
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Invention
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Perimeter partition-valve with protected seals and associated small size process chambers and mul... |
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Invention
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Apparatus and methods for safely providing hazardous reactants. An apparatus for providing a reac... |
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Invention
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Ald apparatus and method.
Improved apparatus and method for SMFD ALD include a method designed t... |
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2009
|
Invention
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Ald apparatus and method. An apparatus and method for atomic layer deposition with improved effic... |
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Invention
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Coatings for suppressing metallic whiskers.
A coating is formed by depositing the coating on a m... |
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Invention
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Coatings for suppressing metallic whiskers. A coating is formed by depositing the coating on a me... |
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Invention
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Ald method and apparatus.
A method and an apparatus for executing efficient and cost-effective A... |
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Invention
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Deposition method and apparatus. A method of depositing a material on a substrate comprises placi... |
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2007
|
Invention
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Ald method and apparatus. A method and an apparatus for executing efficient and cost-effective At... |
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2005
|
Invention
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Capacitors with high energy storage density and low esr. Electrostatic capacitors with high capac... |
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2004
|
Invention
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Fail-safe pneumatically actuated valve with fast time response and adjustable conductance. Appara... |
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|
Invention
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Fail safe pneumatically actuated valve. Apparatus and method for fail-safe high-speed-pneumatic v... |
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|
Invention
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Perimeter partition-valve with protected seals. A seal-protected perimeter partition valve appara... |
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Invention
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Ald apparatus and method. Improved apparatus and method for SMFD ALD include a method designed to... |
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|
Invention
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Apparatus and method for chemical source vapor pressure control. Improved apparatus and method fo... |
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2003
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Invention
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Trench capacitor with enhanced capacity and method of fabrication same. A thin film integrated mu... |
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Invention
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Ald apparatus and method |
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2002
|
Invention
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Integrated capacitor with enhanced capacitance density and method of fabricating same. 2. |
