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2018
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Invention
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Apparatus of plural charged-particle beams. A multi-beam apparatus for observing a sample with hi... |
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Invention
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Charged particle source. This invention provides a charged particle source, which comprises an em... |
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2017
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Invention
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Load lock system for charged particle beam imaging. A load lock system for charged particle beam ... |
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Invention
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Apparatus of plural charged-particle beams. A new multi-beam apparatus with a total FOV variable ... |
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Invention
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Apparatus of plural charged-particle beams. One modified source-conversion unit and one method to... |
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2016
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Invention
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Test device for defect inspection. A structure, for defect inspection, is provided, which include... |
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Invention
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Apparatus of plural charged-particle beams. A secondary projection imaging system in a multi-beam... |
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Invention
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Method and system for inspecting an euv mask. A structure for grounding an extreme ultraviolet ma... |
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Invention
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Structure electron beam inspection system for inspecting extreme ultraviolet mask and structure f... |
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Invention
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Apparatus of plural charged-particle beams. A multi-beam apparatus for observing a sample with ob... |
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Invention
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Laser sde effect compensation by adaptive tuning. Laser sub-divisional error (SDE) effect is comp... |
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Invention
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Local alignment point calibration method in die inspection. A calibration method for calibrating ... |
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Invention
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Objective lens system for fast scanning large fov. The device includes a beam source for generati... |
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2015
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Invention
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Swing objective lens. A scanning electron microscope (SEM) with a swing objective lens (SOL) redu... |
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Invention
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Method and compound system for inspecting and reviewing defects. The present invention provides a... |
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Invention
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Apparatus of plural charged particle beams with multi-axis magnetic lenses. A new apparatus of pl... |
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Invention
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Energy filter for charged particle beam apparatus. This invention provides two methods for improv... |
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Invention
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Method and system for inspecting and grounding an euv mask. A structure for grounding an extreme ... |
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Invention
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Inspection method and system. An inspection method includes the following steps: identifying a pl... |
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Invention
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System and method for calibrating charge-regulating module. This invention provides a system and ... |
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Invention
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Method and system for fast inspecting defects. A method and system for inspecting defects saves s... |
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Invention
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Method for improving performance of an energy filter. This invention provides a method for improv... |
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Invention
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Electron beam apparatus. This invention provides a method for improving performance of a reflecti... |
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Invention
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Energy-discrimination detection device. This invention provides a method for improving performanc... |
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Invention
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Method and system for enhancing image quality. This invention relates to methods and systems for ... |
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2014
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Invention
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Multi-axis magnetic lens for focusing a plurality of charged particle beams. A multi-axis magneti... |
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Invention
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Metal seal for ultra high vacuum system. A metal gasket has a cross-sectional shape that is a six... |
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Invention
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Charged particle beam apparatus. The present invention provides a dual-beam apparatus which emplo... |
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Invention
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Charged particle beam apparatus. The present invention provides apparatuses to inspect small part... |
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Invention
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System and method for controlling charge-up in an electron beam apparatus. The present invention ... |
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Invention
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Hot spot identification, inspection, and review. A method for identifying, inspecting, and review... |
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Invention
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Apparatus of plural charged particle beams with multi-axis magnetic lens. An apparatus of plural ... |
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2011
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Invention
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Methods for promoting semiconductor manufacturing yield and classifying defects during fabricatin... |
