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2025
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Invention
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Composition for manufacturing semiconductor device, semiconductor device manufacturing apparatus ... |
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Invention
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Method for manufacturing semiconductor device. The present invention provides a method for manufa... |
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2024
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Invention
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Method of etching silicon-containing film and method of manufacturing semiconductor device includ... |
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Invention
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Composition for semiconductor process and method for manufacturing semiconductor device. An embod... |
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Invention
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Deposition method of silicon oxide film on semiconductor substrate, and preparation method of sem... |
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Invention
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Deposition method of silicon oxide film on semiconductor substrate and preparing method of semico... |
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2023
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Invention
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Atomic layer etching method for metal oxide film. Disclosed is an atomic layer etching method for... |
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Invention
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Apparatus and method for producing pftpa by using electrochemical fluorination. Disclosed are an ... |
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Invention
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High-purity pftpa preparation apparatus and method. 244) to the prepared PFTPA, and then stirring... |
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Invention
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Method for selectively depositing silicon oxide layer using aminosilane precursor. Disclosed is a... |
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Invention
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Substrate processing method and selective deposition method using the same.
There is provided a ... |
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Invention
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Apparatus and method for producing trifluoramine oxide.
An apparatus for producing trifluoramine... |
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Invention
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Apparatus and method for producing trifluoramine oxide. 22 as starting materials; an ultraviolet ... |
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2021
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Invention
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Production of moo2cl2.
The invention relates to a method for producing MoO2Cl2 under inert condi... |
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Invention
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Method for cleaning deposition chamber for metal oxide semiconductor material. A cleaning method ... |
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Invention
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Method for etching silicon-containing film and semiconductor device manufacturing method comprisi... |
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Invention
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Method for producing trifluoroamine oxide.
There is provided a method for producing trifluoroami... |
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Invention
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Trisilylamine preparation apparatus and preparation method.
A trisilylamine preparation apparatu... |
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Invention
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Metal material for storage container of high-purity hydrogen fluoride with improved scratch resis... |
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2020
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Invention
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Gas container and deposition system including the same. A deposition system and a gas storage dev... |
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2019
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Invention
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Preparation method of trifluoroamine oxide. The present invention relates to a preparation method... |
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2018
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Invention
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Gas storage cylinder, deposition system, and method of manufacturing semiconductor device. A meth... |
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2015
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Invention
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Apparatus for preparing germane gas and method for preparing monogermane gas using same. The pres... |
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2014
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Invention
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Method and apparatus for producing disilane through pyrolysis of monosilane. An apparatus for pro... |
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2006
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Invention
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Method for purifying nitrogen trifluoride. A highly pure nitrogen trifluoride having a carbon tet... |
