- All sections
- C - Chemistrymetallurgy
- C23C - Coating metallic materialcoating material with metallic materialsurface treatment of metallic material by diffusion into the surface, by chemical conversion or substitutioncoating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general
- C23C 16/511 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using microwave discharges
Patent holdings for IPC class C23C 16/511
Total number of patents in this class: 584
10-year publication summary
|
36
|
47
|
50
|
39
|
37
|
39
|
42
|
46
|
22
|
21
|
| 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Tokyo Electron Limited | 12645 |
200 |
| Applied Materials, Inc. | 18530 |
35 |
| Tohoku University | 2775 |
13 |
| Element Six Technologies Limited | 192 |
12 |
| National Institute of Advanced Industrial Science and Technology | 3797 |
11 |
| Board of Trustees of Michigan State University | 1182 |
11 |
| National University Corporation Nagoya University | 859 |
11 |
| KHS Corpoplast GmbH | 163 |
8 |
| KHS GmbH | 1419 |
8 |
| Draka Comteq, B.V. | 254 |
7 |
| Brother Kogyo Kabushikikaisha | 1754 |
7 |
| 6K Inc | 148 |
7 |
| Samsung Electronics Co., Ltd. | 145416 |
6 |
| Shimadzu Corporation | 6155 |
6 |
| Element Six Limited | 77 |
6 |
| Recarbon, Inc. | 30 |
6 |
| Shanghai Zhengshi Technology Co., Ltd | 16 |
6 |
| Sidel Participations | 1022 |
5 |
| International Business Machines Corporation | 61207 |
4 |
| Centre National de La Recherche Scientifique | 10414 |
4 |
| Other owners | 211 |