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2017
|
Invention
|
Slurry slip stream controller for cmp system.
A system for providing in situ analysis of the pol... |
|
2011
|
Invention
|
Active tribology management of cmp polishing material. An arrangement and method for managing the... |
|
|
Invention
|
Active tribology management of cmp polishing material.
An arrangement and method for managing th... |
|
2010
|
Invention
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Apertured abrasive disk assembly with improved flow dynamics. The evacuation properties of an abr... |
|
|
Invention
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Apertured abrasive disk assembly with improved flow dynamics.
The evacuation properties of an ab... |
|
2009
|
Invention
|
In-line effluent analysis method and apparatus for cmp process control. An apparatus and method f... |
|
|
Invention
|
In-line effluent analysis method and apparatus for cmp process control.
An apparatus and method ... |
