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2022
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Invention
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Resonant filter for solid state rf impedance matching network.
In one embodiment, an RF impedanc... |
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Invention
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Impedance matching network and method.
In one embodiment, an impedance matching network includes... |
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Invention
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Rf impedance matching network.
In one embodiment, an RF impedance matching circuit is disclosed.... |
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2021
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Invention
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Combined rf generator and rf solid-state matching network. In one embodiment, a method of matchin... |
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Invention
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Impedance matching network. In one embodiment, an RF impedance matching network is disclosed. The... |
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Invention
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Switching circuit. In one embodiment, an impedance matching network includes a variable reactance... |
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Invention
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High voltage switching circuit. In one embodiment, a switching circuit includes an electronic swi... |
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2020
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Invention
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Impedance matching network for diagnosing plasma chamber. In one embodiment, a method of using an... |
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Invention
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Semiconductor manufacturing using artificial intelligence. In one embodiment, a method, a method ... |
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Invention
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Rf impedance matching network. In one embodiment, an impedance matching network includes an elect... |
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Invention
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Impedance matching network and method. In one embodiment, a method of impedance matching and cont... |
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Invention
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Impedance matching network and method. In one embodiment, a method of matching an impedance is di... |
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Invention
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Impedance matching network and method. In one embodiment, the present disclosure may be directed ... |
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Invention
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Rf impedance matching circuit and systems and methods incorporating same. In one embodiment, an R... |
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Invention
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Impedance matching network and method with reduced memory requirements. In one embodiment, the pr... |
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Invention
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Impedance matching network and method. In one embodiment, the present disclosure is directed to a... |
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Invention
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Impedance matching network and method. In one embodiment, an impedance matching network includes ... |
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Invention
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Amplitude and phase detection circuit. In one embodiment, a phase detection circuit includes a cu... |
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Invention
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Switching circuit with voltage bias. In one embodiment, an RF impedance matching network for a pl... |
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2019
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Invention
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Filter for impedance matching. In one embodiment, an RF impedance matching network for a plasma c... |
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Invention
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Diagnostics for impedance matching network. In one embodiment, the present disclosure is directed... |
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Invention
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Impedance matching network and method.
In one embodiment, an RF impedance matching network for a... |
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Invention
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Impedance matching network and method. In one embodiment, an RF impedance matching network for a ... |
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Invention
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Impedance matching with multi-level power setpoint. In one embodiment, the present disclosure is ... |
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Invention
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Impedance matching using independent capacitance and frequency control. In one embodiment, the pr... |
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Invention
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Impedance matching using electronically variable capacitance and frequency considerations. In one... |
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Invention
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Impedance matching with restricted capacitor switching. In one embodiment, an RF impedance matchi... |
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Invention
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Rf power amplifier. In one embodiment, an RF power amplifier includes a first transistor and a se... |
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Invention
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Switching circuit. In one embodiment, an impedance matching network includes at least one electro... |
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2018
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Invention
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Parasitic capacitance compensation circuit. In one embodiment, a parasitic capacitance compensati... |
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Invention
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Rf impedance matching circuit and systems and methods incorporating same. In one embodiment, a se... |
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Invention
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Restricted capacitor switching. In one embodiment, the present disclosure is directed to a method... |
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2017
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Invention
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Impedance matching network using heat pipe inductor.
In one embodiment, the invention may be an ... |
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Invention
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Switching circuit. In one embodiment, an impedance matching network is disclosed that includes a ... |
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Invention
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Switching circuit for rf currents. In one embodiment, a switching circuit includes a first switch... |
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Invention
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System for providing variable capacitance. In one embodiment, a radio frequency (RF) impedance ma... |
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Invention
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Enclosure cooling system. In one embodiment, the invention can be a system for cooling an enclosu... |
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Invention
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Capacitance variation. In one embodiment, the invention can be a variable capacitor that includes... |
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2016
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Invention
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Switching circuit. In one embodiment, a switching circuit includes a first switch comprising one ... |
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Invention
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Rf impedance matching network. In one embodiment, an RF impedance matching network includes an RF... |
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Invention
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Voltage reduction circuit. In one embodiment, the invention can be an impedance matching network ... |
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2015
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Invention
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Rf impedance matching network. An RF impedance matching network includes an RF input configured t... |
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Invention
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High speed high voltage switching circuit. A control circuit for an electronic switch includes a ... |
