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2009
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Invention
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New metal precursors containing beta-diketiminato ligands. Methods and compositions for depositin... |
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Invention
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Solid precursor sublimator. An apparatus and method for holding a solid precursor in a sublimator... |
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2008
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Invention
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Germanium precursors for gst film deposition. A method for depositing a germanium containing film... |
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Invention
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Low decomposition storage of a tantalum precursor. Methods of storing a precursor which decreases... |
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Invention
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Effluent gas recovery process for silicon production. Effluent gas from a polysilicon reactor (5)... |
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Invention
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Effluent gas recovery process for silicon production. Purified SiHCI3 is used as a sweep gas acro... |
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Invention
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Ruthenium and osmium precursor synthesis method. Methods of synthesizing ruthenium and osmium pre... |
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Invention
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Alkaline earth metal containing precursor solutions. Methods and compositions for depositing a fi... |
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Invention
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Liquefied gas supply system. Objective and task. To provide a liquefied gas supply system that ca... |
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Invention
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Gas supply system. Objective and Task - To provide a gas supply system that can reduce the capaci... |
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Invention
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Ruthenium precursor with two differing ligands for use in semiconductor applications. Methods of ... |
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Invention
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Thermal integration of oxygen plants. A process for the integration of a cryogenic air separation... |
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Invention
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Process and apparatus for the separation of a gaseous mixture. A process for separating carbon di... |
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Invention
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Process and apparatus for the separation of carbon dioxide from a gaseous mixture. A process for ... |
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Invention
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Non-flammable solvents for semiconductor applications. Methods for purging and cleaning a semicon... |
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Invention
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Gas control device with protective cover. A method and apparatus for providing a gas to or from a... |
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Invention
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New metal precursors for semiconductor applications. Methods and compositions for depositing meta... |
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Invention
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New cobalt precursors for semiconductor applications. Methods and compositions for depositing a c... |
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Invention
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Device and method for efficient mixing of two streams. In one embodiment, a method for generating... |
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Invention
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Systems and methods for mixing fluids. Methods and fluid delivery systems mix fluids together. A ... |
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Invention
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Method of cleaning stannane distribution system. Methods for cleaning a stannane distributions sy... |
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Invention
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Method and system of providing carbon dioxide-enriched gas for greenhouses. A feed gas is separat... |
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Invention
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Deposition of transition metal carbide containing films. Methods and compositions for the deposit... |
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Invention
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Methods and systems of purifying a gas mixture comprising two gases using granulated porous glass... |
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Invention
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Method for the recycling and purification of an inorganic metallic precursor. Methods and apparat... |
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Invention
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Deposition of ta- or nb-doped high-k films. Methods and compositions for depositing high-k films ... |
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Invention
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Method and apparatus to digitize pressure gauge information. This invention uses a flexible gauge... |
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Invention
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Methods and apparatus for providing a high purity acetylene product. Methods and apparatus for th... |
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Invention
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Method for low temperature thermal cleaning. Methods and apparatus for cleaning undesired substan... |
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Invention
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High speed data historian. Techniques for operating an archival database, referred to as a histor... |
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Invention
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Process for feed gas cooling in reboiler during co2 separation. An improved process for the separ... |
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Invention
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Process for recycling of top gas during co2 separation. An improved process for the separation of... |
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Invention
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Process for vaporizing the product co2 at two different pressures during co2 separation. An impro... |
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Invention
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Improved co2 separation apparatus and process for oxy-combustion coal power plants. An improved p... |
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Invention
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Dry ice blasting with ozone-containing carrier gas. A surface of a target item is treated by dire... |
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Invention
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Systems and methods for the separation of propylene and propane. Embodiments of the present inven... |
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2007
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Invention
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Method and vehicle for filling a gas storage vessel at enhanced flow rates. A compressed gas deli... |
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Invention
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Xenon retrieval system and retrieval device. To provide a simple highly-pure Xe retrieval method ... |
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Invention
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Coal upgrading utilizing carbon dioxide. Coal is upgraded through use of carbon dioxide and/or ni... |
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Invention
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Coal upgrading utilizing nitrogen. Coal is upgraded through use of carbon dioxide and/or nitrogen... |
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Invention
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Cryogenic air separation process and apparatus. A cryogenic process for the production of oxygen ... |
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Invention
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Steam methane reforming with lng regasification terminal for lng vaporization. Systems and method... |
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Invention
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Production of an inert blanket in a furnace. A system for delivering a fluid into a container inc... |
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Invention
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Method and apparatus for optimizing high fgr rate combustion with laser-based diagnostic technolo... |
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Invention
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Variable tube diameter for methane steam reformer (smr). A catalyst tube is provided, that includ... |
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Invention
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Dissolved oxygen profile to increase fermentation productivity and economics. Aerobic fermentatio... |
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Invention
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Vapor-reinforced expanding volume of gas to minimize the contamination of products treated in a m... |
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Invention
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Porous dielectric layers obtained from pore -forming precursors. The invention relates to porous ... |
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Invention
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Method of cleaning film forming apparatus and film forming apparatus. To provide a method of clea... |
