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2024
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Invention
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Detection of probabilistic process windows.
Methods, systems, and computer-readable mediums for ... |
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Invention
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System and method for generating and analyzing roughness measurements and their use for process m... |
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Invention
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Method of dispositioning and control of a semiconductor manufacturing process. A method for predi... |
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Invention
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Method of dispositioning and control of a semiconductor manufacturing process.
A method for pred... |
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2023
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Invention
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System and method for generating and analyzing roughness measurements.
In one embodiment, a meth... |
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2022
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Invention
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System and method for determining and/or predicting unbiased parameters associated with semicondu... |
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Invention
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Detection of probabilistic process windows. Methods, systems, and computer-readable mediums for c... |
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2021
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Invention
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System and method for generating and analyzing roughness measurements. In one embodiment, a metho... |
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Invention
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Edge detection system. An edge detection system is provided that generates a scanning electron mi... |
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Invention
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System and method for predicting stochastic-aware process window and yield and their use for proc... |
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Invention
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System and method for low-noise edge detection and its use for process monitoring and control. In... |
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2019
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Invention
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System and method for generating and analyzing roughness measurements. Systems and methods are di... |
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Invention
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Edge detection system and its use for machine learning. Systems and methods are disclosed that re... |
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Invention
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Edge detection system and its use for optical proximity correction. Systems and methods are discl... |
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2018
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Invention
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System and method for removing noise from roughness measurements. Systems and methods are disclos... |
