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2024
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Invention
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Stocker compartment. Stocker compartment for storage of EUV pod components, comprising a pluralit... |
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Invention
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Method for cleaning a synthetic surface.
The invention relates to a method for cleaning a synthe... |
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2023
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Invention
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Stocker pod, method and stocker for storing a semiconductor fabrication article. Stocker pod (100... |
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Invention
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Method for inspecting a container and inspection system.
The present disclosure relates to a met... |
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2022
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Invention
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Automatic handling buffer for bare stocker. A buffer station for automatic material handling syst... |
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Invention
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Integrated handling system for semiconductor articles.
Methods and apparatuses for integrated cl... |
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Invention
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Stocker system. Stocker system for storage of a plurality of reticles, especially EUV reticles, c... |
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2021
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Invention
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Method and system for inspection of an inner pod or an outer pod of an euv pod.
Method for inspe... |
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Invention
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Method and system for inspection of an inner pod or an outer pod of an euv pod. Method for inspec... |
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Invention
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Cleaning systems and methods for semiconductor substrate storage articles.
Provided are methods ... |
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Invention
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Semiconductor stocker systems and methods.
In an embodiment, the present invention discloses cle... |
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Invention
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Euv reticle stocker and method of operating the same.
A one-piece clamping device, a storage sys... |
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Invention
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Euv reticle stocker and method of operating the same. A one-piece clamping device (200, 500), a s... |
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2020
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Invention
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Core module for semiconductor production facility machinery.
The invention relates to an apparat... |
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Invention
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Core module for semiconductor production facility machinery. The invention relates to an apparatu... |
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Invention
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Reticle compartment and diffusor plate. A reticle compartment defining an enclosed interior adapt... |
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Invention
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Euv reticle stocker and method of operating the same.
A clamping device, a storage system and an... |
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Invention
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Euv reticle stocker and method of operating the same. A clamping device (200, 500), a storage sys... |
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Invention
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Inspection system. The invention relates to an inspection system adapted for determining a state ... |
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2019
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Invention
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Container storage add-on for bare workpiece stocker. The present invention relates to apparatuses... |
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Invention
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Semiconductor stocker systems and methods. In an embodiment, the present invention discloses clea... |
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2018
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Invention
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Semiconductor cleaner systems and methods. An EUV cleaner system and process for cleaning a EUV c... |
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Invention
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Cleaning systems and methods for semiconductor substrate storage articles. Provided are methods a... |
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Invention
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Semiconductor cleaner systems and methods.
In an embodiment, the present invention discloses a E... |
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Invention
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Semiconductor cleaner systems and methods. −6 Torr) with purge gas, heaters and RGA sensors insid... |
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Invention
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Inspection system and method of inspection for substrate containers. The present invention relate... |
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Invention
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Method for inspecting a container and inspection system. The present invention relates to a metho... |
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Invention
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Method for controlling a plc using a pc program. The present invention relates to a method for co... |
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Invention
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Workpiece stocker with circular configuration. An improved stocker configuration for storing work... |
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2017
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Invention
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Reticle compartment and diffusor plate. The invention relates to a reticle compartment defining a... |
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Invention
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Method for cleaning a synthetic surface. The invention relates to a method for cleaning a synthet... |
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2016
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Invention
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Humidity control in semiconductor systems. Method for forming a clean environment for semiconduct... |
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Invention
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Recirculation substrate container purging systems. Methods and systems to reduce the consumption ... |
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2015
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Invention
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Redundantable robot assembly for workpiece transfer. A redundantable robotic mechanism is disclos... |
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Invention
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Substrate carrier having drip edge configurations. Substrate carrier can have drainage area leadi... |
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2014
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Invention
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Recirculation substrate container purging systems and methods. Methods and systems to reduce the ... |
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Invention
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Scalable stockers with automatic handling buffer. Scalable storage can be achieved with linear ar... |
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Invention
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Removable compartments for workpiece stocker. The present invention discloses apparatuses and met... |
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Invention
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Methods and apparatuses for roll-on coating.
Coating rollers accepting liquid media provide liqu... |
