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2025
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G/S
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providing an online non-downloadable software suite for automating and optimizing manufacturing o... |
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G/S
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Semiconductor wafer processing equipment, namely, semiconductor processing chambers used to depos... |
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G/S
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Semiconductor manufacturing equipment, namely, machines for
heating semiconductor wafers; wafer ... |
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G/S
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Semiconductor manufacturing equipment, namely, machines for heating semiconductor wafers; wafer p... |
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Invention
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Dry develop process of photoresist.
Embodiments disclosed herein include a method of developing ... |
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Invention
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Selective etching between silicon-and-germanium-containing materials with varying germanium conce... |
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Invention
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Fabrication tool calibration.
A method for calibrating a fabrication system including selecting,... |
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Invention
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Plasma showerhead assembly and method of reducing defects.
Plasma showerhead assemblies are disc... |
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Invention
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Identifying and weighing carriers in a substrate processing system.
A method and apparatus for i... |
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G/S
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Providing online non-downloadable software for managing,
coordinating, monitoring, updating, and... |
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G/S
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Providing an online non-downloadable software suite for
automating and optimizing manufacturing ... |
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G/S
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Providing online non-downloadable software for managing, coordinating, monitoring, updating, and ... |
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G/S
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Semiconductor wafer processing chambers for depositing
dielectric materials. Recorded computer s... |
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G/S
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Semiconductor wafer processing machines for depositing dielectric materials Recorded computer sof... |
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G/S
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Machines for the design and manufacture of OLED display substrates using semiconductor evaporator... |
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G/S
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Providing an online non-downloadable software suite for automating and optimizing manufacturing o... |
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Invention
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Enhanced silicon grind using chemical additives in fluid during grinding process.
A method and a... |
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Invention
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Through substrate via formation on patterned substrates. Methods of processing a substrate are pr... |
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Invention
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High throughput substrate processing cluster tools with factory interface centering. A cluster to... |
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Invention
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Optical devices with interlayer waveguide structures. A system includes an optical device. The op... |
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Invention
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Heater materials to prevent arcing. Embodiments disclosed herein generally relate to a substrate ... |
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Invention
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Implementing features generated using discrete effective medium refractive analysis of patterned ... |
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Invention
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Residue removal after etch processes using a boron-containing etchant. Exemplary semiconductor pr... |
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Invention
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Methods of repairing low-k materials after integration operations. Exemplary processing methods m... |
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Invention
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Reaction chamber with multi phase precursor delivery. Exemplary semiconductor processing systems ... |
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Invention
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Fast carbon plugfill for patterns with large critical dimensions. In some embodiments, a method i... |
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Invention
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Splitter circuit for wafer processing system. The present disclosure describes a semiconductor wa... |
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Invention
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Fluorine plasma resistant dielectric compositions. The present disclosure generally provides plas... |
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Invention
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Radio frequency matching network. Certain aspects are directed towards an apparatus for semicondu... |
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Invention
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Pulsing deposition using fast response mfc. Methods for forming work function layers (e.g., titan... |
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Invention
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Low-k film coefficient of thermal expansion modulation by uv treatment. A method for modulating t... |
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Invention
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Hybrid vacuum electrostatic chuck. Embodiments of the present invention generally relate to a sub... |
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Invention
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Dielectric bond layer for joining of dissimilar ceramic segments of a substrate support. The pres... |
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Invention
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Substrate support. A processing system for processing a substrate is provided. The processing sys... |
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G/S
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Semiconductor manufacturing equipment used to densify
materials on wafers. |
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G/S
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Semiconductor wafer processing equipment used for implanting
different materials into wafers. |
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G/S
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Semiconductor wafer processing equipment and components,
namely, chemical mechanical polishers a... |
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Invention
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Showerhead with controlled vapor deposition uniformity. A vapor deposition chamber showerhead fac... |
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Invention
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Automated torque driver solution. A method may include receiving, by a computing system, a torque... |
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Invention
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Heated process kit for substrate processing. Methods and apparatus for substrate processing are p... |
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Invention
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Chemical mechanical polisher cleaning unit. A rotating substrate support for use in a substrate p... |
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Invention
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Brush box wafer notch detection methods and extended functionality. The present disclosure descri... |
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Invention
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Underlayer with fluorine for extreme ultraviolet (euv) lithography. Embodiments described herein ... |
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Invention
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Reflector assemblies for substrate processing adjustability, and related process chambers, method... |
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Invention
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Method to fabricate a blazed grating using spacer and trim. Aspects of the present disclosure inc... |
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Invention
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Uniform in situ cleaning and deposition.
Exemplary semiconductor processing systems may include ... |
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Invention
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Low thermal budget laser annealing. The embodiments herein provide thermal processing apparatus. ... |
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Invention
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Selective process for simultaneous pfet epi hardmask and nfet partial bottom dielectric isolation... |
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Invention
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Fiber coupled radical detection. Embodiments described herein relate to an apparatus that include... |
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Invention
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Methods and apparatus for determining a property of a substrate surface. A method of determining ... |
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Invention
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Ion extraction optics with dynamic extraction angle control. An ion extraction optics for extract... |
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Invention
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In-line wafer positioning system using ir imaging. Monitoring system for a semiconductor manufact... |
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G/S
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Semiconductor manufacturing machines used to densify materials on wafers |
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Invention
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Substrate processing for improved wafer thickness uniformity. Approaches for reducing substrate t... |
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G/S
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Semiconductor wafer processing equipment and components, namely, chemical mechanical polishers an... |
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G/S
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Optical inspection apparatus in the nature of an optical microscope used for inspecting and analy... |
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G/S
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Semiconductor wafer processing equipment used for implanting different materials into wafers. |
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G/S
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Semiconductor manufacturing machines used for digital
lithography-based patterning. Recorded sof... |
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G/S
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Semiconductor wafer processing chamber for depositing
dielectric materials. |
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G/S
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Semiconductor wafer processing machines for depositing dielectric materials |
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G/S
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Semiconductor manufacturing equipment used to densify materials on wafers |
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G/S
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Semiconductor manufacturing machines used for digital lithography-based patterning Recorded softw... |
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G/S
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O-rings, non-metal gaskets, non-metal seals, and elastomer
seals for use in semiconductor manufa... |
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G/S
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O-rings, non-metal industrial-use and pipe gaskets, non-metal sealing rings for use as connection... |
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G/S
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Analytical equipment used for material metrology and
inspection in the field of semiconductor wa... |
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2024
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G/S
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Analytical equipment used for material metrology and inspection in the field of semiconductor waf... |
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G/S
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Machines for the design and manufacture of OLED display
substrates using semiconductor evaporato... |
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G/S
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Semiconductor evaporator processing equipment for the design and manufacture of OLED display subs... |
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G/S
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Machines for use in the manufacture of electrical and
electronic circuitry. Optical defect inspe... |
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G/S
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Laboratory apparatus and instruments; scientific and laboratory devices for treatment using elect... |
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G/S
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Machines for use in the manufacture of electrical and electronic circuitry Optical defect inspect... |
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G/S
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Semiconductor manufacturing equipment, namely, systems
comprised of semiconductor manufacturing ... |
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G/S
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Semiconductor manufacturing equipment, namely, systems comprised of semiconductor manufacturing m... |
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G/S
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Software-controlled systems used in the semiconductor manufacturing industry, namely, recorded so... |
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G/S
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Semiconductor wafer processing equipment. |
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G/S
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Semiconductor wafer inspection system used to inspect wafers
for darkfield defects, including pa... |
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G/S
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Inspection machines for the inspection of semiconductor wafers to inspect darkfield defects, name... |
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G/S
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Semiconductor wafer and glass panel process and processing
equipment. OLED based display devices... |
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G/S
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Semiconductor wafer processing equipment, namely, equipment for manufacturing OLED (Organic light... |
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G/S
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Semiconductor manufacturing equipment used to deposit metal
on wafers. |
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G/S
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Semiconductor manufacturing equipment used to deposit
materials on substrates. |
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Invention
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Substrate support assembly having an integrated spring pressure plate.
A substrate support assem... |
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Invention
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Fiber coupled radical detection.
Embodiments described herein relate to an apparatus that includ... |
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Invention
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Pulsing deposition using fast response mfc.
Methods for forming work function layers (e.g., tita... |
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G/S
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Providing non-downloadable electronic publications featuring
information about the environment, ... |
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Invention
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Methods of depositing silicon-containing films for semiconductor devices.
Methods of depositing ... |
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Invention
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Through substrate via formation on patterned substrates.
Methods of processing a substrate are p... |
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Invention
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Low thermal budget laser annealing.
The embodiments herein provide thermal processing apparatus.... |
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Invention
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In-line wafer positioning system using ir imaging.
Monitoring system for a semiconductor manufac... |
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Invention
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Showerhead with controlled vapor deposition uniformity.
A vapor deposition chamber showerhead fa... |
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Invention
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Nozzle design for collection of slurry. An apparatus for substrate polishing, a method for slurry... |
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G/S
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Eco-efficient semiconductor wafer processing equipment. Software-controlled, eco-efficient system... |
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G/S
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Optical devices for high performance photonic applications. |
