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2025
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G/S
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Semiconductor wafer processing equipment and components, namely, chemical mechanical polishers an... |
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G/S
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Optical defect inspection equipment in the nature of an optical microscope used for inspecting an... |
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G/S
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Semiconductor wafer processing equipment used for implanting different materials into wafers. |
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G/S
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Operational software for the quality control, and measurement of semiconductor materials, namely,... |
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G/S
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Semiconductor manufacturing machines used for digital
lithography-based patterning. Recorded sof... |
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G/S
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Semiconductor manufacturing equipment used to densify
materials on wafers. |
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G/S
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Semiconductor wafer processing chamber for depositing
dielectric materials. |
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G/S
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semiconductor wafer processing chamber for depositing dielectric materials |
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G/S
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Semiconductor manufacturing equipment used to densify materials on wafers |
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G/S
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Semiconductor manufacturing machines used for digital lithography-based patterning Recorded softw... |
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G/S
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O-rings, non-metal gaskets, non-metal seals, and elastomer
seals for use in semiconductor manufa... |
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G/S
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O-rings, non-metal gaskets, non-metal seals, and elastomer seals for use in semiconductor manufac... |
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Invention
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Epi isolation plate and parallel block purge flow tuning for growth rate and uniformity.
A metho... |
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G/S
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Analytical equipment used for material metrology and
inspection in the field of semiconductor wa... |
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Invention
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Cathode exchange mechanism to improve preventative maintenance time for cluster system.
A method... |
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Invention
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Bowed substrate clamping method, apparatus, and system.
Methods and apparatus for clamping a sub... |
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Invention
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Diagnostic tool to tool matching and comparative drill-down analysis methods for manufacturing eq... |
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Invention
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Centering wafer for processing chamber.
Processing chambers, substrate supports, centering wafer... |
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Invention
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Localized stress modulation by implant to back of wafer.
Embodiments herein are directed to loca... |
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2024
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G/S
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Analytical equipment used for material metrology and inspection in the field of semiconductor waf... |
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G/S
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Machines for the design and manufacture of OLED display
substrates using semiconductor evaporato... |
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G/S
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Semiconductor evaporator processing equipment for the design and manufacture of OLED display subs... |
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G/S
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Machines for use in the manufacture of electrical and
electronic circuitry. Optical defect inspe... |
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Invention
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Dual collimator physical vapor depositions processing chamber.
In some embodiments, a physical v... |
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G/S
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Machines for use in the manufacture of electrical and electronic circuitry Optical defect inspect... |
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Invention
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Blazed grating formation by staircase etch. Embodiments herein are generally directed to methods ... |
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Invention
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Composite structures for semiconductor process chambers. A method for forming a part for a proces... |
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Invention
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Methods for preparing drug containing particles enclosed by a laminated aluminum oxide and silico... |
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Invention
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Multi-flow gas circuits, chamber kits, processing chambers, and related apparatus and methods for... |
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Invention
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Chamber and methods for downstream residue management. Semiconductor processing chambers and syst... |
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Invention
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High throughput substrate processing cluster tool.
A cluster tool for fabricating substrates inc... |
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Invention
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Low resistivity metal stacks and methods of depositing the same. Metal stacks and methods of depo... |
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Invention
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Low resistivity metal stacks and methods of depositing the same.
Metal stacks and methods of dep... |
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Invention
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Methods for treatment of high-k materials to reduce leakage current and increase capacitance. Imp... |
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Invention
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Selective dielectric capping for hybrid bonding. A method for increasing dielectric bonding stren... |
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Invention
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A plasma source with a water leakage detection system. Disclosed herein are a plasma source, an a... |
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Invention
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High selectivity cryogenic tungsten-boron-carbide etch.
A method of selectively etching a hardma... |
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Invention
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Via shaping between metal layers for controlled resistance. This disclosure describes structures ... |
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Invention
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N-channel coupled with p-channel and methods of manufacture. Logic devices and methods of manufac... |
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Invention
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Metallic lithium coating via pvd on battery separator and passivated with inorganic layer(s). Emb... |
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Invention
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N-channel coupled with p-channel and methods of manufacture.
Logic devices and methods of manufa... |
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Invention
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Gallium introduction for cavity shaping engineering for cmos devices.
A method of forming an ele... |
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Invention
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Pre-lithiated anode roll temperature control by utilizing liquid or inert liquified gas to active... |
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G/S
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Semiconductor manufacturing equipment, namely, systems
comprised of semiconductor manufacturing ... |
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G/S
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Semiconductor manufacturing equipment, namely, systems comprised of semiconductor manufacturing m... |
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G/S
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Software-controlled systems used in the semiconductor manufacturing industry, namely, recorded so... |
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G/S
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Semiconductor wafer processing equipment. |
|
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Invention
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Multi-parameter implantation for managing wafer distortion. A method of stress management in a su... |
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Invention
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Engineering epi stacks for extreme wafer thinning. Embodiments of the present disclosure include ... |
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Invention
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Dynamic ion beam shape selection. Techniques to dynamically tune components of an ion implanter a... |
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Invention
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Multi-layered epitaxial stack and methods for preparing the same.
Embodiments of the present dis... |
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Invention
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Electrical contact cavity structure and methods of forming the same.
A method of forming an elec... |
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G/S
|
Semiconductor wafer inspection system used to inspect wafers
for darkfield defects, including pa... |
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G/S
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Inspection machines for the inspection of semiconductor wafers to inspect darkfield defects, name... |
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Invention
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Dios spray tank for post cmp substrate cleaning. Embodiments of the disclosure provided herein in... |
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Invention
|
Selective dielectric capping for hybrid bonding.
A method for increasing dielectric bonding stre... |
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G/S
|
Semiconductor wafer and glass panel process and processing
equipment. OLED based display devices... |
|
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Invention
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Virtual metrology for enhanced window temperature control. Embodiments of the disclosure relate t... |
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|
G/S
|
Semiconductor wafer and glass panel process and processing equipment OLED based display devices a... |
|
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G/S
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Semiconductor wafer processing equipment including equipment for manufacturing OLED (Organic ligh... |
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G/S
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Semiconductor manufacturing equipment used to deposit metal
on wafers. |
|
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G/S
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Semiconductor manufacturing equipment used to deposit
materials on substrates. |
|
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G/S
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Providing non-downloadable electronic publications featuring
information about the environment, ... |
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G/S
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Eco-efficient semiconductor wafer processing equipment. Software-controlled, eco-efficient system... |
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G/S
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Optical devices for high performance photonic applications. |
|
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G/S
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Equipment for testing chemical delivery systems including
ampoules or containers. Downloadable a... |
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G/S
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Downloadable and/or recordable software for creating
semiconductor fabrication recipes. |
|
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G/S
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Equipment for delivery systems, namely, containers made of
metal for storing and delivering chem... |
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G/S
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Recorded computer software used for running, tracking, and
providing feedback for on-tool metrol... |
|
|
G/S
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Semiconductor wafer processing equipment used for implanting
different materials into wafers. |
|
|
G/S
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Semiconductor wafer processing equipment used for implanting different materials into wafers |
|
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G/S
|
Semiconductor manufacturing equipment used to remove
material from substrates. |
|
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G/S
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Semiconductor manufacturing software used to provide wafer
doping uniformity. |
|
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G/S
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Semiconductor wafer processing equipment for modifying film
properties of substrates. |
|
|
G/S
|
Semiconductor manufacturing machines used to deposit metal
on wafers. |
|
|
G/S
|
Semiconductor processing equipment components, namely,
chambers used to deposit materials on sub... |
|
|
G/S
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Semiconductor manufacturing machines used to remove material
from wafers. |
|
|
G/S
|
Semiconductor wafer processing equipment, namely, semiconductor processing chamber used to deposi... |
|
|
Invention
|
Dual channel showerhead conductance optimization for uniform radial flow distribution.
A dual-ch... |
|
2023
|
Invention
|
Soft touch coating materials for substrate handling.
Semiconductor components and systems having... |
|
|
Invention
|
Evaporation source arrangement, vacuum deposition system, and method of coating a substrate. An e... |
|
|
Invention
|
Vibration reduction in ion implanters using embedded actuator forced attenuation.
A vibrating ac... |
|
|
Invention
|
Multi-flow methods, and related apparatus, for semiconductor manufacturing.
Embodiments of the p... |
|
|
Invention
|
Multi-flow chamber kits, processing chambers, and related apparatus and methods for semiconductor... |
|
|
Invention
|
Multi-flow gas circuits, processing chambers, and related apparatus and methods for semiconductor... |
|
|
Invention
|
Dio3 spray tank for post cmp substrate cleaning.
Embodiments of the disclosure provided herein i... |
|
|
Invention
|
Deposition of carbon gapfill materials.
The present disclosure provides methods and apparatus th... |
|
|
Invention
|
Selectivity of boron hard masks using ion implant.
Thicker hardmasks are typically needed for et... |
|
|
Invention
|
Vacuum sealed rf resonator cavity for linac.
An RF resonator cavity that includes a resonator co... |
|
|
Invention
|
Model-driven pressure estimation.
A method for estimating pressure values within a processing ch... |
|
|
Invention
|
Real-time plasma measurement and control.
A method of processing a substrate. The method includi... |
|
|
Invention
|
Conduit, systems and methods for fluid temperature control.
Chemical deliver conduits, systems f... |
|
|
Invention
|
Multi-layer wet-dry hardcoats including dual-sided wet hardcoats for flexible cover lens structur... |
|
2022
|
Invention
|
Vapor source, nozzle, and method of depositing an evaporated material on a substrate.
A vapor so... |
