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2024
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Invention
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Substrate mapping using deep neural-networks.
Various examples include a system and network to m... |
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Invention
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Non-destructive inspection and manufacturing metrology systems and methods.
Measuring or inspect... |
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Invention
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Generating predictions and/or other analyses using artificial intelligence.
A method for predict... |
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Invention
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Generating predictions and/or other analyses using artificial intelligence. A method for predicti... |
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Invention
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Photo response non-uniformity correction during semiconductor inspection. Image sensors assist in... |
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Invention
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Tracking and/or predicting substrate yield during fabrication.
Tracking and/or predicting the yi... |
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Invention
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Tracking and/or predicting substrate yield during fabrication. Tracking and/or predicting the yie... |
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Invention
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A system and method for fast microscopy. A time resolved reflectivity metrology device images str... |
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Invention
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System and method for fast microscopy.
A time resolved reflectivity metrology device images stru... |
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Invention
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Multi pump-probe encoding-decoding for opto-acoustic metrology. An opto-acoustic metrology device... |
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Invention
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Multi pump-probe encoding-decoding for opto-acoustic metrology.
An opto-acoustic metrology devic... |
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Invention
|
Transfer learning for metrology data analysis. Non-contact measurements, such as optical measurem... |
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Invention
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Transfer learning for metrology data analysis.
Non-contact measurements, such as optical measure... |
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Invention
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Substrate edge patterning techniques. Various techniques to quickly image one or more edge region... |
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Invention
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Adaptive spatial pattern recognition for defect detection. Systems and methods for identifying an... |
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Invention
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Adaptive spatial pattern recognition for defect detection.
Systems and methods for identifying a... |
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Invention
|
Interferometer with auxiliary lens for measurement of a transparent test object. A Mach-Zehnder i... |
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2023
|
Invention
|
Substrate edge patterning techniques.
Various techniques to quickly image one or more edge regio... |
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Invention
|
Polarization interferometer. A polarization interferometer is configured to characterize a test o... |
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Invention
|
Overlay correction for advanced integrated-circuit devices.
Various examples described herein in... |
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Invention
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Overlay correction for advanced integrated-circuit devices. Various examples described herein inc... |
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Invention
|
Stage actuator particle shield. A particle shield for an actuator housing in a semiconductor equi... |
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Invention
|
Inspection method and system for integrated circuit substrates. An inspection system for capturin... |
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Invention
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Two-axis-motion from a linear actuator. Various examples include an apparatus to provide motion i... |
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Invention
|
Stage actuator particle shield.
A particle shield for an actuator housing in a semiconductor equ... |
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Invention
|
Combined modeling and machine learning in optical metrology. Complex three-dimensional structures... |
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Invention
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Combined modeling and machine learning in optical metrology.
Complex three-dimensional structure... |
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Invention
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Measurements of structures in presence of signal contaminations. Contamination of metrology data ... |
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Invention
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Parameter aggregation and normalization for manufacturing tools. Management and maintenance of to... |
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Invention
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Parameter aggregation and normalization for manufacturing tools.
Management and maintenance of t... |
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Invention
|
Substrate defect-detection and comparison.
Various examples described herein include image-proce... |
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Invention
|
Substrate defect-detection and comparison. Various examples described herein include image-proces... |
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Invention
|
Apparatus to characterize substrates and films. Various examples include an apparatus to characte... |
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Invention
|
Periodic-pattern background removal. Various examples described herein include various mechanisms... |
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Invention
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Periodic-pattern background removal.
Various examples described herein include various mechanism... |
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Invention
|
Composite data for device metrology. A machine learning model that uses composite metrology data ... |
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Invention
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Multiple sources of signals for hybrid metrology using physical modeling and machine learning. Ph... |
|
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Invention
|
Composite data for device metrology.
A machine learning model that uses composite metrology data... |
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Invention
|
Metrology solutions for complex structures of interest.
Complex structures, such as gate-all-aro... |
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Invention
|
Multiple sources of signals for hybrid metrology using physical modeling and machine learning.
P... |
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Invention
|
Performance management of semiconductor substrate tools.
Proactive management of semiconductor s... |
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Invention
|
Defect detection in manufactured articles using multi-channel images. A system and/or method of d... |
|
|
Invention
|
Defect detection in manufactured articles using multi-channel images.
A system and/or method of ... |
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Invention
|
Interferometer with auxiliary lens for measurement of a transparent test object.
A Mach-Zehnder ... |
|
|
Invention
|
Mask and procedure for process performance detection.
A metrology target is configured for measu... |
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2022
|
Invention
|
Optical metrology with influence map of unknown section.
Optical measurement of a sample that in... |
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Invention
|
Apparatus to characterize substrates and films.
Various examples include an apparatus to charact... |
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Invention
|
Mitigation of undesired spectral effects in optical metrology.
Optical measurement of a sample t... |
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P/S
|
Profilometer, namely, a measuring instrument used to measure
a surface profile and surface rough... |
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P/S
|
Instruments for the measurement of thicknesses and
mechanical properties of metal and opaque films. |
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P/S
|
Software for data analysis and control manufacturing. |
|
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P/S
|
Metrology equipment that employs spectroscopic ellipsometry
and polarized reflectometry for meas... |
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P/S
|
Thin film, structure, and wafer surface measurement devices,
namely, metrology and inspection to... |
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|
P/S
|
Optical fluorescence imaging devices for integrated circuit
device inspection. |
|
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P/S
|
Lithography machines for the manufacture of
microelectronics, integrated circuits, light emittin... |
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P/S
|
downloadable software for use in analyzing manufacturing data, making predictions based on manufa... |
|
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P/S
|
Metrology inspection equipment for use in the manufacturing,
inspection, testing and repair of s... |
|
|
P/S
|
Inspection and metrology equipment and devices, namely,
equipment and devices that sense and/or ... |
|
|
P/S
|
Metrology equipment that employs spectroscopic ellipsometry and polarized reflectometry for measu... |
|
|
P/S
|
Instruments for the measurement of thicknesses and mechanical properties of metal and opaque films |
|
|
P/S
|
Inspection and metrology equipment and devices, namely, equipment and devices that sense and/or c... |
|
|
P/S
|
Lithography machines for the manufacture of microelectronics, integrated circuits, light emitting... |
|
|
Invention
|
Post-overlay compensation on large-field packaging.
A lithography challenge for large heterogene... |
|
|
P/S
|
Profilometer, namely, a measuring instrument used to measure a surface profile and surface roughness |
|
2021
|
Invention
|
A system and method for performing alignment and overlay measurement through an opaque layer.
An... |
|
|
P/S
|
Picosecond optoacoustic system comprised of machines,
components and operating software for char... |
|
|
P/S
|
Automated system used to measure thin film thickness of
dielectric coatings and critical dimensi... |
|
|
P/S
|
Automated system comprising a broad band spectroscopic ellipsometer and reflectometer for use in ... |
|
|
P/S
|
Picosecond optoacoustic system comprised of machines, components and operating software for chara... |
|
2020
|
P/S
|
Recorded computer software for use in the operation, control and calibration of metrology inspect... |
|
|
P/S
|
Fourier transform infrared system for determining the
composition and quality of semiconductor s... |
|
|
P/S
|
Electronic instruments for use in inspection and measurement
of industrial components, namely, a... |
|
|
P/S
|
Providing on-line non-downloadable modeling, visualization and analysis software for use in analy... |
|
|
P/S
|
Fourier transform infrared system for determining the composition and quality of semiconductor su... |
|
|
P/S
|
Electronic instruments for use in inspection and measurement of industrial components, namely, an... |
|
2019
|
P/S
|
Machines for manufacturing semiconductors. |
|
|
P/S
|
Metrology inspection equipment for use in the manufacturing, inspection, testing and repair of se... |
|
2018
|
P/S
|
Machines for manufacturing semiconductors |
|
|
P/S
|
Machines for manufacturing semiconductors. Design and development of methods of accommodating dif... |
|
|
P/S
|
Inspection equipment and devices for inspecting and characterizing substrates such as semiconduct... |
|
2017
|
P/S
|
Computer software for determining and assessing characteristics of 3D structures, such as bumps, ... |
|
|
P/S
|
Providing nondownloadable graphical user interface software for calibrating differences in dispar... |
|
2016
|
P/S
|
Inspection and metrology equipment and devices; instruments and devices that sense and/or capture... |
|
|
P/S
|
Inspection equipment and devices, namely, equipment and devices that sense and/or capture images ... |
|
|
P/S
|
Inspection and metrology equipment and devices, namely, instruments and devices that sense and/or... |
