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2025
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Invention
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Method and device for cleaning a semiconductor carrier device, and use of a cleaning fluid. Metho... |
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Invention
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Method and system for determining a concentration of at least one component of a gas in a contain... |
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Invention
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Vacuum chamber, method and system for treating a of semiconductor carrier devices. Provided is a ... |
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Invention
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Method and system for cleaning containers configured and adapted to store wafers or reticles. Met... |
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Invention
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Methods for cleaning a semiconductor carrier device. Disclosed are methods for cleaning a contain... |
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Invention
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Method for monitoring a state of a container and inspection system. The invention relates to a me... |
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Invention
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Improved carrier degassing. A treatment station for substrate storage and transport containers in... |
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Invention
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Container for storing and/or transporting a semiconductor fabrication article. The invention rela... |
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Invention
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Container, method and stocker for storing and/or transporting a semiconductor fabrication article... |
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Invention
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Stocker system for storage of reticles. Stocker system for storage of a plurality of reticles, es... |
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2024
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Invention
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Methods for cleaning semiconductor carrier devices. Provided are a method for cleaning a semicond... |
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Invention
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Stocker for storing a semiconductor fabrication article. The invention provides a stocker (100) f... |
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Invention
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Storage system for semiconductor production objects and storage module. Provided is a storage sys... |
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Invention
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Stocker system for storage of reticles, corresponding storage stocker and methods and devices for... |
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Invention
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Method for cleaning a synthetic surface.
A method for cleaning a plastic's surface so as to effe... |
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Invention
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Stocker for semiconductor fabrication articles and method for operating such a stocker. Stocker (... |
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Invention
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Container for storage and/or transport of a substrate. The present invention relates to a contain... |
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Invention
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A cleaning system and a method for cleaning a carrier for semiconductor substrates or at least a ... |
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Invention
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Stocker compartment. Stocker compartment for storage of EUV pod components, comprising a pluralit... |
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Invention
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Method for cleaning a synthetic surface.
The invention relates to a method for cleaning a synthe... |
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Invention
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Method for defect inspection of surfaces. A model for defect recognition on a surface under inspe... |
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2023
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Invention
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Stocker pod, method and stocker for storing a semiconductor fabrication article.
Stocker pod for... |
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Invention
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Stocker pod, method and stocker for storing a semiconductor fabrication article. Stocker pod (100... |
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Invention
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Method for inspecting a container and inspection system.
The present disclosure relates to a met... |
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2022
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Invention
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Automatic handling buffer for bare stocker. A buffer station for automatic material handling syst... |
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Invention
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Integrated handling system for semiconductor articles.
Methods and apparatuses for integrated cl... |
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Invention
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Stocker system. Stocker system for storage of a plurality of reticles, especially EUV reticles, c... |
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2021
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Invention
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Method and system for inspection of an inner pod or an outer pod of an euv pod.
Method for inspe... |
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Invention
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Method and system for inspection of an inner pod or an outer pod of an euv pod. Method for inspec... |
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Invention
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Cleaning systems and methods for semiconductor substrate storage articles.
Provided are methods ... |
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Invention
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Semiconductor stocker systems and methods.
In an embodiment, the present invention discloses cle... |
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Invention
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Euv reticle stocker and method of operating the same. A one-piece clamping device, a storage syst... |
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Invention
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Euv reticle stocker and method of operating the same. A one-piece clamping device (200, 500), a s... |
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2020
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Invention
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Core module for semiconductor production facility machinery. The invention relates to an apparatu... |
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Invention
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Reticle compartment and diffusor plate. A reticle compartment defining an enclosed interior adapt... |
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Invention
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Euv reticle stocker and method of operating the same.
A clamping device, a storage system and an... |
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Invention
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Euv reticle stocker and method of operating the same. A clamping device (200, 500), a storage sys... |
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Invention
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Inspection system. The invention relates to an inspection system adapted for determining a state ... |
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2019
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Invention
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Container storage add-on for bare workpiece stocker. The present invention relates to apparatuses... |
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Invention
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Semiconductor stocker systems and methods. In an embodiment, the present invention discloses clea... |
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2018
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Invention
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Semiconductor cleaner systems and methods. An EUV cleaner system and process for cleaning a EUV c... |
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Invention
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Cleaning systems and methods for semiconductor substrate storage articles. Provided are methods a... |
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Invention
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Inspection system and method of inspection for substrate containers. The present disclosure relat... |
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Invention
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Inspection system and method of inspection for substrate containers. The present invention relate... |
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Invention
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Method for inspecting a container and inspection system. The present invention relates to a metho... |
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Invention
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Method for controlling a plc using a pc program. The present invention relates to a method for co... |
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Invention
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Workpiece stocker with circular configuration. An improved stocker configuration for storing work... |
