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2024
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Invention
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Coating method of chamber for deposition process. A coating method of a chamber for a deposition ... |
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Invention
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Method for manufacturing high-density yttria film by atmospheric plasma spraying method and yttri... |
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2023
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Invention
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Method for manufacturing thermal spray coating and yttrium-based thermal spray coating manufactur... |
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Invention
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Coating method for semiconductor equipment. A coating method for semiconductor equipment accordin... |
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Invention
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Method of forming plasma-resistant coating film.
Proposed is a method of forming a plasma-resist... |
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Invention
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Yttrium-based powder for thermal spraying and yttrium-based thermal spray coating using the same.... |
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Invention
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Material for plasma spray comprising y-o-f compound, method for producing the same, and spray coa... |
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Invention
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Material for plasma spray comprising y—o—f compound, method for producing the same, and spray coa... |
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Invention
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Method of forming plasma-resistant coating layer with low brightness using heat treatment process... |
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2022
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Invention
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Particle measuring device. A particle measuring device includes a probe including a nozzle sprayi... |
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Invention
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Method of manufacturing high-density yf3 coating layer by using hvof, and high-density yf3 coatin... |
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Invention
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Method of manufacturing plasma-resistant coating film.
Disclosed herein is a method of manufactu... |
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Invention
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Manufacturing method for spherical yof-based powder, and spherical yof-based powder and yof-based... |
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2021
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Invention
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Method for large surface coating base on control of thin film stress and coating structure useof.... |
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Invention
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Method of producing thermal spray coating using the yittrium powder and the yittrium coating prod... |
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Invention
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Yittrium granular powder for thermal spray and thermal spray coating produced using the same. 2) ... |
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Invention
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Defect inspection method for inspection object. A camera unit photographs a learning object posit... |
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Invention
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Slurry composition for suspension plasma thermal spray, preparation method therefor, and suspensi... |
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2019
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Invention
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Chamber monitoring device and method. The present invention relates to a vacuum chamber monitorin... |
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Invention
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Surface treatment apparatus and method using atmospheric pressure plasma. Disclosed are a surface... |
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2018
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Invention
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Three-dimensional shape image acquisition system. The present invention relates to a system for a... |
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Invention
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Method of aerosol deposition coating for plasma resistant coating. Disclosed is an aerosol-deposi... |
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Invention
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Photoplasma etching apparatus having improved plasma-resistant and manufacturing method therefor ... |
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Invention
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Method for manufacturing anodized aluminum or aluminum alloy member having excellent corrosion re... |
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Invention
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Method of manufacturing plasma-resistant coating film and plasma-resistant member formed thereby.... |
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Invention
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Aerosol deposition coating method for plasma-resistant coating. The present invention relates to ... |
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Invention
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Spray coating material and spray coating made of same spray coating material. 3233) and yttrium a... |
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Invention
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Method for manufacturing plasma-resistant coating film and plasma-resistant member formed thereby... |
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Invention
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Plasma etching apparatus member having improved plasma-resistant properties and manufacturing met... |
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2016
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Invention
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Plasma resistant coating film and fabricating method thereof.
The present disclosure relates to ... |
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Invention
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Plasma resistant coating film and formation method therefor. The present invention relates to a p... |
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2012
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Invention
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Tray for loading substrates. According to the present invention, a tray for loading substrates ma... |
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2011
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Invention
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Mems switch and method for manufacturing same. According to the MEMS switch and the method for ma... |
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Invention
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Multi-analysis sensor and multi-analysis method using same. Provided are a multi-analysis sensor ... |
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Invention
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Electrostatic chuck and a substrate-processing device comprising the same. An electrostatic chuck... |
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2010
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Invention
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Laminated structure for solid oxide fuel cell. The laminated structure for a solid oxide fuel cel... |
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Invention
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Grounding structure, and heater and chemical vapor deposition apparatus having the same.
A groun... |
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Invention
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Grounding structure, and heater and chemical vapor deposition apparatus having the same. The pres... |
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Invention
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Solid oxide fuel cell and method for manufacturing same. Disclosed is a method for manufacturing ... |
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Invention
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Electrostatic chuck and method for manufacturing same. The invention relates to an electrostatic ... |
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Invention
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Method for producing for a laminated ceramic base plate. A method for producing a laminated ceram... |
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Invention
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Lift pin, and wafer-processing apparatus comprising same.
In a lift pin and an apparatus for pro... |
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Invention
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Lift pin, and wafer-processing apparatus comprising same. A lift pin comprises a main body and a ... |
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2009
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Invention
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Substrate-supporting device, and a substrate-processing device having the same.
A substrate supp... |
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2008
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Invention
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Unit for supporting a substrate and apparatus for processing a substrate having the same.
A subs... |
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Invention
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Ion implanter, internal structure of ion implanter and method of forming a coating layer in the i... |
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Invention
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Apparatus for transferring a wafer.
An apparatus for transferring a wafer includes a ceramic bla... |
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2002
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P/S
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[ SEMICONDUCTORS; LIQUID CRYSTAL DISPLAYS; ELECTRON LUMINESCENCES AND COLOR FILTERS FOR DISPLAY M... |
