2022
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Invention
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Inertial sensor and method.
An inertial sensor comprising; a central anchor; a proof mass, where... |
2021
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Invention
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Dual and triple axis accelerometers.
An accelerometer comprising: a frame; a first proof mass su... |
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Invention
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Single axis resonant accelerometer.
An accelerometer comprising: a frame; one or more proof mass... |
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Invention
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Mode localised accelerometer.
An accelerometer comprising: a frame; one or more proof masses sus... |
2020
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Invention
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Multiply encapsulated micro electrical mechanical systems device.
There is provided a micro elec... |
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Invention
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Multiply encapsulated micro electrical mechanical systems device. There is provided a micro elect... |
2019
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Invention
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Inertial sensor and method of inertial sensing with tuneable mode coupling strength. There is pro... |
2018
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Invention
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High performance micro-electro-mechanical systems accelerometer. There is provided a resonant sen... |
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Invention
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High performance micro-electro-mechanical systems accelerometer with suspended sensor arrangement... |
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Invention
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High performance micro-electro-mechanical systems accelerometer with electrostatic control of pro... |
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Invention
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Method of optimising the performance of a mems rate gyroscope. A method of tuning a vibratory gyr... |
2017
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Invention
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Gravimeter or inertial sensor system using a resonant sensor and method of operating a gravimeter... |
2013
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Invention
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Dual and triple axis inertial sensors and methods of inertial sensing. An inertial sensor compris... |
2012
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Invention
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Mems inertial sensor and method of inertial sensing. The invention comprises an inertial sensor c... |
2011
|
Invention
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Mems inertial sensor and method of inertial sensing. The invention comprises an inertia! sensor c... |