- All sections
- C - Chemistrymetallurgy
- C23C - Coating metallic materialcoating material with metallic materialsurface treatment of metallic material by diffusion into the surface, by chemical conversion or substitutioncoating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general
- C23C 16/511 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using microwave discharges
Patent holdings for IPC class C23C 16/511
Total number of patents in this class: 596
10-year publication summary
|
47
|
50
|
39
|
38
|
39
|
42
|
46
|
23
|
36
|
13
|
| 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 | 2026 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Tokyo Electron Limited | 13824 |
200 |
| Applied Materials, Inc. | 20406 |
39 |
| Element Six Technologies Limited | 207 |
13 |
| National Institute of Advanced Industrial Science and Technology | 3794 |
11 |
| Board of Trustees of Michigan State University | 1209 |
11 |
| Tohoku University | 2981 |
11 |
| National University Corporation Nagoya University | 784 |
9 |
| KHS Corpoplast GmbH | 160 |
8 |
| Draka Comteq, B.V. | 233 |
7 |
| KHS GmbH | 1452 |
7 |
| Brother Kogyo Kabushikikaisha | 1805 |
7 |
| 6K Inc | 134 |
7 |
| Samsung Electronics Co., Ltd. | 157946 |
6 |
| International Business Machines Corporation | 62671 |
6 |
| Shimadzu Corporation | 6347 |
6 |
| Element Six Limited | 74 |
6 |
| Recarbon, Inc. | 22 |
6 |
| Shanghai Zhengshi Technology Co., Ltd | 17 |
6 |
| Centre National de La Recherche Scientifique | 11026 |
4 |
| California Institute of Technology | 4037 |
4 |
| Other owners | 222 |