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2025
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G/S
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Providing online non-downloadable software for managing, coordinating, monitoring, updating, and ... |
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G/S
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Semiconductor wafer processing chambers for depositing
dielectric materials. Recorded computer s... |
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G/S
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Semiconductor wafer processing chambers for depositing dielectric materials Recorded computer sof... |
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G/S
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Machines for the design and manufacture of OLED display substrates using semiconductor evaporator... |
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G/S
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Providing an online non-downloadable software suite for automating and optimizing manufacturing o... |
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G/S
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Semiconductor manufacturing equipment used to densify
materials on wafers. |
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G/S
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Semiconductor wafer processing equipment used for implanting
different materials into wafers. |
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G/S
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Semiconductor wafer processing equipment and components,
namely, chemical mechanical polishers a... |
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G/S
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Semiconductor manufacturing equipment used to densify materials on wafers |
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Invention
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Two-dimension self-aligned scheme with subtractive metal etch.
Embodiments of the present disclo... |
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Invention
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Data intergration.
A method includes identifying sets of a first type of data associated with wa... |
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Invention
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Combination of inline metrology and on tool metrology for advanced packaging.
Aspects of the pre... |
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Invention
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Apparatus and method for cmp temperature control.
A chemical mechanical polishing apparatus incl... |
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G/S
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Semiconductor wafer processing equipment and components, namely, chemical mechanical polishers an... |
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G/S
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Optical defect inspection equipment in the nature of an optical microscope used for inspecting an... |
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G/S
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Semiconductor wafer processing equipment used for implanting different materials into wafers. |
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G/S
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Operational software for the quality control, and measurement of semiconductor materials, namely,... |
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G/S
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Semiconductor manufacturing machines used for digital
lithography-based patterning. Recorded sof... |
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G/S
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Semiconductor wafer processing chamber for depositing
dielectric materials. |
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Invention
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Substrate warpage compensation.
Embodiments of the disclosure include apparatus and methods for ... |
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Invention
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Finishing on packaging substrate with ultra high-density interconnects. A packaging substrate is ... |
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Invention
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Substrate warpage compensation. Embodiments of the disclosure include apparatus and methods for s... |
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Invention
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3d printed integrated gas mixer. Embodiments of the present disclosure generally relate to mixing... |
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Invention
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Enabling thick mosi growth. A method includes depositing a contact capping layer over a surface o... |
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Invention
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3d printed integrated gas mixer.
Embodiments of the present disclosure generally relate to mixin... |
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Invention
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Finishing on packaging substrate with ultra high-density interconnects.
A packaging substrate is... |
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Invention
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Small cell reactors with shared foreline and pressure conduit. In one embodiment, a processing sy... |
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Invention
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Extraction of organic material from high aspect ratio structures. Embodiments of the disclosure i... |
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Invention
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Formation of inductor core stacks using self-assembled monolayers. A method for forming a multi-l... |
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Invention
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Gas injector assembly with improved gas mixing. Gas inserts for semiconductor manufacturing proce... |
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Invention
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Sacrificial liner for copper interconnect. A method and apparatus for forming an interconnect str... |
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Invention
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Methods of forming low resistivity films using microwave treatment. According to one or more embo... |
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Invention
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In-situ microwave plasma impedance measurement system. Embodiments disclosed herein include an ap... |
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Invention
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Multi-channel microwave plasma impedance match tuning. Embodiments disclosed herein may include a... |
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Invention
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Microwave assisted passivation layer removal. A method of processing a substrate, includes perfor... |
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Invention
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Performance validation for impedance transformer in a microwave system. Embodiments disclosed her... |
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Invention
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Vapor dryer with integrated particle monitoring. An apparatus and method for drying substrates is... |
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G/S
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semiconductor wafer processing chamber for depositing dielectric materials |
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G/S
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Semiconductor manufacturing machines used for digital lithography-based patterning Recorded softw... |
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Invention
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Electrostatic chuck for non-planar substrates. Embodiments of the disclosure include an electrost... |
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Invention
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Shortwave infrared inspection of patterned substrates using focus averaging.
A system includes a... |
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Invention
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Electrostatic chuck for non-planar substrates.
Embodiments of the disclosure include an electros... |
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G/S
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O-rings, non-metal gaskets, non-metal seals, and elastomer
seals for use in semiconductor manufa... |
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Invention
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Substrate edge profile treatment. Embodiments described herein relate to a method of treatment fo... |
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Invention
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Electrical connection for chemical mechanical polishing carrier head. A chemical mechanical polis... |
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Invention
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Bonded showerhead showerhead assembly and method for using the same. The present disclosure gener... |
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Invention
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Liners having flow openings, and related chamber kits, processing chambers, and methods for semic... |
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Invention
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Low temperature atmospheric epitaxial process. A method of epitaxial deposition is disclosed. The... |
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G/S
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O-rings, non-metal gaskets, non-metal seals, and elastomer seals for use in semiconductor manufac... |
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Invention
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Isolation valve for implant productivity enhancement. An isolation valve for use in an ion implan... |
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Invention
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Air bearing shaft with wide operating temperature range. A system that reduces the amount of cont... |
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G/S
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Analytical equipment used for material metrology and
inspection in the field of semiconductor wa... |
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Invention
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Beam tube and layout for linear accelerator. An ion implantation system including an ion source f... |
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2024
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G/S
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Analytical equipment used for material metrology and inspection in the field of semiconductor waf... |
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G/S
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Machines for the design and manufacture of OLED display
substrates using semiconductor evaporato... |
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G/S
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Semiconductor evaporator processing equipment for the design and manufacture of OLED display subs... |
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G/S
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Machines for use in the manufacture of electrical and
electronic circuitry. Optical defect inspe... |
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G/S
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Machines for use in the manufacture of electrical and electronic circuitry Optical defect inspect... |
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G/S
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Semiconductor manufacturing equipment, namely, systems
comprised of semiconductor manufacturing ... |
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G/S
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Semiconductor manufacturing equipment, namely, systems comprised of semiconductor manufacturing m... |
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G/S
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Software-controlled systems used in the semiconductor manufacturing industry, namely, recorded so... |
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G/S
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Semiconductor wafer processing equipment. |
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G/S
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Semiconductor wafer inspection system used to inspect wafers
for darkfield defects, including pa... |
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G/S
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Inspection machines for the inspection of semiconductor wafers to inspect darkfield defects, name... |
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G/S
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Semiconductor wafer and glass panel process and processing
equipment. OLED based display devices... |
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G/S
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Semiconductor wafer processing equipment, namely, equipment for manufacturing OLED (Organic light... |
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G/S
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Semiconductor manufacturing equipment used to deposit metal
on wafers. |
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G/S
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Semiconductor manufacturing equipment used to deposit
materials on substrates. |
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G/S
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Providing non-downloadable electronic publications featuring
information about the environment, ... |
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G/S
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Eco-efficient semiconductor wafer processing equipment. Software-controlled, eco-efficient system... |
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G/S
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Optical devices for high performance photonic applications. |
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G/S
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Equipment for testing chemical delivery systems including
ampoules or containers. Downloadable a... |
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G/S
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Downloadable and/or recordable software for creating
semiconductor fabrication recipes. |
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G/S
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Equipment for delivery systems, namely, containers made of
metal for storing and delivering chem... |
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G/S
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Recorded computer software used for running, tracking, and
providing feedback for on-tool metrol... |
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Invention
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Lid and hydbrid substrate support for efficient heating and cooling in process chambers.
A lid f... |
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Invention
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Selective etching of alternating layers of silicon oxide and silicon nitride for high aspect rati... |
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Invention
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Vapor dryer with integrated particle monitoring.
An apparatus and method for drying substrates i... |
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Invention
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Sacrificial liner for copper interconnect.
A method and apparatus for forming an interconnect st... |
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Invention
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Bonded showerhead assembly and method for using the same.
The present disclosure generally relat... |
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Invention
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Removal of organic material from high aspect ratio structures.
Embodiments of the disclosure inc... |
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Invention
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Small cell reactors with shared foreline and pressure conduit.
In one embodiment, a processing s... |
|
|
Invention
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Enabling thick mosi growth.
A method includes depositing a contact capping layer over a surface ... |
|
|
Invention
|
Methods of forming low resistivity films using microwave treatment.
According to one or more emb... |
|
|
Invention
|
Microwave assisted passivation layer removal.
A method of processing a substrate, includes perfo... |
|
|
Invention
|
Formation of inductor core stacks using self-assembled monolayers.
A method for forming a multi-... |
|
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Invention
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Beam tube and layout for linear accelerator.
An ion implantation system including an ion source ... |
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Invention
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Plasma chamber backing plate improvement. A process chamber for processing a substrate is provide... |
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Invention
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Substrate support with sensor.
A substrate support assembly is provided including: a shaft; and ... |
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Invention
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Embedded electrostatic chuck (esc).
Embodiments disclosed herein may include an apparatus that i... |
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Invention
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Autonomous fault diagnostic tools for manufacturing systems by analyzing process runs.
A method ... |
