|
2024
|
Invention
|
Polymer composition for manufacturing hard mask and method for manufacturing semiconductor device... |
|
2012
|
Invention
|
Hydrophilic photoacid generator and resist composition comprising same. Disclosed are a hydrophil... |
|
|
Invention
|
Additive for resist and resist composition comprising same. A resist additive represented by Form... |
|
|
Invention
|
Additive for resist and resist composition comprising same. Provided are an additive for resist r... |
|
|
Invention
|
Organic anti reflective layer composition. Disclosed is an organic antireflective film compositio... |
|
|
Invention
|
Sulfonium compound, photoacid generator, and resist composition. A sulfonium compound represented... |
|
|
Invention
|
Copolymer for organic antireflective film, monomer, and composition comprising the copolymer. Dis... |
|
|
Invention
|
Photoacid generator, method for producing the same, and resist composition comprising the same. A... |
|
2011
|
Invention
|
Sulfonium compound, photo-acid generator, and method for manufacturing the same. A sulfonium comp... |
|
|
Invention
|
Polymer, method for producing the same, and resist composition containing the same. Provided is a... |
|
|
Invention
|
Organic anti-reflective layer composition containing ring-opened phthalic anhydride and method fo... |
|
2009
|
Invention
|
Photoacid generator, copolymer, chemically amplified resist composition, and method of forming pa... |
|
|
Invention
|
Photoacid generator containing aromatic ring. An acid generator represented by the following form... |
|
|
Invention
|
Onium salt compound, polymer compound comprising the salt compound, chemically amplified resist c... |
|
2008
|
Invention
|
Acid generating agent for chemically amplified resist compositions. An acid generating agent repr... |
|
|
Invention
|
Acid generating agent for chemically amplified resist compositions. An acid generating agent used... |
|
|
Invention
|
Copolymer and composition for organic and antireflective layer. The present invention provides an... |
|
|
Invention
|
Light absorbent and organic antireflection coating composition containing the same. The present i... |
|
2005
|
Invention
|
Copolymer of alicyclic olefin having secondary hydroxyl group and acryl compound, and chemically ... |
|
2004
|
Invention
|
Polymer and chemically amplified resist composition containing the same. A chemically amplified r... |
|
2003
|
Invention
|
Acid generator and thin film composition containing the same. wherein X is alkyl or aryl group an... |
|
2002
|
Invention
|
Polymer for chemically amplified resist and chemically amplified resist composition containing th... |
|
|
Invention
|
Acid-labile polymer and resist composition. A chemically amplified resist composition consists of... |
|
2001
|
Invention
|
Chemically amplified resist composition containing low molecular weight additives. Disclosed is a... |
|
2000
|
Invention
|
Chemically amplified resist composition containing norbornane type low molecular additive. This i... |
