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2016
|
Invention
|
Probe device for scanning probe microscopes and method of manufacture thereof.
Specific probe de... |
|
2015
|
Invention
|
Micro heater integrated with thermal sensing assembly. A calibration device including a thermal s... |
|
2014
|
Invention
|
Vertical embedded sensor and process of manufacturing thereof. A scanning probe assembly having a... |
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2011
|
Invention
|
Scanning probe devices. The present invention is directed to scanning probes in which a cantileve... |
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2010
|
Invention
|
Method of forming semiconductor devices in wafer assembly. An apparatus and method for holding a ... |
|
|
Invention
|
Scanning probe having integrated silicon tip with cantilever. A cantilever-tip assembly for atomi... |
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2007
|
Invention
|
Scanning probe devices and methods for fabricating same. The present invention is directed to sca... |
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2006
|
Invention
|
Semiconductor device in wafer assembly. An apparatus and method for holding a semiconductor devic... |
