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2025
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Invention
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Optical amplifier for a drive laser for use in a lithography system, lithography system and metho... |
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Invention
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Arrangement, installation and method for generating euv radiation or for conducting nuclear fusio... |
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Invention
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Method and laser system for generating a plasma of a target material for generating a secondary r... |
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Invention
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Maintenance method for monitoring and maintaining an electric compressor. The invention relates t... |
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Invention
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Optical amplifier for amplifying laser radiation, lithography system and method for amplifying la... |
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Invention
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Beam guiding device for guiding laser radiation and lithography system. The present invention con... |
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Invention
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Apparatus for generating euv radiation, and method. The invention relates to an apparatus (10) fo... |
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Invention
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Optical arrangement and laser device. The invention relates to an optical arrangement (16) for gu... |
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Invention
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Mirror module, laser device and method for producing a mirror module. The invention relates to a ... |
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Invention
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Optical device and method for changing polarization of a polarized light beam. The invention furt... |
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Invention
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Optical device for changing the polarisation of a polarised light beam, optical system, euv drive... |
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Invention
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Beam guiding device for laser radiation with a suppression function for ghost reflections, and la... |
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Invention
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Device for providing excitation energy for a target material for generating euv radiation, system... |
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Invention
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Laser mirror with thermal deformation compensation and laser system comprising same. The inventio... |
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Invention
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Device for amplifying laser radiation and method for setting a state of a base frame of a device ... |
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Invention
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Apparatus for focusing laser radiation, and lithography system comprising an apparatus of this ki... |
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Invention
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Method and laser machining system for laser-based surface shape correction of a mirror. The inven... |
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2024
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Invention
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Optical amplifier and components therefor. An optical amplifier (200) comprising a flow passagewa... |
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Invention
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Method for the amplification of a forward-running laser pulse and the lower amplification of a ba... |
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Invention
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Active partially destructible laser protection device, and assembly and laser system with the for... |
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Invention
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Method and laser system for compensating for maladjustments. The invention relates to a method (2... |
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Invention
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Electro-optical system having mechanically decoupling emc seal, and laser system having same. The... |
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Invention
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Method and apparatus for irradiating an object with a laser beam. The invention relates to a meth... |
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Invention
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Adjustment method, adjustment system and laser beam unit. The invention relates to an adjustment ... |
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Invention
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Depolarisation compensator and optical system. The invention relates to a depolarisation compensa... |
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Invention
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Euv light source with a beam positioning device. An extreme ultraviolet (EUV) light source includ... |
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2020
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Invention
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Laser focussing module. A laser focusing system (330) for use in an EUV radiation source is descr... |
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2012
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Invention
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System and method for separating a main pulse and a pre-pulse beam from a laser source. A dichroi... |
