- All sections
- C - Chemistrymetallurgy
- C23C - Coating metallic materialcoating material with metallic materialsurface treatment of metallic material by diffusion into the surface, by chemical conversion or substitutioncoating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general
- C23C 18/14 - Decomposition by irradiation, e.g. photolysis, particle radiation
Patent holdings for IPC class C23C 18/14
Total number of patents in this class: 211
10-year publication summary
|
10
|
17
|
15
|
21
|
16
|
9
|
7
|
8
|
6
|
6
|
| 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 | 2025 | 2026 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Lam Research Corporation | 5655 |
8 |
| LG Chem, Ltd. | 17950 |
7 |
| FUJIFILM Corporation | 30594 |
7 |
| OrelTech Ltd. | 11 |
6 |
| Evonik Degussa GmbH | 1351 |
5 |
| PulseForge Incorporated | 64 |
5 |
| Leibniz-institut fur Neue Materialien Gemeinnutzige GmbH | 106 |
4 |
| Gennext Technologies, Inc. | 16 |
4 |
| Xerox Corporation | 4386 |
3 |
| Merck Patent GmbH | 5735 |
3 |
| Centre National de La Recherche Scientifique | 11059 |
3 |
| Tokyo Electron Limited | 13871 |
3 |
| Eastman Kodak Company | 2589 |
3 |
| The Regents of the University of Michigan | 5016 |
3 |
| Georgia Tech Research Corporation | 2963 |
3 |
| Nova Engineering Films, Inc. | 15 |
3 |
| Evonik Operations GmbH | 4384 |
3 |
| Biolase MG LLC | 89 |
3 |
| BASF SE | 21306 |
2 |
| Siemens AG | 23996 |
2 |
| Other owners | 131 |