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2025
|
Invention
|
Pfas-free pags for broadband photolithography and advanced packaging technology. A new class of p... |
|
|
Invention
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Cyclic sulfonate compounds as photoacid generators in resist applications. Novel photoacid genera... |
|
|
P/S
|
Chemicals for use in lithography; Chemical preparations for use in processing photosensitive mate... |
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2022
|
Invention
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Oxathianium ion-containing sulfonic acid derivative compound as photoacid generators in resist ap... |
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2016
|
Invention
|
Sulfonic acid derivative compounds as photoacid generators in resist applications. Novel photoaci... |
