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2025
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Invention
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Toroidal plasma source and method of using the same. A plasma source, comprises a plasma source b... |
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Invention
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Extremum-seeking control apparatuses and methods for automatic frequency tuning.
A RF generator ... |
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2024
|
Invention
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Electronic device cooling system and method of using the same. A system for cooling a power elect... |
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Invention
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Apparatus and tuning method for mitigating rf load impedance variations due to periodic disturban... |
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Invention
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Power factor correction architecture. A circuit architecture, comprising a plurality of circuits,... |
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Invention
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Process gas delivery control system with concentration monitoring. A process gas delivery system ... |
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Invention
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Method and apparatus for automatic self calibration of mass flow controller. A mass flow controll... |
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Invention
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Source tuning with pulsed dc bias. A RF generator includes a RF power source. The RF power source... |
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Invention
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Pulse-shaping using a sub-region tuning apparatus and method. A controller for a generator includ... |
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Invention
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Endpoint detection system and methods of using the same. A system includes a byproduct analysis p... |
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Invention
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Pulsed rf plasma generator with high dynamic range. A power generator has a first plurality of po... |
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Invention
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Monitoring radical particle concentration using mass spectrometry. A monitoring system detects an... |
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Invention
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Real time radical output monitoring using optical emission spectroscopy. A system for determining... |
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Invention
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Thermal conductivity gauge. A thermal conductivity gauge measures gas pressure within a chamber. ... |
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Invention
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Method and apparatus for integrated pressure and flow controller. Pressure control methods and de... |
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Invention
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Enhanced tuning methods for mitigating rf load impedance variations due to periodic disturbances.... |
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Invention
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Non-invasive ied estimation for pulsed-dc and low frequency applications. A RF power generation s... |
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Invention
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Pulsed rf plasma generator with high dynamic range. A RF power generator having a fixed power gen... |
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2023
|
Invention
|
Gas concentration sensor and method of using the same. An optical gas concentration sensor includ... |
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Invention
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Radical sensing for process tool diagnostics.
An apparatus and technique for measuring a concent... |
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Invention
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Radical sensing for process tool diagnostics. An apparatus and technique for measuring a concentr... |
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Invention
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Pirani gauge. TseTs ee and the model of power dissipation. |
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Invention
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Method and apparatus for mass flow control. Mass flow control (MFC) devices capable of self-verif... |
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Invention
|
Methods and systems for endpoint detection in foreline of chamber clean and foreline clean proces... |
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Invention
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Method and apparatus for plasma generation. A plasma source is provided that is configured to for... |
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Invention
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Plasma process control of multi-electrode systems equipped with ion energy sensors. A RF generato... |
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Invention
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Extremum-seeking control apparatuses and methods for automatic frequency tuning. A RF generator i... |
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Invention
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Valve apparatuses and related methods for reactive process gas isolation and facilitating purge d... |
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P/S
|
Maintenance and repair of products for use in semiconductor
manufacturing processes. Product des... |
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Invention
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Coatings for use in remote plasma source applications and method of their manufacture. A method o... |
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Invention
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Extremum seeking control apparatuses with online parameter adjustment and methods. A power supply... |
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|
Invention
|
Method and apparatus for plasma ignition in toroidal plasma sources. A plasma apparatus of a plas... |
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Invention
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Apparatus for pressure based mass flow control and assembly method of said apparatus. Mass flow c... |
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2022
|
Invention
|
Pulse and bias synchronization methods and systems. A radio frequency (RF) generator includes a R... |
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Invention
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Ion source with gas delivery for high-fidelity analysis. In a system for processing gas, a gas an... |
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Invention
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Dissolved ammonia delivery system and methods of use. The present invention concerns a dissolved ... |
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|
Invention
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Methods and systems for feedback control in plasma processing using radical sensing. An apparatus... |
|
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Invention
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Power supply apparatus. A power supply apparatus, comprising at least one circuit board having th... |
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|
P/S
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Semiconductor wafer processing equipment. Fiber optic temperature sensors; optical amplifiers; te... |
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P/S
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Industrial programmable computer hardware; plasma generators; dissolved gas generation and delive... |
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P/S
|
Semiconductor wafer processing equipment. Fiber optic temperature sensors; optical amplifiers;
t... |
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P/S
|
Industrial programmable computer hardware; plasma
generators; dissolved gas generation and deliv... |
|
|
Invention
|
Multi-wavelength ozone concentration sensor and method of use. The present application discloses ... |
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P/S
|
Installation services, set-up and troubleshooting services,
application development and support ... |
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|
Invention
|
Real-time, non-invasive iedf plasma sensor. A controller for a plasma generation system includes ... |
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Invention
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Method and apparatus for mass flow verification. Devices and methods for mass flow verification a... |
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|
Invention
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Method and apparatus for pressure based mass flow control. Mass flow controllers that can provide... |
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2021
|
Invention
|
Demagnetizing coils for linearity improvement of current ratio of plasma processing systems. A RF... |
|
|
Invention
|
Binary gas purity analyzer. Systems and methods for detecting a composition of a binary gas mixtu... |
|
|
Invention
|
Impedance matching in a rf power generation system. An impedance matching network including a mix... |
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P/S
|
Radio Frequency (RF) generators. |
|
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P/S
|
Radio Frequency (RF) matching networks. |
|
2020
|
P/S
|
Plasma generator for etching byproduct from vacuum piping,
components, and systems. |
|
2019
|
P/S
|
Maintenance and repair of products for use in semiconductor manufacturing processes. Product desi... |
|
|
P/S
|
Maintenance, repair and calibration of products for use in
semiconductor manufacturing processes... |
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2018
|
P/S
|
Product design and development of laser and photonics systems; System level integration of laser ... |
|
|
P/S
|
Product design and development, laser and photonics system
level integration, research and devel... |
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P/S
|
Plasma generator for etching, photoresist removal, strip, sputtering, deposition, chemical vapor ... |
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2014
|
P/S
|
Remote plasma sources for use in semiconductor manufacturing; all of the foregoing not in the fie... |
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2012
|
P/S
|
Vacuum quality monitors in the nature of electronic vacuum
gauge controllers for use in the meas... |
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2006
|
P/S
|
Traps for capturing waste materials exiting from a process chamber.
Gas and fluid pressure valves... |
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P/S
|
Scientific measuring and checking (supervision) apparatus and instruments; gas analyzers for dete... |
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P/S
|
Installation and repair of power and reactive gas devices, vacuum technology devices, flow measur... |
|
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P/S
|
Building construction; repair; installation services; installation, repair and calibration of pow... |
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P/S
|
Microwave plasma generator units and component parts therefore for use in industrial and scientif... |
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P/S
|
Apparatus components for materials processing, namely metal flanges, metal fittings for gas lines... |
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P/S
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Machines and machine tools; machine coupling and transmission components; pressure valves; pressu... |
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2005
|
P/S
|
Plasma generators for use in the semiconductor and biopharmaceutical industries. |
|
|
P/S
|
Pressure valves; liquid feed systems, consisting mainly of a pump, a vaporiser and a power contro... |
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2002
|
P/S
|
Vacuum gauges; gauge tubes and vacuum gauge controllers used in the measurement of vacuums; parts... |
|
|
P/S
|
Scientific and electric apparatus and instruments; ozone generators for manufacture of ultra pure... |
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2001
|
P/S
|
Sensors and electrical instrumentation and power supplies and signal conditioners and analog and ... |
|
2000
|
P/S
|
Valves, vacuum valves and ionisation valves, vacuum controllers; machines including vacuum contro... |
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1999
|
P/S
|
Electrical apparatus and instruments; batteries; power supplies; excluding electrical fences, ele... |
|
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P/S
|
Electronic components; microwave equipment, impedance matching devices. |
|
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P/S
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Scientific apparatus; ozone generation equipment. |
|
1998
|
P/S
|
Vacuumgauges, namely gauge tubes and vacuum gauge controllers used in the measurement of vacuums. |
|
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P/S
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Vacuum gauges, namely gauge tubes and vacuum gauge controllers used in the measurement of vacuums. |
|
1996
|
P/S
|
Ionization gauges, namely gauge tubes and vacuum gauge controllers used in the measurement of hig... |
|
1995
|
P/S
|
Cold cathode high vacuum gauge. |
