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2021
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Invention
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Robotic end effector equipped with replaceable wafer contact pads.
A robotic end effector is pro... |
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Invention
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Robotic end effector equipped with replaceable wafer contact pads. A robotic end effector is prov... |
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2020
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Invention
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Gas capacitor for semiconductor tool. A system is provided which includes a gas supply; a fluidic... |
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2019
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Invention
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Robotic arm assembly equipped with elbow hard stop.
A robot is provided which includes a hub; an... |
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Invention
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Robotic arm assembly equipped with elbow hard stop. A robot is provided which includes a hub; an ... |
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Invention
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Degas chamber lift hoop.
A lift hoop is provided which includes a frame having a central opening... |
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Invention
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Degas chamber lift hoop. A lift hoop is provided which includes a frame having a central opening,... |
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2018
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Invention
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Atmospheric robotic end effector. A robotic end effector is provided which includes a housing, an... |
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2015
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Invention
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Multi-component robotic hub mounting plate to facilitate hub removal.
A robot is provided which ... |
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2012
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Invention
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Extended wrist assembly for robotic arm. A robot is provided which includes (a) a first arm (313)... |
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2011
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Invention
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Wrist assembly for robotic arm. A wrist assembly (311) for a robotic arm or other mechanical devi... |
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2010
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Invention
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Edge grip end effector. An end effector blade (201) is provided which has a region (203) defined ... |
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Invention
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Hub assembly for robotic arm having pin spacers. A robotic hub assembly is provided which compris... |
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2009
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Invention
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Edge grip end effector.
A robot is provided which comprises a wafer blade (105) having a pocket ... |
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Invention
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Lower motor locking mount.
A robot is provided which comprises (a) a hub (311) disposed on a sub... |
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2008
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Invention
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Robotic assembly providing leveling and joint stress reduction. A robotic is provided which compr... |
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2007
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Invention
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Adjustable wrist design for robotic arm. A wrist assembly is provided for securing an end effecto... |
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2006
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Invention
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O-ring locking mount. An end effecter (201) is provided herein which comprises a blade (203) havi... |
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2005
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Invention
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Hub assembly for robotic arm having pin spacers.
A robotic hub assembly is provided which compri... |
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Invention
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Split assembly robotic arm. A robotic arm assembly (101) is provided which comprises a hub (103),... |
