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2025
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Invention
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Ceramic susceptor including core/shell structured material as coating layer. 233) and aluminum ni... |
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2024
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Invention
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Ceramic susceptor and manufacturing method thereof. A ceramic susceptor particularly with excelle... |
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Invention
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Ceramic susceptor having hybrid coating. A ceramic susceptor is disclosed, which not only has exc... |
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Invention
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Plate-type heating device and manufacturing method therefor. The present invention provides a pla... |
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Invention
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Core/shell structure material and ceramic member for semiconductor manufacturing apparatus using ... |
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2022
|
Invention
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Ceramic heater for semiconductor manufacturing apparatus.
Disclosed is a ceramic heater for a se... |
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Invention
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Ceramic heater for semiconductor manufacturing apparatus. 232422); and a resistive heating element. |
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2021
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Invention
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Plate type heater and manufacturing method thereof.
Provided are a plate type heater and a vapor... |
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Invention
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Ceramic heater |
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2020
|
Invention
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Ceramic structure for plasma processing apparatus and manufacturing method thereof. A ceramic str... |
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2019
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Invention
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Electrostatic chuck and manufacturing method therefor. Disclosed are: an electrostatic chuck havi... |
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Invention
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Ceramic shower head and chemical vapor deposition device including same.
A shower head for a che... |
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Invention
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Ceramic shower head and chemical vapor deposition device including same. The present invention pr... |
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2018
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Invention
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Electrostatic chuck. One embodiment of the present invention discloses an electrostatic chuck mad... |
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2013
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Invention
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Heating wire arrangement for ceramic heater. Provided is a heating wire arrangement for a ceramic... |
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Invention
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Electrical terminal structure for ceramic heater. The present invention relates to an electrical ... |
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Invention
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Heating wire arrangement for ceramic heater. The present invention relates to a heating wire arra... |
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Invention
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Hot wire connecting structure for ceramic heater. The present invention relates to a hot wire con... |
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Invention
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Electrode-connecting structure for ceramic heater. The present invention relates to an electrode-... |
