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2014
|
Invention
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Electron beam irradiation device, multi-electron beam irradiation device, adjustment method, and ... |
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2013
|
Invention
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Electron beam generating appartus, electron beam irradaition apparatus, multi-electron beam irrad... |
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2009
|
Invention
|
Electron beam applying apparatus and drawing apparatus. An electron beam applying apparatus inclu... |
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2008
|
Invention
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Surface emission type electron source and drawing device. A surface emission type electron source... |
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|
Invention
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Drawing method, drawing device, and information recording medium.
In a drawing method and device... |
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2007
|
Invention
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Aberration evaluation pattern, aberration evaluation method, aberration correction method, electr... |
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|
Invention
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Drawing method, drawing device, and information recording medium. In a drawing method and device,... |
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|
Invention
|
Electron beam recording apparatus. An electron beam recording apparatus is disclosed that records... |
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2004
|
Invention
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Electron-beam writing device and electron-beam writing method. The present invention aims at prov... |
