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2025
|
Invention
|
Flow control system, method, and apparatus.
In one embodiment, a flow control system for deliver... |
|
|
Invention
|
Guided flow valve assembly and system incorporating same.
Apparatuses for controlling fluid flow... |
|
2024
|
Invention
|
Fluid delivery system.
Fluid delivery systems are important component assemblies used for semico... |
|
|
Invention
|
Systems and apparatus for controlling fluid flow.
Systems for processing articles are essential ... |
|
|
Invention
|
Systems and apparatus for controlling fluid flow. Systems for processing articles are essential f... |
|
|
Invention
|
Fluid delivery system. Fluid delivery systems are important component assemblies used for semicon... |
|
|
Invention
|
Modular electronics for flow control.
Systems for manufacturing semiconductors are essential to ... |
|
|
Invention
|
Modular electronics for flow control. Systems for manufacturing semiconductors are essential to e... |
|
|
Invention
|
Method of manufacturing semiconductors using fluid delivery system.
A method of manufacturing a ... |
|
|
Invention
|
Fluid flow components and system incorporating same.
Apparatuses for controlling fluid flow are ... |
|
|
Invention
|
Fluid flow components and system incorporating same. Apparatuses for controlling fluid flow are i... |
|
|
Invention
|
Modular substrate assembly and system incorporating same.
Apparatuses for controlling fluid flow... |
|
|
Invention
|
Modular substrate assembly and system incorporating same. Apparatuses for controlling fluid flow ... |
|
|
Invention
|
Fluid delivery system.
Systems for processing articles are essential for semiconductor fabricati... |
|
2023
|
Invention
|
Flow control system, method, and apparatus.
A gas flow control system for delivering a plurality... |
|
|
Invention
|
Laminar flow restrictor and seal for same.
Apparatuses for controlling gas flow are important co... |
|
|
Invention
|
Seal insertion tool for a fluid delivery module and method of installing a seal into a fluid deli... |
|
|
Invention
|
Method of controlling fluid flow.
Systems for processing articles are essential for semiconducto... |
|
|
Invention
|
Method of controlling fluid flow. Systems for processing articles are essential for semiconductor... |
|
|
Invention
|
Seal retainer for a component assembly and method of installing a component into an apparatus for... |
|
|
Invention
|
Fluid control system.
An improved fluid delivery system and method that directly controls the co... |
|
|
Invention
|
Fluid delivery module. Apparatuses for controlling fluid flow are important components for delive... |
|
|
Invention
|
Fluid delivery module.
Apparatuses for controlling fluid flow are important components for deliv... |
|
2022
|
Invention
|
Method of manufacturing semiconductors using fluid delivery system. A substrate block for a fluid... |
|
|
Invention
|
Modular fitting assembly and system incorporating same.
Apparatuses for controlling fluid flow a... |
|
|
Invention
|
Modular fitting assembly and system incorporating same. Apparatuses for controlling fluid flow ar... |
|
|
Invention
|
Laminar flow restrictor and seal for same. Apparatuses for controlling gas flow are important com... |
|
|
Invention
|
Guided flow valve assembly and system incorporating same. Apparatuses for controlling fluid flow ... |
|
|
Invention
|
Fluid flow control system comprising a manifold assembly. Systems for processing articles are ess... |
|
2021
|
Invention
|
Method of manufacturing semiconductors using fluid delivery system. A method of processing semico... |
|
|
Invention
|
Flow control system, method, and apparatus. A gas flow control system for delivering a plurality ... |
|
|
Invention
|
Fluid control system. An improved fluid delivery system and method that directly controls the con... |
|
|
P/S
|
Manufacture of gas and liquid delivery systems, chemical delivery systems, gas systems, valve man... |
|
|
Invention
|
Fluid delivery system. A fluid delivery system may include a substrate block having an upper surf... |
|
2020
|
Invention
|
Laminar flow restrictor. Apparatuses for controlling gas flow are important components for delive... |
|
|
Invention
|
Seal for a flow restrictor. Apparatuses for controlling gas flow are important components for del... |
|
|
P/S
|
modular substrate parts for semiconductor manufacturing machines |
|
2018
|
Invention
|
Liquid delivery system. A fluid delivery system may include a substrate block having an upper sur... |
|
2015
|
P/S
|
Manufacture of gas and liquid delivery systems, chemical
delivery systems, gas systems, valve ma... |
