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2024
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Invention
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Determination of imaging transfer function of a charged-particle exposure apparatus using isofoca... |
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Invention
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Optimizing image distortion in a multi beam charged particle processing apparatus.
The invention... |
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Invention
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Method for determining focal properties in a target beam field of a multi-beam charged-particle p... |
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Invention
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Device and method for calibrating a charged-particle beam.
A beam calibration device is presente... |
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2023
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Invention
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Adjustable magnetic lens having permanent-magnetic and electromagnetic components.
A fine-adjust... |
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P/S
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Semiconductor manufacturing machines and apparatus; machines and apparatus for the production of ... |
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P/S
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Semiconductor manufacturing machines and apparatus and
machines and apparatus for producing in r... |
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Invention
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Adjustable permanent magnetic lens having thermal control device.
A fine-adjustable charged part... |
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Invention
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Adjustable permanent magnetic lens having shunting device.
A fine-adjustable charged particle le... |
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Invention
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Multi-beam pattern definition device.
The invention relates to a multi-beam pattern definition d... |
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P/S
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semiconductor manufacturing machines and apparatus and Machines and apparatus for producing in re... |
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2022
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Invention
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Beam pattern device having beam absorber structure. A multi-beam pattern definition device for us... |
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Invention
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Electromagnetic lens.
A fine-adjustable electromagnetic lens for a charged-particle optical appa... |
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Invention
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Pattern data processing for programmable direct-write apparatus. In a writing process in a charge... |
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2021
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Invention
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Electron beam lithography apparatus, electron beam lithography method, and recording medium.
An ... |
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Invention
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Electron beam rendering device, electron beam rendering method, and recording medium. [Problem] I... |
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Invention
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Charged-particle source. A charged-particle source for generating a charged-particle comprises a ... |
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Invention
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Correction of blur variation in a multi-beam writer.
In order to compensate for undesired effect... |
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2020
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Invention
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Adapting the duration of exposure slots in multi-beam writers. (iii) calculating durations for th... |
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2019
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Invention
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Charged-particle source and method for cleaning a charged-particle source using back-sputtering. ... |
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P/S
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Machines and apparatus for the production of semiconductors
and semiconductor devices, of electr... |
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P/S
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Machines and apparatus for the production of semiconductors and semiconductor devices, of electro... |
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Invention
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Non-linear dose- and blur-dependent edge placement correction. A rasterized exposure method imple... |
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2018
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Invention
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Method for irradiating a target using restricted placement grids. A method for irradiating a targ... |
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Invention
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Dose-related feature reshaping in an exposure pattern to be exposed in a multi beam writing appar... |
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Invention
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Advanced dose-level quantization of multibeam-writers. In a charged-particle multi-beam writing m... |
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2017
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Invention
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Method for compensating pattern placement errors caused by variation of pattern exposure density ... |
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2016
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Invention
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Multi-beam writing using inclined exposure stripes. To irradiate a target with a beam of energeti... |
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Invention
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Bi-directional double-pass multi-beam writing. To irradiate a target with a beam of energetic ele... |
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Invention
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Multi-beam writing of pattern areas of relaxed critical dimension. To irradiate a target with a b... |
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2015
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Invention
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Correction of short-range dislocations in a multi-beam writer. Method for computing an exposure p... |
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Invention
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Customizing a particle-beam writer using a convolution kernel. An exposure pattern is computed wh... |
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Invention
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Compensation of imaging deviations in a particle-beam writer using a convolution kernel. An expos... |
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Invention
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Compensation of dose inhomogeneity using overlapping exposure spots. An exposure pattern is compu... |
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Invention
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Multi-beam tool for cutting patterns. In a charged-particle multi-beam processing apparatus for e... |
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Invention
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Multi-beam tool for cutting patterns.
In a charged-particle multi-beam processing apparatus for ... |
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Invention
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Compensation of defective beamlets in a charged-particle multi-beam exposure tool. An exposure pa... |
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2014
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Invention
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Method for charged-particle multi-beam exposure. To irradiate a target with a beam of energetic r... |
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Invention
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Pattern definition device having multiple blanking arrays. A pattern definition (PD) device for u... |
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Invention
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High-voltage insulation device for charged-particle optical apparatus. A high-voltage insulation ... |
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2011
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Invention
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Method for multi-beam exposure on a target. 2), possibly a complementary subset with respect to a... |
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2010
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Invention
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Pattern definition device with multiple multibeam array. A multi-beam pattern definition device (... |
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Invention
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Multi-beam deflector array means with bonded electrodes. The invention relates to a multi-beam de... |
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Invention
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Method for maskless particle-beam exposure. For maskless irradiating a target with a beam of ener... |
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Invention
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Global point spreading function in multi-beam patterning. In a particle multi-beam structuring ap... |
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Invention
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Method for producing a multi-beam deflector array device having electrodes. The disclosure relate... |
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2009
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Invention
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Method for maskless particle-beam exposure. In a maskless particle multibeam processing apparatus... |
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Invention
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Constant current multi-beam patterning. The invention relates to a method for forming a pattern o... |
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Invention
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Compensation of dose inhomogeneity and image distortion. An improved aperture arrangement in a de... |
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2008
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Invention
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Multi-beam source. A multi-beam source for generating a plurality of beamlets of energetic electr... |
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Invention
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Pattern definition device having distinct counter-electrode array plate. A multi-beam pattern def... |
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2007
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Invention
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Particle-beam exposure apparatus with overall-modulation of a patterned beam. In a charged-partic... |
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2006
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Invention
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Charged-particle exposure apparatus. A particle-beam projection processing apparatus for irradiat... |
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2005
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Invention
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Pattern lock system for particle-beam exposure apparatus. In a pattern-lock system of particle-be... |
