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2026
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Invention
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Method of manufacturing multilayer pcb for semiconductor testing, multilayer pcb manufactured the... |
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Invention
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Method of manufacturing multilayer pcb for semiconductor testing and multilayer pcb manufactured ... |
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2025
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Invention
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Substrate processing apparatus. The present invention relates to a substrate processing apparatus... |
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Invention
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Susceptor assembly and metal-organic chemical vapor deposition apparatus. The present invention r... |
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Invention
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Chemical vapor deposition apparatus. The present invention relates to a chemical vapor deposition... |
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Invention
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Substrate processing apparatus.
A substrate processing apparatus includes a chamber, an upper sh... |
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Invention
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Method of forming pixel-defining layer, pixel-defining layer, and display device comprising same.... |
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Invention
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Pop-up rooftop tent for vehicle. The present invention may comprise: a lower case disposed on the... |
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Invention
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Substrate processing method.
A substrate processing method using a chamber, which is provided wi... |
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Invention
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Substrate processing apparatus.
A substrate processing apparatus including a chamber, an upper s... |
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Invention
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Susceptor assembly and substrate processing apparatus.
A susceptor assembly is configured to sup... |
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Invention
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Self-filtering system. The present invention relates to a self-filtering system, and more particu... |
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Invention
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Satellite and susceptor-satellite assembly. The present invention relates to a satellite and a su... |
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Invention
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Satellite and substrate transfer method. The present invention relates to a satellite and a subst... |
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Invention
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Electrolysis apparatus for seawater. The present invention relates to an electrolysis device for ... |
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Invention
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Circulation filtration system. The present invention relates to a circulation filtration system a... |
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Invention
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Electrolysis apparatus for seawater. The present invention relates to an electrolysis apparatus f... |
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Invention
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Self-filtration system. The present invention relates to a self-filtration system and, more speci... |
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Invention
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Rps assembly and substrate processing device. The present invention relates to an RPS assembly an... |
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Invention
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Substrate processing method.
A substrate processing method includes supplying plasma in an inter... |
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Invention
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Substrate processing apparatus and substrate processing method. The present invention relates to ... |
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Invention
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Chemical vapor deposition apparatus. 233) film or the like on a substrate. |
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Invention
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Substrate processing apparatus. The present invention provides a substrate processing apparatus c... |
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Invention
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Substrate processing method.
A substrate processing method of selectively etching silicon german... |
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Invention
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Susceptor assembly and chemical vapor deposition apparatus. The present invention relates to a su... |
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2024
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Invention
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Substrate processing method.
Disclosed is a substrate processing method which may easily adjust ... |
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Invention
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Substrate processing method. 2O as an etching gas at about 40° C. or lower. |
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Invention
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Method for forming hydrogen-containing carbon film using pecvd.
Disclosed is a method for formin... |
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Invention
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Amorphous carbon film and deposition method thereof.
Disclosed are an amorphous carbon film havi... |
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Invention
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Substrate processing apparatus.
A substrate processing apparatus includes a chamber, a dielectri... |
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Invention
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Substrate processing apparatus and substrate processing method.
A substrate processing apparatus... |
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Invention
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Substrate monitoring method and substrate processing apparatus.
The present disclosure relates t... |
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Invention
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Substrate processing apparatus and chamber cleaning method.
A substrate processing apparatus inc... |
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Invention
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Substrate processing apparatus and detecting method of tray tilting.
A substrate processing appa... |
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Invention
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Method for processing substrate.
Disclosed is a substrate processing method including a gap-fill... |
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2023
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Invention
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Method for treating substrate using boron compound. 3n, where X is hydrogen, alkyl, amino, or hal... |
