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2019
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Invention
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Sic film structure and method for manufacturing sic film structure. A SiC film structure capable ... |
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Invention
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Tubular body containing sic fiber and method for producing the same. A first SiC layer formed int... |
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Invention
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Film structure reproduction method and reproduction film structure. A method of easily reproducin... |
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Invention
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Method for regenerating film formation structure and regenerated film formation structure. The pr... |
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Invention
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Sic film structure. A SiC film structure for obtaining a three-dimensional SiC film by forming th... |
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Invention
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Sic freestanding film structure. A SiC Freestanding Film Structure capable of preventing a functi... |
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Invention
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Sic film single body structure. Provided is a SiC film single body structure with which an improv... |
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Invention
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Sic film structure. The present invention provides an SiC film structure that can be used as a se... |
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Invention
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Sic member and manufacturing method thereof.
A SiC member includes: a substrate having a referen... |
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Invention
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Sic member. A technology for securing favorable appearance of a SiC member, the SiC member includ... |
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Invention
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Sic member. The purpose of the present invention is to provide a technology of favorably ensuring... |
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Invention
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Sic member and manufacturing method for same. The purpose of the present invention is to provide ... |
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Invention
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Sic member and manufacturing method thereof.
A technology secures favorable appearance of an SiC... |
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Invention
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Sic coat. A SiC coat having an outer surface including a back face, a front face opposite to the ... |
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Invention
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Sic member and method for manufacturing same. The purpose of the present invention is to provide ... |
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Invention
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Sic coat. Provided is a technique for making an SiC coat interface less noticeable. This SiC coat... |
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2011
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Invention
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Silicon carbide substrate, semiconductor device, and soi wafer. Disclosed is a silicon carbide su... |
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Invention
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Plasma-resistant member and method for regenerating same.
Provided is a plasma-resistant member ... |
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Invention
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Plasma-resistant member and method for regenerating same. Provided is a plasma-resistant member w... |
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2008
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Invention
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Methods for manufacturing and reclaiming electrode for plasma processing apparatus. A plurality o... |
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2004
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Invention
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Silicon carbide product, method for producing same, and method for cleaning silicon carbide produ... |
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2002
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Invention
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Film thichness measuring monitor wafer. A wafer having a structure of enabling an SiC wafer to be... |
