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2024
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Invention
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Method for inspecting a semiconductor sample using a secondary-ion mass spectrometer with a focus... |
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2017
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P/S
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Apparatus and instruments for producing and representing micrometre-scale and nanometre-scale str... |
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2015
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P/S
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Apparatus for manufacturing nanometre-scale structures using electron beams, and for manipulating... |
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P/S
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Apparatus for manipulating nanometre-scale structures using robotic systems. Apparatus for measur... |
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2012
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P/S
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Apparatus and instruments for producing structures in the micrometre and nanometre range by means... |
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2009
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Invention
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Device for generating an ion beam with magnetic filter. The invention relates to a device (2) for... |
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Invention
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Device for generating an ion beam with cryogenic trap. This device (2) for generating an ion beam... |
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P/S
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Scanning electron microscopes for experimental electron beam lithography. |
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2005
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P/S
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Apparatus and instruments for the manufacture and modification of nanometer structures by means o... |
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P/S
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Apparatus and instruments for the manufacture of nanometer structures using electron beams, and m... |
