2024
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Invention
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Low carbon defect copper-manganese sputtering target and method for producing the same.
Provided... |
2023
|
Invention
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Dynamic vacuum seal system for physical vapor deposition sputter applications. Provided is a vacu... |
|
Invention
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High purity sulfur-doped copper sputtering target assembly and method for producing same.
Provid... |
2020
|
Invention
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Method of making a tantalum sputter target and sputter targets made thereby.
Methods for making ... |
2018
|
Invention
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Ultra-fine grain size tantalum sputtering targets with improved voltage performance and methods t... |
|
Invention
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Titanium-tantalum powders for additive manufacturing.
A method of making an atomized spherical β... |
|
Invention
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Method of production of uniform metal plates and sputtering targets made thereby. A method of mak... |
2017
|
Invention
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Magnesium oxide sputtering target and method of making same.
A sintered compact magnesium oxide ... |
|
Invention
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Magnesium oxide sputtering target and method of making same. A sintered compact magnesium oxide t... |
|
Invention
|
Tungsten-boron sputter targets and films made thereby.
A Me-B based alloy spherical powder for u... |
|
Invention
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Tungsten-boron sputter targets and films made thereby. A Me-B based alloy spherical powder for us... |
2016
|
Invention
|
Diffusion-bonded sputter target assembly and method of manufacturing.
A method of making a diffu... |
|
Invention
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Silicon sputtering target with special surface treatment and good particle performance and method... |
|
Invention
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Method of making a tantalum sputtering target with increased deposition rate.
Methods of making ... |
|
Invention
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Method of making a tantalum sputtering target with increased deposition rate. Methods of making T... |
|
Invention
|
Method of making low resistivity tungsten sputter targets and targets made thereby.
Tungsten spu... |
|
Invention
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Method of making low resistivity tungsten sputter targets and targets made thereby. Tungsten sput... |
|
Invention
|
Soft-magnetic based targets having improved pass through flux.
Sputter targets and method of pro... |
|
Invention
|
Method of making a tantalum sputter target and sputter targets made thereby. Methods for making T... |
|
Invention
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Sputtering target having reverse bowng target geometry.
Generally planar sputter targets having ... |
|
Invention
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Sputtering target having reverse bowing target geometry. Generally planar sputter targets having ... |
2015
|
Invention
|
Radio frequency identification in-metal installation and isolation for sputtering target.
A RFID... |
|
Invention
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Radio frequency identification in-metal installation and isolation for sputtering target. A RFID ... |
|
Invention
|
Boron-doped n-type silicon target.
Sputter targets and methods of making same. The targets compr... |
|
Invention
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Boron doped n-type silicon target. Sputter targets and methods of making same. The targets compri... |
2014
|
Invention
|
Optimized textured surfaces and methods of optimizing. Methods for treating texturized surfaces o... |
|
P/S
|
Metal and metal alloy components adapted for use with a
cathodic sputtering coating apparatus, n... |
|
Invention
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Silicon sputtering target with enhanced surface profile and improved performance and methods of m... |
2013
|
P/S
|
treatment of the surfaces of equipment adapted for use in conjunction with a cathodic sputter coa... |
|
Invention
|
Monolithic aluminum alloy target and method of manufacturing. Aluminum or aluminum alloy sputter ... |
|
Invention
|
Low deflection sputtering target assembly and methods of making same. Described is a design and m... |
2012
|
Invention
|
Systems and methods for a target and backing plate assembly.
A target and backing plate assembly... |
|
Invention
|
Sputtering target. A sputtering target made of aluminum and one or more alloying elements includi... |
|
Invention
|
Diffusion-bonded sputter target assembly and method of manufacturing. A method of making a diffus... |
|
Invention
|
Diffusion-bonded sputtering target assembly and method of manufacturing. A method of making a dif... |
2011
|
Invention
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Sputtering target assembly and method of making same. A method for producing a sputtering target ... |
|
Invention
|
Bimetallic target. A bimetallic rotary target formed of a first metal and a second metal for use ... |
|
Invention
|
Sputtering target with an insulating ring and a gap between the ring and the target.
A sputterin... |
|
Invention
|
Method of bonding rotatable ceramic targets to a backing structure.
This invention relates to a ... |
|
Invention
|
Sputter target.
In one aspect of the invention, a sputter target is provided comprising a backin... |
|
Invention
|
Sputter target. In one aspect of the invention, a sputter target is provided comprising a backing... |
2009
|
Invention
|
Method of making a sputter target and sputter targets made thereby. A method of making sputter ta... |
|
Invention
|
Circular groove pressing mechanism and method for sputtering target manufacturing. A method of ma... |
1999
|
P/S
|
sputter targets adapted for use in conjunction with cathodic sputter coating machines |
1997
|
P/S
|
Sputter targets and associated backing plates, both adapted for use in cathodic sputter coating e... |