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2022
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Invention
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Conveyance equipment, discharge fluid rectification cover, and skirt.
A conveyance equipment inc... |
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Invention
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Transport device, discharge rectification cover, and skirt. The present invention improves the su... |
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2021
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Invention
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Conveyance device.
A conveyance device includes a plate-shaped main body that faces a plate-shap... |
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Invention
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Conveyance device. A conveyance device, according to the present invention, comprises a plate-sha... |
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2019
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Invention
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Swirl-flow forming body. A swirl-flow forming body includes a through-hole; a jetting port that i... |
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Invention
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Swirl flow forming body. A swirl flow forming body 1 is provided with: a through-hole 102; an eje... |
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2018
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Invention
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Suction device. A suction device that holds a member by suction in a stable manner is provided. T... |
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Invention
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Suction device. |
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2017
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Invention
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Baffle plate. Baffle plate to be attached to fluid flow-forming body includes baffle plate main b... |
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Invention
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Baffle plate. A baffle plate 2 mounted to a swirl forming body 1 is provided with: a baffle plate... |
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Invention
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Swirl flow-forming body and suction device. Swirl flow-forming body includes main body, first end... |
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Invention
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Rotational flow-forming body and sucking device. A rotational flow-forming body 3 is provided wit... |
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P/S
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Wafer conveyer in semiconductor manufacturing equipment,
conveyer of glass substrates, semicondu... |
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2016
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Invention
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Suction device. Suction device includes swirl flow-forming body that forms a swirl flow to apply ... |
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Invention
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Suction device. A suction device 10 is provided with a spiral-flow forming body 1 for forming a s... |
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Invention
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Suction equipment. Suction equipment 10 is provided with a swirl flow-forming body 1, a baffle pl... |
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Invention
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Suction device. [Problem] To stably suction a suction-receiving member in a suction device for im... |
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2015
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Invention
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Control device and control method. This control device controls a flow rate of a liquid to be sup... |
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2014
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Invention
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Conveyance equipment.
Conveyance equipment for conveying a plate-like member includes plural ite... |
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Invention
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Holding equipment, holding system, control method, and conveyance equipment.
Swirl flow-forming ... |
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Invention
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Holding equipment.
Holding equipment for holding a plate-like member by discharging fluid to gen... |
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Invention
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Holding device. A holding device that holds plate-shaped members by generating negative pressure ... |
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Invention
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Holding device, holding system, control method, and conveyance device. A swirl flow formation bod... |
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Invention
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Conveyance device. A conveyance device (10) that conveys plate-shaped members, said conveyance de... |
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2012
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Invention
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Non-contacting conveyance equipment. Non-contacting conveyance equipment for conveying a plate-li... |
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Invention
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Noncontact conveyance device. The present invention restrains a plate-like member (W) from turnin... |
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2006
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Invention
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Non-contact delivery device. Attention is paid on a micro energy loss which has not been consider... |
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2005
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Invention
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Bernoulli effect air nozzle for silicone wafer pickup tool |
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2001
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Invention
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Non-contacting conveyance equipment. A non-contacting conveyance equipment comprises: a body havi... |
