Patent holdings for IPC class G01L 21/32

Total number of patents in this class: 31

10-year publication summary

6
6
0
1
1
1
2
2
0
0
2016 2017 2018 2019 2020 2021 2022 2023 2024 2025

Principal owners for this class

Owner
All patents
This class
MKS Instruments, Inc.
652
11
ULVAC, Inc.
1379
5
INFICON AG
25
3
Canon Anelva Corporation
686
2
Xerox Corporation
7002
1
National Institute of Advanced Industrial Science and Technology
3802
1
Brooks Automation, Inc.
159
1
INFICON GmbH
42
1
Keysight Technologies, Inc.
1196
1
Sumitomo Heavy Industries, Ltd.
1929
1
Vaclab Inc.
4
1
Chemring Sensors and Electronic Systems, Inc.
20
1
Q'z Corporation
6
1
GSI Helmholtzzentrum für Schwerionenforschung GmbH
86
1
Other owners 0