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2025
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G/S
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Semiconductor manufacturing machines; Semiconductor substrates manufacturing machines; Semiconduc... |
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G/S
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Semiconductor manufacturing machines; semiconductor
substrates manufacturing machines; semicondu... |
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G/S
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Recorded computer simulation software for modeling semiconductor manufacturing; Recorded computer... |
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Invention
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Remote plasma based deposition of silicon carbide films using silicon-containing and carbon-conta... |
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Invention
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Method for etching features using a targeted deposition for selective passivation.
A method for ... |
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Invention
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Multi-state pulsing for achieving a balance between bow control and mask selectivity.
A method f... |
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2024
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Invention
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Vapor accumulator for corrosive gases with purging.
Vapor accumulator reservoirs for semiconduct... |
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Invention
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Substrate processing aparatuses with rotating mechanisms including shafts with gas flow paths.
A... |
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Invention
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Nucleation-free deposition.
Provided herein are methods of depositing tungsten (W) films without... |
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Invention
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Electrochemical deposition system including optical probes.
An electrochemical deposition system... |
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Invention
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Sensor data compression in a plasma tool.
Systems and methods for compressing data are described... |
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Invention
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Bottom and middle edge rings.
A bottom ring is configured to support a moveable edge ring that i... |
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Invention
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Wafer placement correction in indexed multi-station processing chambers.
Systems and techniques ... |
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Invention
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Metal deposition.
Various showerheads and methods are provided. A showerhead may include a facep... |
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Invention
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Radio frequency power generator having multiple output ports.
A radio frequency (RF) power gener... |
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Invention
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Rf tuning systems including tuning circuits having impedances for setting and adjusting parameter... |
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Invention
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Joining techniques for composite ceramic bodies.
In joining composite ceramic bodies, at least o... |
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Invention
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In-situ sensor-fusion with artificial intelligence.
In one embodiment, the disclosed apparatus i... |
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G/S
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Pure non-metallic silicon sold in ingots, slices, loose
aggregate chunks; silicon; silicon carbi... |
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Invention
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Blended and vertical composition gradient euv resists. Provided are methods for the chemical vapo... |
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Invention
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Temperature-controlled showerhead for semiconductor processing systems. Showerhead assemblies tha... |
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Invention
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Predicting tilt parameters. Techniques for predicting tilt parameters are provided. In some embod... |
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Invention
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An in-situ metal liner for improved high aspect ratio etch with bow control. A method of etching ... |
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Invention
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Substrate processing system with in-situ capacitive dividers for detection of plasma properties. ... |
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Invention
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Use of synthetic photo-realistic images for semiconductor. In accordance with some embodiments, m... |
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Invention
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Multi plenum showerhead without faceplate. A showerhead includes a plate and a baffle. The plate ... |
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Invention
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Vapor delivery system with charge volume container. A vapor delivery system delivers precursor va... |
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Invention
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Cooling plate with aperiodic organic reticulated cooling passage pattern. Cooling plates are desc... |
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Invention
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Selectivity in thermal etch processes through surface passivation. a method for processing a semi... |
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Invention
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Circulation of non-pfas fluids in liquid and supercritical fluid states through substrate process... |
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Invention
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Selective removal of redeposited carbon masks during etch. A method of etching recessed features ... |
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Invention
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Selective etch of stack below metal mask using oxygen and fluorine. A method of etching recessed ... |
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Invention
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Correction of deposition process drift. Disclosed herein is a method comprising performing a cham... |
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G/S
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Chemicals for use in industry and science; chemicals for use
in the semiconductor industry; chem... |
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G/S
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Chemicals for use in industry and science; Chemicals for use in the semiconductor industry; Chemi... |
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2023
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G/S
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Computer services, namely, providing on-line facilities for
real-time interaction with other com... |
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G/S
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Recorded computer software comprising a library of 3d models
and design tools for computer aided... |
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G/S
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Consultation services in the field of software for designing
and manufacturing semiconductors an... |
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G/S
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Computer hardware and recorded software systems for the installation, operation, maintenance, and... |
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G/S
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Ceramic parts for machines; parts for machines for the
deposition of materials; ceramic tools fo... |
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G/S
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Recorded virtual reality and augmented reality software for the design, development, manufacture,... |
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G/S
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Computer services, namely, providing on-line facilities for real-time interaction with other comp... |
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G/S
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Recorded computer software for designing and manufacturing semiconductors and micro-electro- mech... |
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G/S
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Consultation services in the field of software for designing and manufacturing semiconductors and... |
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Invention
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Reduced temperature etching of doped silicon oxide.
Examples are disclosed that relate to etchin... |
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Invention
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Throttle valve for substrate processing systems.
A valve of a substrate processing system includ... |
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Invention
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Yttria coating for plasma processing chamber components.
A component of a plasma processing cham... |
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Invention
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Anolyte solution dosing for electroplating apparatus.
An electroplating apparatus comprises an a... |
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Invention
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Evaluation of plasma uniformity using computer vision.
Various embodiments herein relate to appa... |
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G/S
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Ceramic tools for semiconductor manufacturing machines, semiconductor substrates manufacturing ma... |
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Invention
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Thin film growth modulation using wafer bow.
A process chamber and method of modulating thin fil... |
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Invention
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Apparatuses for backside wafer processing with edge-only wafer contact.
Semiconductor processing... |
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2022
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Invention
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Systems and methods for reducing reflected power associated with an hf rf generator efficiently. ... |
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Invention
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Systems and methods for central frequency tuning.
Systems and methods for central frequency tuni... |
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Invention
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Wafer edge tilt and etch rate uniformity.
An edge ring for use in a plasma chamber includes a fi... |
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Invention
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Etch uniformity improvement in radical etch using confinement ring.
A confinement ring for use i... |
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G/S
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Components for pulsed laser deposition machines for use in the manufacture of semiconductors, nam... |
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Invention
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Active temperature control of showerheads for high temperature processes.
A showerhead for a sub... |
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Invention
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Baffle for substrate processing system |
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Invention
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Methods and formulations for sacrificial bracing, surface protection, and queue-time management u... |
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Invention
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In-situ back side plasma treatment for residue removal from substrates.
A method for processing ... |
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Invention
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Atomic layer etching using boron trichloride.
Methods and apparatuses for etching materials usin... |
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Invention
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Electrode-dielectric nozzle for plasma processing.
Systems and device for removing edge bead acc... |
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Invention
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Compact gas separator devices co-located on substrate processing systems.
A gas separator device... |
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Invention
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Apparatuses for radiative heating of an edge region of a semiconductor wafer.
Provided herein ar... |
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Invention
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Transformer coupled plasma source design for thin dielectric film deposition.
An apparatus, comp... |
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Invention
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High selectivity doped hardmask films.
The present disclosure relates to high selectivity doped ... |
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G/S
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Components for semiconductor manufacturing machines, namely,
electrodes, calibrators, actuators,... |
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2021
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G/S
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Components of equipment for the manufacture, processing, and
fabrication of semiconductors, name... |
