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2025
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Invention
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Mask pattern formation method and substrate processing method.
A mask pattern formation method i... |
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Invention
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Maintenance work support system, control method, and non-transitory computer-readable recording m... |
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Invention
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Computer program, information processing method, and information processing device.
The present ... |
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Invention
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Substrate support assembly and plasma processing device.
A substrate support assembly includes a... |
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Invention
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Etching method and etching apparatus.
An etching method includes a first storage process of supp... |
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Invention
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Plasma processing with magnetic ring x point.
A plasma etching system that includes a plasma pro... |
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Invention
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Silicon carbonitride film-forming method and plasma processing apparatus.
A silicon carbonitride... |
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Invention
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Apparatus for transporting substrate, system for processing substrate, and method of transporting... |
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Invention
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Methods to automatically adjust one or more parameters of a camera system for optimal 3d reconstr... |
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P/S
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Semiconductor manufacturing machines and parts therefor; flat panel display manufacturing machine... |
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P/S
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Semiconductor manufacturing machines and their component
parts and fittings; flat panel display ... |
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Invention
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Pattern formation method.
A pattern formation method includes: forming a photosensitive hard mas... |
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Invention
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Plasma processing method and plasma processing apparatus for using a first plasma generated from ... |
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Invention
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Substrate processing method and substrate processing apparatus.
A substrate processing method in... |
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Invention
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Treatment device and treatment method. Provided are a treatment device and a treatment method whe... |
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Invention
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Plasma processing apparatus and reaction tube wall protection member.
A plasma processing appara... |
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Invention
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Plasma processing apparatus.
A plasma processing apparatus includes a processing container, a su... |
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Invention
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Plating device and plating treatment method. [Problem] To increase in-plane uniformity of plating... |
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Invention
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Processing system, processing method, and transport device. This processing system for processing... |
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Invention
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Substrate processing system, substrate processing method, program, and storage medium. This subst... |
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Invention
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Polishing pad, substrate processing device, and substrate processing method. This polishing pad p... |
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Invention
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Transportation device and connection method. A transportation device for transporting an object t... |
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Invention
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Heat medium control device and control method for heat medium. According to the present invention... |
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Invention
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Plasma processing apparatus. Provided is a technique that makes it possible to suppress attenuati... |
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Invention
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Control valve control method and substrate processing device. Provided are: a control valve contr... |
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Invention
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Substrate processing method, substrate processing system, and parameter correction method. In thi... |
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Invention
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Film, article, and plasma processing device. abcdd, where: M represents a metal atom; a, b, c, an... |
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Invention
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Method for determining optimum thickness measurement position, substrate processing method, and s... |
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Invention
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Method for removing titanium oxide film and substrate processing device. The purpose of the prese... |
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Invention
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Temperature regulating device and plasma processing device. This temperature regulating device fo... |
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Invention
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Substrate support and substrate treatment device. Disclosed is a substrate support comprising: a ... |
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Invention
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Substrate treatment method and substrate treatment apparatus.
A substrate treatment method inclu... |
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Invention
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Film formation method and film formation device. A film formation method according to the present... |
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Invention
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Cable connecting method, production method of connecting member, and thermal processing apparatus... |
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Invention
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Wafer overlay registration in hybrid bonding. A method of hybrid bonding includes accessing first... |
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Invention
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Film-forming method and film-forming apparatus.
A film-forming method includes (a) providing a s... |
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P/S
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Installation, maintenance and repair of semiconductor manufacturing machines; installation, maint... |
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P/S
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Installation, maintenance and repair of semiconductor
manufacturing machines; installation, main... |
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Invention
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Method for selectively depositing etch stop layer. A method for making a semiconductor device can... |
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Invention
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Bonding method with location specific processing. A method of forming a bonded wafer, where the m... |
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Invention
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Method and apparatus for damascene etching. A method for etching a wafer includes providing the w... |
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Invention
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Substrate processing method and substrate processing apparatus. In one exemplary embodiment of th... |
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Invention
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Cleaning method. This cleaning method that is for cleaning the interior of a transport device for... |
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Invention
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Wafer overlay registration in hybrid bonding.
A method of hybrid bonding includes accessing firs... |
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2024
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P/S
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Semiconductor manufacturing machines and their component parts and fittings |
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P/S
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Semiconductor manufacturing machines and their component parts and fittings; flat panel display m... |
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P/S
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Semiconductor manufacturing machines used for coating and deposition processes, and their compone... |
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Invention
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Bonding method with location specific processing.
A method of forming a bonded wafer, where the ... |
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Invention
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Selective etching of top electrode metal to phase-change material by tuning wafer temperature.
P... |
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Invention
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Method and apparatus for damascene etching.
A method for etching a wafer includes providing the ... |
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Invention
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Method for patterning mask layer over substrate.
A method includes forming a first mask over a s... |
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P/S
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Downloadable computer software for controlling semiconductor manufacturing processes; downloadabl... |
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P/S
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Downloadable computer software for controlling semiconductor
manufacturing processes; downloadab... |
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2023
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Invention
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Substrate treatment device and film thickness estimation method.
A substrate processing apparatu... |
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Invention
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Substrate processing method, substrate processing device, and storage medium.
A substrate proces... |
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P/S
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Machines and instruments used for measuring and testing semiconductor manufacturing machines, nam... |
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P/S
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Machines and instruments used for measuring and testing
semiconductor manufacturing machines; co... |
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Invention
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Processor for controlling pipeline processing based on jump instruction, and program storage medi... |
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2022
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P/S
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Semiconductor manufacturing machines and their component
parts and fittings. |
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2021
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P/S
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Semiconductor manufacturing machines and their component parts and fittings; machines for mainten... |
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P/S
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Semiconductor manufacturing machines and their component
parts and fittings; machines for mainte... |
