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2026
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G/S
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Semiconductor wafer processing equipment, namely,
semiconductor processing chambers used to depo... |
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G/S
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Semiconductor wafer processing equipment, namely, semiconductor processing chambers used to depos... |
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2025
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G/S
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providing an online non-downloadable software suite for automating and optimizing manufacturing o... |
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Invention
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In-situ reflectometry for real-time process control.
In one implementation, a method of monitori... |
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Invention
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Input/output (io) handling during update process for manufacturing system controller.
Methods an... |
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Invention
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Prevention of contamination of substrates during pressure changes in processing systems.
Disclos... |
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Invention
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Gate-all-around transistors and methods of forming.
Approaches herein provide devices and method... |
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G/S
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Semiconductor manufacturing equipment, namely, machines for
heating semiconductor wafers; wafer ... |
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G/S
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Semiconductor manufacturing equipment, namely, machines for heating semiconductor wafers; wafer p... |
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Invention
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Movable central reflectors of semiconductor processing equipment, and related systems and methods... |
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Invention
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Mapping of a replacement parts storage container.
A system includes a factory interface, a load ... |
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Invention
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Dual channel showerhead.
A showerhead for a semiconductor processing system is provided. In one ... |
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Invention
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Via and redistribution layer formation process for glass interposer. Methods and apparatus for pr... |
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Invention
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Deposition-etch species iadf and iedf control for carbon gapfill processes. Embodiments described... |
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Invention
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Modular multi-directional gas mixing block. Exemplary modular gas blocks may include a body havin... |
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Invention
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Method and material system for multi-threshold-voltage gates in semiconductor structures. Methods... |
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Invention
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Gas mixing block for dual processing chambers. Exemplary modular gas blocks may include a dual ga... |
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Invention
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Three-dimensional device packaging fanout. Embodiments of the disclosure include a method of form... |
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Invention
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Machine learning based virtual sensing of wafer temperatures during reflow process in a physical ... |
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Invention
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Photonic interconnects to enable communication between processor components and memory components... |
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Invention
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Reservoir-based precursor delivery for stable and rapid flow transitions in a plasma-enhanced ald... |
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Invention
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Sulfur based resist hardening. Embodiments described herein relate to a method for transferring a... |
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Invention
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Line edge roughness reduction through application of tensile stress. Embodiments described herein... |
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Invention
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Pulsed voltage waveform with binary pulses for biasing of plasma. Methods and apparatus for formi... |
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Invention
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Flow adaptors for gas flows, and related processing chambers, processing systems, apparatus, and ... |
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Invention
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Laser heating arrangements for injection gas activation, and related processing chambers, apparat... |
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Invention
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Gas injector assembly with improved gas mixing. Gas distribution inserts configured to deliver a ... |
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Invention
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Electrical device line filter. The present disclosure describes a filter assembly for a heater li... |
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Invention
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Variable conductance edge ring for vapor deposition chamber. Substrate processing chamber gas dis... |
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Invention
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Exhaust system control. Systems, methods, and apparatus including designs embodied in machine-rea... |
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Invention
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Greyscale lithography for substrate topography correction. A method of substrate topography corre... |
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Invention
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Sulfur based resist hardening.
Embodiments described herein relate to a method for transferring ... |
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Invention
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Minimizing corrosion in pre-plasma abatement systems.
Embodiments include a method for reducing ... |
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Invention
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Line edge roughness reduction through application of tensile stress.
Embodiments described herei... |
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G/S
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Providing online non-downloadable software for managing,
coordinating, monitoring, updating, and... |
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G/S
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Providing an online non-downloadable software suite for
automating and optimizing manufacturing ... |
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Invention
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Ion implanter, control system, and techniques for tuning buncher of ion implanter. An ion implant... |
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Invention
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Tft structures and electrical signal connections in goa and pixel circuits for lcd and oled displ... |
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Invention
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Load lock chamber improvement.
A system for transferring a substrate from a high pressure area t... |
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Invention
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Load lock chamber improvement. A system for transferring a substrate from a high pressure area to... |
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G/S
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Semiconductor wafer processing chambers for depositing
dielectric materials. Recorded computer s... |
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G/S
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Semiconductor wafer processing machines for depositing dielectric materials Recorded computer sof... |
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G/S
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Machines for the design and manufacture of OLED display substrates using semiconductor evaporator... |
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G/S
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Providing an online non-downloadable software suite for automating and optimizing manufacturing o... |
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G/S
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Providing online non-downloadable software for managing, coordinating, monitoring, updating, and ... |
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G/S
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Semiconductor manufacturing equipment used to densify
materials on wafers. |
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G/S
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Semiconductor wafer processing equipment used for implanting
different materials into wafers. |
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G/S
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Semiconductor wafer processing equipment and components,
namely, chemical mechanical polishers a... |
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G/S
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Semiconductor manufacturing machines used to densify materials on wafers |
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G/S
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Semiconductor wafer processing equipment and components, namely, chemical mechanical polishers an... |
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G/S
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Optical inspection apparatus in the nature of an optical microscope used for inspecting and analy... |
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G/S
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Semiconductor wafer processing equipment used for implanting different materials into wafers. |
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G/S
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Semiconductor manufacturing machines used for digital
lithography-based patterning. Recorded sof... |
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G/S
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Semiconductor wafer processing chamber for depositing
dielectric materials. |
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Invention
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Chemical process enhancement through modulation of gas or pressure control.
The present disclosu... |
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G/S
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Semiconductor wafer processing machines for depositing dielectric materials |
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G/S
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Semiconductor manufacturing equipment used to densify materials on wafers |
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G/S
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Semiconductor manufacturing machines used for digital lithography-based patterning Recorded softw... |
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G/S
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O-rings, non-metal gaskets, non-metal seals, and elastomer
seals for use in semiconductor manufa... |
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G/S
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O-rings, non-metal industrial-use and pipe gaskets, non-metal sealing rings for use as connection... |
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G/S
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Analytical equipment used for material metrology and
inspection in the field of semiconductor wa... |
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2024
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G/S
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Analytical equipment used for material metrology and inspection in the field of semiconductor waf... |
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Invention
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Hybrid coatings for chamber components. An apparatus includes a body configured to support a subs... |
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G/S
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Machines for the design and manufacture of OLED display
substrates using semiconductor evaporato... |
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G/S
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Semiconductor evaporator processing equipment for the design and manufacture of OLED display subs... |
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G/S
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Machines for use in the manufacture of electrical and
electronic circuitry. Optical defect inspe... |
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Invention
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Polishing carrier head with electromagnetic pressure control. A carrier head for positioning a su... |
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G/S
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Laboratory apparatus and instruments; scientific and laboratory devices for treatment using elect... |
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G/S
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Machines for use in the manufacture of electrical and electronic circuitry Optical defect inspect... |
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G/S
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Semiconductor manufacturing equipment, namely, systems
comprised of semiconductor manufacturing ... |
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Invention
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Monolithic physical vapor deposition target design.
In one embodiment, a physical vapor depositi... |
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Invention
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Substrate defect troubleshooting analysis using machine learning.
A method includes obtaining, b... |
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Invention
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Greyscale lithography for substrate topography correction.
A method of substrate topography corr... |
|
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Invention
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Hybrid inductively coupled plasma source for ion and radical etching. An apparatus for an inducti... |
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Invention
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Pulsed voltage waveform with binary pulses for biasing of plasma.
Methods and apparatus for form... |
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Invention
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Contamination detection system and method.
Described herein is a method for detecting contaminat... |
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Invention
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Via and redistribution layer formation process for glass interposer.
Methods and apparatus for p... |
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Invention
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Cleaning a polishing head with a flexure. Methods and systems for cleaning for a chemical mechani... |
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G/S
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Semiconductor manufacturing equipment, namely, systems comprised of semiconductor manufacturing m... |
|
|
Invention
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Modular multi-directional gas mixing block.
Exemplary modular gas blocks may include a body havi... |
|
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Invention
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Method and material system for multi-threshold-voltage gates in semiconductor structures.
Method... |
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G/S
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Software-controlled systems used in the semiconductor manufacturing industry, namely, recorded so... |
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|
G/S
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Semiconductor wafer processing equipment. |
|
|
Invention
|
Gas injector assembly with improved gas mixing.
Gas distribution inserts configured to deliver a... |
|
|
Invention
|
Deposition-etch species iadf and iedf control for carbon gapfill processes.
Embodiments describe... |
|
|
Invention
|
Exhaust system control.
Systems, methods, and apparatus including designs embodied in machine-re... |
|
|
Invention
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Flow guide arrangements for gas activation and gas distribution, and related chamber kits, method... |
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|
G/S
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Semiconductor wafer inspection system used to inspect wafers
for darkfield defects, including pa... |
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G/S
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Inspection machines for the inspection of semiconductor wafers to inspect darkfield defects, name... |
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G/S
|
Semiconductor wafer and glass panel process and processing
equipment. OLED based display devices... |
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G/S
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Semiconductor wafer processing equipment, namely, equipment for manufacturing OLED (Organic light... |
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G/S
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Semiconductor manufacturing equipment used to deposit metal
on wafers. |
