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2025
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Invention
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Cryopump system.
A cryopump system including a cryopump and a compressor configured to supply a ... |
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Invention
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Method for regenerating cryopump.
A method for regenerating a cryopump that includes a cooler in... |
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2024
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Invention
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Cryopump system.
A cryopump system includes a temperature measurement unit configured to measure... |
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Invention
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Method for regenerating cryopump.
A method for regenerating a cryopump that includes a cooler eq... |
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Invention
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Method for vacuum-exhausting by means of cryopump.
A vacuum evacuation method to be performed by... |
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Invention
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Exhaust gas treatmentapparatus.
An exhaust gas treatment device for treating an exhaust gas emit... |
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2023
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Invention
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Processing gas treatment apparatus for treating processing gas used in semiconductor equipment by... |
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Invention
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Cryogenic test apparatus. A cryogenic test apparatus using a freezer, according to one embodiment... |
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Invention
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Cryogenic test device using liquefied gas, cryogenic test method using cryogenic test device, and... |
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Invention
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Gas purification device. This cryopump system comprises: a temperature measurement unit for measu... |
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Invention
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Process gas removal apparatus. A process gas removal apparatus according to an embodiment of the ... |
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Invention
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Heat exchange system using cryogenic refrigerator. A heat exchange system according to one embodi... |
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Invention
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Cryogenic cooling device. A cryogenic cooling device having an embedded heater, according to an e... |
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Invention
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Method for vacuum-exhausting by means of cryopump. A method for vacuum-exhausting by means of a c... |
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Invention
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Cryo-pump system. A cryo-pump system including a cryo-pump, and a compressor for supplying a high... |
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Invention
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Cryopump system. The cryopump system includes: a temperature measuring unit for measuring, among ... |
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Invention
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Method of regenerating cryopump. The method of regenerating a cryopump comprising: a freezer havi... |
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Invention
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Method for regenerating cryopump. Provided is a method for regenerating a cryopump comprising: a ... |
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Invention
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Temperature control device for semiconductor manufacturing equipment. This temperature control de... |
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Invention
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Exhaust gas treatment apparatus. An exhaust gas treatment apparatus for treating exhaust gas disc... |
