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2025
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Invention
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Substrate support and plasma processing apparatus.
A substrate support includes a first layer, a... |
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Invention
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Plasma processing apparatus and power supply system.
A plasma processing apparatus includes: an ... |
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Invention
|
Substrate processing method and substrate processing apparatus.
A substrate processing method ac... |
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Invention
|
Information processing method, recording medium, and information processing apparatus.
An inform... |
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Invention
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Substrate processing method and substrate processing system.
In one exemplary embodiment, a subs... |
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Invention
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Coating film forming method, coating film forming apparatus, and storage medium.
A coating film ... |
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2024
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P/S
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Semiconductor manufacturing machines and their component parts and fittings |
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P/S
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Semiconductor manufacturing machines and their component
parts and fittings; flat panel display ... |
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|
Invention
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Method of forming carbon-based film and film forming apparatus.
A method of forming a carbon-bas... |
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Invention
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Inspection method, inspection device, and substrate processing device. The present invention dete... |
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Invention
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Learning method, inference method, and recording medium storing program.
A learning method execu... |
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Invention
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Substrate processing method and substrate processing system.
A substrate processing method inclu... |
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Invention
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Substrate processing system, substrate processing apparatus and visualization method.
A substrat... |
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Invention
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Substrate processing apparatus.
There is a substrate processing apparatus comprising: a processi... |
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Invention
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Substrate standby device, substrate processing system, and substrate processing method.
A substr... |
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Invention
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Substrate processing apparatus.
A substrate processing apparatus includes: a processing containe... |
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Invention
|
Transfer module, and substrate transfer method in semiconductor manufacturing apparatus.
A trans... |
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Invention
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Substrate processing apparatus and substrate processing method.
A substrate processing apparatus... |
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|
Invention
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Lifting mechanism and substrate processing apparatus.
A lifting mechanism for raising or lowerin... |
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Invention
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Substrate processing system, storage module, and substrate processing method. This substrate proc... |
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Invention
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Monitoring system, monitoring method, monitoring device, and detection tape. A monitoring system ... |
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Invention
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Processing apparatus and processing method. This UV processing module is provided with: a process... |
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Invention
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Monitoring method, monitoring device, and computer storage medium. A monitoring method for monito... |
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P/S
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Semiconductor manufacturing machines and their component parts and fittings; flat panel display m... |
|
|
Invention
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Substrate processing device and substrate processing method. The purpose of the present invention... |
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|
Invention
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Production method and production system for semiconductor device. A production method for a semic... |
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Invention
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Substrate processing apparatus, fluid supply system, and substrate processing method.
A substrat... |
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Invention
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Wafer support for measuring wafer geometry. A wafer measurement stage for supporting a semiconduc... |
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Invention
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Computer program, information processing device, and information processing method. Provided are ... |
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Invention
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Substrate treatment device, treatment container replacement method, substrate treatment method, a... |
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|
Invention
|
Plasma processing apparatus. This plasma processing apparatus comprises a chamber, first and seco... |
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|
Invention
|
Etching method, etching device, and gas for forming protective film. Disclosed is an etching meth... |
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Invention
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Semiconductor processing device and power supply method. This semiconductor processing device inc... |
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Invention
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Transport system and transport method. This transport system comprises: a transport module extend... |
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Invention
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Optical metrology. A method for monitoring a plurality of process chambers, the method includes g... |
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Invention
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Plasma processing with phase-locked waveforms. A plasma processing method includes applying AC wa... |
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Invention
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Reversible overcoat compositions.
Reversible overcoat compositions for overcoating structures du... |
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Invention
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3d fet devices and methods for manufacturing the same.
Semiconductor devices and corresponding m... |
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P/S
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Downloadable computer software for controlling semiconductor manufacturing processes; downloadabl... |
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|
P/S
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Downloadable computer software for controlling semiconductor
manufacturing processes; downloadab... |
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2023
|
Invention
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Optical metrology.
A method for monitoring a plurality of process chambers, the method includes ... |
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|
Invention
|
Method and system for plasma process.
An example method for a plasma process includes generating... |
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|
Invention
|
Plasma processing with phase-locked waveforms.
A plasma processing method includes applying AC w... |
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|
Invention
|
Layer stack for extreme ultraviolet lithography.
An example lithography stack includes a first l... |
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|
Invention
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Device and method for determining wafer bow.
An apparatus for measuring bow of a wafer includes ... |
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|
Invention
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Contactless capacitive measurement tool with improved throughput and accuracy.
Systems and metho... |
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|
Invention
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Wafer support for measuring wafer geometry.
A wafer measurement stage for supporting a semicondu... |
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P/S
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Machines and instruments used for measuring and testing semiconductor manufacturing machines, nam... |
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P/S
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Machines and instruments used for measuring and testing
semiconductor manufacturing machines; co... |
|
|
Invention
|
Embedding method and substrate processing apparatus.
An embedding method of embedding a film in ... |
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|
Invention
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Substrate transfer method and semiconductor manufacturing system.
A semiconductor manufacturing ... |
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|
Invention
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Method for forming insulating film, and substrate processing system.
A method of forming an insu... |
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|
Invention
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Substrate processing apparatus.
A substrate processing apparatus includes a processing container... |
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|
Invention
|
Hard mask, substrate processing method, and removal method for hard mask.
A hard mask used for e... |
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Invention
|
Method and apparatus of embedding ruthenium into recess.
A method of embedding ruthenium into a ... |
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2022
|
P/S
|
Semiconductor manufacturing machines and their component
parts and fittings. |
|
2021
|
P/S
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Semiconductor manufacturing machines and their component parts and fittings; machines for mainten... |
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P/S
|
Semiconductor manufacturing machines and their component
parts and fittings; machines for mainte... |
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2020
|
P/S
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Semiconductor manufacturing machines and their structural parts; flat panel display manufacturing... |
