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2026
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Invention
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Lithographic apparatus, multi-wavelength phase-modulated scanning metrology system and method.
A... |
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2025
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Invention
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Fast uniformity drift correction.
Systems, apparatuses, and methods are provided for adjusting i... |
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Invention
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Mode control of photonic crystal fiber based broadband radiation sources.
A mode control system ... |
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Invention
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Sub micron particle detection on burl tops by applying a variable voltage to an oxidized wafer.
... |
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Invention
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Contaminant identification metrology system, lithographic apparatus, and methods thereof.
An ins... |
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Invention
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Optimization using a non-uniform illumination intensity profile.
A method for source mask optimi... |
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Invention
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Substrate holder for use in a lithographic apparatus.
A substrate holder, for a lithographic app... |
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Invention
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Systems for cleaning a portion of a lithography apparatus.
A cleaning tool configured to be inse... |
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2024
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Invention
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Apparatus for and method of lithography support cleaning.
Apparatus for and method of removing a... |
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Invention
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Method to manufacture nano ridges in hard ceramic coatings. A method for reducing sticking of an ... |
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2023
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Invention
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Apparatus and method for determining a condition associated with a pellicle.
An apparatus for de... |
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Invention
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Mode control of photonic crystal fiber based broadband radiation sources. A mode control system a... |
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2022
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Invention
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Improved broadband radiation generation in photonic crystal or highly non-linear fibres. Radiatio... |
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Invention
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Lithographic apparatus, locking device, and method. A lithographic apparatus includes an illumina... |
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Invention
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Metrology systems with phased arrays for contaminant detection and microscopy. a,b;726;734), a de... |
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Invention
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Metrology systems, temporal and spatial coherence scrambler and methods thereof.
A system includ... |
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Invention
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Metrology systems, measurement of wear systems and methods thereof.
A method includes irradiatin... |
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Invention
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Digital holographic microscope and associated metrology method.
A method of correcting a hologra... |
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Invention
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Fast uniformity drift correction. Systems, apparatuses, and methods are provided for adjusting il... |
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Invention
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Methods and apparatuses for spatially filtering optical pulses. An optical filter apparatus inclu... |
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Invention
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Systems and methods for measuring intensity in a lithographic alignment apparatus. A metrology sy... |
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2021
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Invention
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Intensity order difference based metrology system, lithographic apparatus, and methods thereof. T... |
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Invention
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Metrology system and coherence adjusters. A metrology system (400) includes a multi-source radiat... |
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Invention
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Multiple objectives metrology system, lithographic apparatus, and methods thereof. A metrology or... |
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Invention
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Polarization selection metrology system, lithographic apparatus, and methods thereof. An inspecti... |
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Invention
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Metrology tool with position control of projection system. A metrology tool that includes a subst... |
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Invention
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Pod handling systems and methods for a lithographic device. Systems, apparatuses, and methods are... |
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Invention
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Radiation source arrangement and metrology device. A radiation source arrangement including: a ra... |
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Invention
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Lithographic apparatus, metrology system, and intensity imbalance measurement for error correctio... |
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Invention
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Double-scanning opto-mechanical configurations to improve throughput of particle inspection syste... |
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Invention
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Lithographic apparatus and methods for multi-exposure of a substrate.
A lithographic system and ... |
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Invention
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Spectrometric metrology systems based on multimode interference and lithographic apparatus. A met... |
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Invention
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Self-referencing integrated alignment sensor. Systems, apparatuses, and methods are provided for ... |
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Invention
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Lithographic apparatus, metrology systems, and methods thereof.
A system includes an illuminatio... |
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Invention
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Sub micron particle detection on burl tops by applying a variable voltage to an oxidized wafer. S... |
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Invention
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Lithographic pre-alignment imaging sensor with build-in coaxial illumination. A patterning device... |
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Invention
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Lithographic apparatus, multi-wavelength phase-modulated scanning metrology system and method. A ... |
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Invention
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Generating an alignment signal based on local alignment mark distortions. A method for generating... |
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Invention
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Contaminant identification metrology system, lithographic apparatus, and methods thereof. An insp... |
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Invention
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Contaminant analyzing metrology system, lithographic apparatus, and methods thereof. An inspectio... |
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Invention
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Systems and methods for forming structures on a surface.
Systems and methods for forming structu... |
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Invention
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Optical apparatus and lithographic apparatus using the optical apparatus.
An optical apparatus a... |
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Invention
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Reticle gripper damper and isolation system for lithographic apparatuses. Embodiments herein desc... |
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Invention
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Apparatus for and method of sensing alignment marks. An apparatus for and method of sensing multi... |
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Invention
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Improved alignment of scatterometer based particle inspection system.
A pattering device inspect... |
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Invention
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Method for region of interest processing for reticle particle detection. An inspection system inc... |
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Invention
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Optical designs of miniaturized overlay measurement system. A compact sensor apparatus having an ... |
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2020
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Invention
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Lithographic system provided with a deflection apparatus for changing a trajectory of particulate... |
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Invention
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Contaminant detection metrology system, lithographic apparatus, and methods thereof. A system (40... |
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Invention
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Invariable magnification multilevel optical device with telecentric converter. A pre-alignment sy... |
