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2026
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Invention
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Method for producing multilayered structure. A method for producing a multilayered structure acco... |
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Invention
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Light-emitting device. A light-emitting device according to an aspect of the present invention co... |
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2025
|
Invention
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Gate valve and gate valve control method. A gate valve according to the present invention is conf... |
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Invention
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Anode structure and method of producing an anode structure.
An anode structure according to an e... |
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Invention
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Etching method.
An etching subject includes a silicon nitride film and a silicon oxide film. A m... |
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Invention
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Oxide semiconductor thin film for channel layer, thin film semiconductor device and method for pr... |
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Invention
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Deposition equipment for display devices, electronic device and method of deposition for display ... |
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Invention
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Sputtering apparatus and deposition method of tungsten film.
A substrate stage holding a substra... |
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Invention
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Peeling device for display device and method for display device.
A peeling device includes: a tr... |
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Invention
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Device and method for changing the position of a carrier for manufacturing a display device, and ... |
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|
Invention
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Etching method and etching device.
A method for selectively etching a silicon nitride film can i... |
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Invention
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Deposition device for display device and method of replacing magnet plate of the deposition devic... |
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Invention
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Vapor deposition source for vacuum vapor deposition apparatus, and vacuum vapor deposition method... |
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Invention
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Alignment apparatus, substrate processing apparatus including the same, and electronic apparatus.... |
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Invention
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Substrate processing apparatus and substrate processing method using the same.
A substrate proce... |
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Invention
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Deposition apparatus and method of maintaining the same.
A deposition apparatus includes a proce... |
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Invention
|
Film formation apparatus and method of transporting substrate.
The invention relates to a film f... |
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2024
|
Invention
|
Vacuum treatment apparatus and vacuum treatment method.
A vacuum treatment apparatus includes a ... |
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Invention
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Film formation device and method for controlling same. A film formation device according to one e... |
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Invention
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Shielding unit and vacuum deposition device equipped with said shielding unit. Provided is a shie... |
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Invention
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Vacuum deposition device and vacuum deposition method. Provided is a vacuum deposition device cap... |
|
|
Invention
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Process for pre-lithiation and equipment for implementing the same.
The present disclosure relat... |
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|
Invention
|
Manufacturing support device, manufacturing support method, and program. A manufacturing support ... |
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|
Invention
|
Vacuum deposition system and vacuum deposition method. Provided is a vacuum deposition system tha... |
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|
Invention
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Plasma treatment device. A plasma treatment device according to the present invention comprises: ... |
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|
Invention
|
Algan-based deep ultraviolet led and method for manufacturing the same. The present invention enh... |
|
|
Invention
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Oxide semiconductor thin film, semiconductor device and method for manufacturing same, and sputte... |
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|
Invention
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Shutter device and film formation device. A shutter device according to an aspect of the present ... |
|
|
Invention
|
Plasma processing apparatus and control method therefor.
[Object] To provide a plasma processing... |
|
|
Invention
|
Film deposition method and film deposition apparatus.
A sputtering gas containing a rare gas is ... |
|
|
Invention
|
Film formation method and film formation device. Provided is technology with which it is possible... |
|
|
Invention
|
Etching method.
An etching method includes generating reactive plasma containing hydrogen and ni... |
|
|
Invention
|
Etching apparatus and etching method.
Provided is an etching apparatus for etching a silicon oxi... |
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G/S
|
Installation, repair and maintenance of semiconductor manufacturing machines and systems; Install... |
|
|
Invention
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Target assembly and method for manufacturing target assembly. To provide a target assembly in whi... |
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|
Invention
|
Molybdenum target and method for producing same. The present invention provides a molybdenum targ... |
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|
Invention
|
Method of producing hard mask.
A target is made of tungsten, a rare gas and nitrogen gas are int... |
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|
Invention
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Hard mask manufacturing method. Provided is a hard mask manufacturing method capable of adjusting... |
|
|
Invention
|
Vacuum evaporation method. A vacuum evaporation method includes a vaporization step in which use ... |
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2023
|
Invention
|
Evaporation source for vacuum evaporation apparatus and vacuum evaporation method.
An evaporatio... |
|
|
Invention
|
Film deposition method.
Provided is a method of depositing a silicon film in which adjustments o... |
|
|
Invention
|
Method for depositing film. Provided is a method for depositing a silicon film, the method capabl... |
|
|
Invention
|
Vacuum treatment device, electrostatic chuck, and transport roller. A vacuum treatment device acc... |
|
|
Invention
|
Deep ultraviolet led.
Provided is a deep ultraviolet LED having an improved light extraction eff... |
|
|
Invention
|
Crucible device and vapor deposition device comprising same. A crucible device (1) comprising: a ... |
|
|
Invention
|
Tungsten target and method for manufacturing same.
To provide a tungsten target in which provisi... |
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|
Invention
|
Method for controlling specific resistivity and stress of tungsten through pvd sputtering method.... |
|
|
Invention
|
Sputtering target, method for producing sputtering target, oxide semiconductor thin film, thin fi... |
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2022
|
Invention
|
Method for manufacturing crystallized laminated structure.
Provided is a method of manufacturing... |
|
|
Invention
|
Method for controlling resistivity and crystallinity of low-resistance material through pvd.
The... |
|
2021
|
G/S
|
Machines for the deposition of thin films upon semiconductor wafers; Semiconductor wafer processi... |
|
|
G/S
|
Machines and systems for the deposition of thin films upon semiconductor wafers; Semiconductor wa... |
|
2012
|
G/S
|
Inking apparatus for printing machines; spray guns for
paint; machines and apparatus for cleanin... |
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2011
|
G/S
|
chemical vapor deposition apparatus for use in the manufacture of semiconductors; vacuum depositi... |
|
|
G/S
|
Chemical vapor deposition apparatus for use in the manufacture of semiconductors; vacuum depositi... |
|
|
G/S
|
Chemical vapor deposition apparatus for use in the
manufacture of semiconductors; vacuum deposit... |
|
|
G/S
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Embrocations for forming insulating coating films; ultrafine
particles of ceramics, metals or pr... |
|
2010
|
G/S
|
Roll-to-roll deposition machines and systems; roll-to-roll
deposition machines and systems for m... |
|
|
G/S
|
Vacuum vapor deposition apparatus for manufacturing semiconductor devices; sputtering apparatus f... |
|
|
G/S
|
Vacuum vapor deposition apparatus for manufacturing
semiconductor devices; sputtering apparatus ... |
|
|
G/S
|
Freeze-drying machines for manufacturing pharmaceutical preparations; freeze-drying machines for ... |
|
|
G/S
|
Freeze-drying apparatus for manufacturing pharmaceutical
preparations; freeze-drying apparatus f... |
|
|
G/S
|
Apparatus and instruments for measuring and testing optical thin film |
|
|
G/S
|
Measuring or testing machines and instruments; spectroscopic
ellipsometer for thin film analysis. |
|
|
G/S
|
Lubricating oils. |
|
|
G/S
|
Lubricating oils |
|
2007
|
G/S
|
Industrial programmable modular systems for the manufacture of electronic displays, liquid crysta... |
|
|
G/S
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Fuel; industrial oil; industrial grease; raw material waxes |
|
|
G/S
|
Laboratory apparatus and instruments; mass spectroscopy type
helium leak detector; other measuri... |
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|
G/S
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Fuel; industrial oil; industrial grease; wax (raw material). |
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2006
|
G/S
|
semiconductor wafer processing equipment, namely microwave and RF plasma chamber for removing pho... |
|
2005
|
G/S
|
Electric welding apparatus; ozonisers (ozonators);
electrolysers (electrolytic cells); photo-cop... |
|
2001
|
G/S
|
Gravimetric measuring instruments to measure molecular
interaction by quartz crystal microbalanc... |
|
2000
|
G/S
|
Laboratory apparatus and instruments, namely, biosensors for measuring, monitoring, analyzing, st... |
|
1998
|
G/S
|
Semiconductor wafer processing equipment, namely microwave and RF plasma chamber for removing pho... |
|
1996
|
G/S
|
helium leak detectors and their parts |
|
1979
|
G/S
|
Hobbing and Heading Tools |
|
1978
|
G/S
|
Vacuum Coaters which Vaporize Materials and Then Condense These Vapors to Coat a Surface, and Par... |
|
1975
|
G/S
|
VACUUM PUMPS, VACUUM VALVES OF BOTH THE HAND-OPERATED AND AIR-OPERATED TYPE USED IN SEALING AND V... |
