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2024
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Invention
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Fluid delivery system. Fluid delivery systems are important component assemblies used for semicon... |
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Invention
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Modular electronics for flow control.
Systems for manufacturing semiconductors are essential to ... |
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Invention
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Modular electronics for flow control. Systems for manufacturing semiconductors are essential to e... |
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Invention
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Method of manufacturing semiconductors using fluid delivery system.
A method of manufacturing a ... |
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Invention
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Fluid flow components and system incorporating same.
Apparatuses for controlling fluid flow are ... |
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Invention
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Fluid flow components and system incorporating same. Apparatuses for controlling fluid flow are i... |
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Invention
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Modular substrate assembly and system incorporating same.
Apparatuses for controlling fluid flow... |
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Invention
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Modular substrate assembly and system incorporating same. Apparatuses for controlling fluid flow ... |
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Invention
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Fluid delivery system.
Systems for processing articles are essential for semiconductor fabricati... |
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2023
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Invention
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Flow control system, method, and apparatus.
A gas flow control system for delivering a plurality... |
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Invention
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Laminar flow restrictor and seal for same.
Apparatuses for controlling gas flow are important co... |
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Invention
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Seal insertion tool for a fluid delivery module and method of installing a seal into a fluid deli... |
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Invention
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Method of controlling fluid flow.
Systems for processing articles are essential for semiconducto... |
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Invention
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Method of controlling fluid flow. Systems for processing articles are essential for semiconductor... |
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Invention
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Seal retainer for a component assembly and method of installing a component into an apparatus for... |
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Invention
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Fluid control system.
An improved fluid delivery system and method that directly controls the co... |
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Invention
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Fluid delivery module. Apparatuses for controlling fluid flow are important components for delive... |
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Invention
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Fluid delivery module.
Apparatuses for controlling fluid flow are important components for deliv... |
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2022
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Invention
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Method of manufacturing semiconductors using fluid delivery system. A substrate block for a fluid... |
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Invention
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Modular fitting assembly and system incorporating same.
Apparatuses for controlling fluid flow a... |
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Invention
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Modular fitting assembly and system incorporating same. Apparatuses for controlling fluid flow ar... |
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Invention
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Laminar flow restrictor and seal for same. Apparatuses for controlling gas flow are important com... |
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Invention
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Guided flow valve assembly and system incorporating same. Apparatuses for controlling fluid flow ... |
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Invention
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Guided flow valve assembly and system incorporating same.
Apparatuses for controlling fluid flow... |
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Invention
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Fluid flow control system comprising a manifold assembly. Systems for processing articles are ess... |
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2021
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Invention
|
Method of manufacturing semiconductors using fluid delivery system. A method of processing semico... |
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Invention
|
Flow control system, method, and apparatus. A gas flow control system for delivering a plurality ... |
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|
Invention
|
Fluid control system. An improved fluid delivery system and method that directly controls the con... |
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P/S
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Manufacture of gas and liquid delivery systems, chemical delivery systems, gas systems, valve man... |
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Invention
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Fluid delivery system. A fluid delivery system may include a substrate block having an upper surf... |
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2020
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Invention
|
Flow control system, method, and apparatus. A mass flow control apparatus having a monolithic bas... |
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Invention
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Flow control system, method, and apparatus.
In one embodiment, a method for delivering a gas at ... |
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Invention
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Laminar flow restrictor. Apparatuses for controlling gas flow are important components for delive... |
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Invention
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Seal for a flow restrictor. Apparatuses for controlling gas flow are important components for del... |
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P/S
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modular substrate parts for semiconductor manufacturing machines |
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Invention
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Method of achieving improved transient response in apparatus for controlling flow and system for ... |
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2019
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Invention
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Apparatus for splitting flow of process gas and method of operating same. Apparatuses for control... |
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2018
|
Invention
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Liquid delivery system. A fluid delivery system may include a substrate block having an upper sur... |
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2015
|
P/S
|
Manufacture of gas and liquid delivery systems, chemical
delivery systems, gas systems, valve ma... |
