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2024
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Invention
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Reactive by-products collection system.
Provided is a reactive by-products collection system uti... |
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2023
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Invention
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Apparatus for collecting reaction by-products for semiconductor processes through pyrolysis in th... |
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Invention
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Apparatus for collecting by-product for semiconductor manufacturing process with improved collect... |
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Invention
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Process stop loss reduction system through rapid replacement of apparatus for trapping of reactio... |
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2022
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Invention
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Apparatus for trapping of reaction by-product with extended available collection area. The presen... |
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Invention
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Apparatus for trapping of reaction by-product capable of expanding the area for collection by ind... |
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Invention
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Apparatus for trapping of reaction by-product having self regenerating function for used inner co... |
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2021
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Invention
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Apparatus for trapping reaction by-product created by etching process. The present disclosure rel... |
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Invention
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Apparatus for trapping multiple reaction by-products for semiconductor process. The present discl... |
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Invention
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Apparatus for trapping multiple reaction by-products for semiconductor process.
An apparatus is ... |
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Invention
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Apparatus for trapping reaction by-product produced during organic film deposition process. The p... |
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2019
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Invention
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Flow path switching type collecting apparatus of by-product for semiconductor manufacturing proce... |
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Invention
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Apparatus for collecting by-product of semiconductor manufacturing process. The apparatus for col... |
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Invention
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Apparatus for collecting by-product in semiconductor manufacturing process. ABSTRACT An apparatus... |
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Invention
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Apparatus having cooling line for collecting by-product in semiconductor manufacturing process. D... |
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Invention
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Apparatus for collecting by-product of semiconductor manufacturing process. Disclosed is an appar... |
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Invention
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Apparatus for collecting by-product in semiconductor manufacturing process. Disclosed is an appar... |
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Invention
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Semiconductor process by-product collecting device. Disclosed is an apparatus for collecting a by... |
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2018
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Invention
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Apparatus for collecting by-product in semiconductor process. Disclosed is an apparatus for colle... |
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2007
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Invention
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Byproduct collecting apparatus of semiconductor apparatus. Provided is a byproduct collecting app... |
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2006
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Invention
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Automatically replaceable apparatus for collecting byproducts and the controlling method thereof ... |
