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2024
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Invention
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Ceramic susceptor and method of manufacturing the same.
The present invention relates to a ceram... |
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Invention
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Susceptor manufacturing method and susceptor manufactured by the same.
The present disclosure re... |
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Invention
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Ceramic susceptor.
The present disclosure relates to a ceramic susceptor, and the ceramic suscep... |
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2023
|
Invention
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Susceptor and method of manufacturing the same.
The present disclosure provides a susceptor incl... |
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Invention
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Electrostatic chuck heater and manufacturing method therefor.
The present invention relates to a... |
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Invention
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Ceramic susceptor.
Provided is a ceramic susceptor, which includes a ceramic plate with a radio-... |
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Invention
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Substrate heating device configured to suppress crack generation.
The present disclosure relates... |
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Invention
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Ceramic susceptor. The present disclosure relates to a ceramic susceptor. The ceramic susceptor o... |
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Invention
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Electrostatic chuck.
The present disclosure relates to an electrostatic chuck having an efficien... |
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Invention
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Ceramic heater. The present invention relates to a two-zone heating element which is embedded in ... |
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2022
|
Invention
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Method for manufacturing ceramic susceptor.
Disclosed is a method for manufacturing a ceramic su... |
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Invention
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Aluminum nitride sintered body and member for semiconductor manufacuting apparatus comprising sam... |
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Invention
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Electrostatic chuck. The present disclosure relates to an electrostatic chuck. The electrostatic ... |
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Invention
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Susceptor for high-temperature use having shaft with low thermal conductivity. 8 Ω·cm or more at ... |
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Invention
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Substrate heating apparatus with enhanced temperature uniformity characteristic.
The present dis... |
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Invention
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Ceramic susceptor. The present invention relates to a ceramic susceptor. The ceramic susceptor of... |
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2021
|
Invention
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Cryogenic susceptor and electric connector assembly used therein. Disclosed is a susceptor which ... |
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Invention
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Bonding head and bonding device having same. A bonding head comprises: a base block; an air block... |
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Invention
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Method for manufacturing ceramic heater.
The present disclosure relates to a method for manufact... |
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2020
|
Invention
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Electrostatic chuck having a cooling structure. Disclosed is an electrostatic chuck with a coolin... |
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Invention
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Susceptor and manufacturing method therefor.
Disclosed are a susceptor for enabling uniform plas... |
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Invention
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Susceptor and manufacturing method therefor. Disclosed are a susceptor for enabling uniform plasm... |
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Invention
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Ceramic heater. The present invention relates to a ceramic heater. The ceramic heater of the pres... |
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Invention
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Electrostatic chuck heater and manufacturing method therefor. The present invention relates to an... |
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Invention
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Connection member for ceramic heater. The present invention relates to a connection member for a ... |
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Invention
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Electro static chuck. Disclosed is an electro static chuck. Disclosed is an electro static chuck ... |
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Invention
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Ceramic heater and manufacturing method thereof.
The present invention relates to a ceramic heat... |
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Invention
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Ceramic heater and manufacturing method therefor.
The present invention relates to a ceramic hea... |
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Invention
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Ceramic heater and manufacturing method thereof. The present invention relates to a ceramic heate... |
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Invention
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Ceramic heater and manufacturing method therefor. The present invention relates to a ceramic heat... |
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2019
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Invention
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Ceramic heater. A ceramic heater includes a heating element, and the ceramic heater is characteri... |
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Invention
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Ceramic heater. The present invention relates to a ceramic heater and, more specifically, to a ce... |
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Invention
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Ceramic heater for independently controlling middle region.
The present invention relates to a c... |
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Invention
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Ceramic heater for independently controlling middle region. The present invention relates to a ce... |
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2018
|
Invention
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Ceramic heater.
A ceramic heater includes a ceramic body having a plurality of pin holes for a v... |
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Invention
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Ceramic heater having improved durability. Disclosed is a ceramic heater and a ceramic plate for ... |
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2016
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Invention
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Substrate heating apparatus with enhanced temperature uniformity characteristic. The present inve... |
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2010
|
Invention
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Method of manufacturing multilayer ceramic substrates. In a method of manufacturing a multilayer ... |
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2008
|
Invention
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Method for preparing a sintered body of aluminum nitride. 15 Ωcm or more at a normal temperature ... |
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2006
|
Invention
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High dense sintered body of aluminum nitride, method for preparing the same and member for manufa... |
