|
2021
|
Invention
|
Optical phase measurement method and system.
A measurement system for use in measuring parameter... |
|
|
Invention
|
Measuring local critical dimension uniformity of an array of two-dimensional structural elements.... |
|
|
Invention
|
Integrated metrology system. An integrated metrology system for evaluating semiconductor wafers, ... |
|
|
Invention
|
Detecting outliers and anomalies for ocd metrology machine learning. A system and methods for OCD... |
|
|
Invention
|
Self-supervised representation learning for interpretation of ocd data. A system and methods for ... |
|
2020
|
Invention
|
Combining physical modeling and machine learning. A system and methods for OCD metrology are prov... |
|
|
Invention
|
Combined ocd and photoreflectance method and system. A combined OCD and photoreflectance system a... |
|
|
Invention
|
Method and system for broadband photoreflectance spectroscopy. Photoreflectance (PR) spectroscopy... |
|
|
Invention
|
Accurate raman spectroscopy. A method, a system, and a non-transitory computer readable medium fo... |
|
|
Invention
|
Model based control of wafer non-uniformity. Optical metrology may be used to examine substrates ... |
|
|
Invention
|
Semiconductor device manufacture with in-line hotspot detection. Controlling semiconductor device... |
|
2019
|
Invention
|
Integrated measurement system. A measurement system is presented configured for integration with ... |
|
|
Invention
|
Optical phase measurement system and method. A method for use in optical measurements on patterne... |
|
|
Invention
|
Optical technique for material characterization. A polarized Raman Spectrometric system for defin... |
|
|
Invention
|
Time-domain optical metrology and inspection of semiconductor devices. Semiconductor device metro... |
|
|
Invention
|
Metrology and process control for semiconductor manufacturing. A semiconductor metrology system i... |
|
2018
|
Invention
|
Metrology method and system. A control system for use in measuring one or more parameters of a pa... |
|
|
Invention
|
X-ray based measurements in patterned structure. A method and system are presented for use in X-r... |
|
|
Invention
|
Raman spectroscopy based measurement system. A method and system are presented for use in measuri... |
|
|
Invention
|
Tem-based metrology method and system. A control system is presented for use in measuring one or ... |
|
|
Invention
|
An apparatus and method for electrical test prediction. A test site and method are herein disclos... |
|
|
Invention
|
Method and system for optimizing optical inspection of patterned structures.
A system and method... |
|
2017
|
Invention
|
Layer detection for high aspect ratio etch control. Controlling an etch process applied to a mult... |
|
|
Invention
|
Lateral shift measurement using an optical technique.
Alignment of layers during manufacture of ... |
|
2016
|
Invention
|
Method and system for processing patterned structures. A system and method are presented for cont... |
|
|
Invention
|
Raman spectroscopy based measurements in patterned structures. A method and system are presented ... |
|
|
Invention
|
Hybrid metrology method and system. A method and system are presented for use in measuring charac... |
|
|
Invention
|
Optical system and method for measuring parameters of patterned structures in microelectronic dev... |
|
|
Invention
|
Hybrid measurement system and method for measuring in thin films. A measurement method and system... |
|
|
Invention
|
Method for use in process control of manufacture of patterned sample. A method and system are pre... |
|
|
Invention
|
Method for use in process control of manufacture of patterned samples. A method and system are pr... |
|
|
Invention
|
Optical system and method for measurements of samples. A measurement system is presented for use ... |
|
2015
|
Invention
|
Test structure for use in metrology measurements of patterns. A test structure and method of its ... |
|
|
Invention
|
Method and system for measuring patterned structures.
A method and system are presented for dete... |
|
|
Invention
|
Method and system for optical metrology in patterned structures. A data analysis method and syste... |
|
|
Invention
|
Scatterometry method and system. A method and system are presented for use in model-based optical... |
|
|
Invention
|
Metrology test structure design and measurement scheme for measuring in patterned structures. A t... |
|
|
Invention
|
Optical method and system for defects detection in three-dimensional structures. An inspection sy... |
|
|
Invention
|
Test structure design for metrology measurements in patterned samples.
A test structure is prese... |
|
|
Invention
|
Test structure design for metrology measurements in patterned samples. A test structure is presen... |
|
|
Invention
|
Optical phase measurement method and system. A measurement system for use in measuring parameters... |
|
|
Invention
|
Test structures and metrology technique utilizing the test structures for measuring in patterned ... |
|
|
Invention
|
Method and system for planning metrology measurements. A method for use in planning metrology mea... |
|
|
Invention
|
Optical critical dimension metrology. A metrology system is presented for measuring parameters of... |
|
|
Invention
|
Overlay design optimization. A sample comprising an overlay target is presented. The overlay targ... |
|
2014
|
Invention
|
Surface planarization system and method. A surface planarization system is presented. The system ... |
|
|
Invention
|
Hybrid metrology technique. A computerized system and method are provided for use in measuring at... |
|
|
Invention
|
Method and system for optical characterization of patterned samples.
A method and system are pre... |
|
2013
|
Invention
|
Method and system for use in optical measurements in deep three-dimensional structures.
A measur... |
