Patent holdings for IPC class H01J 11/28

Total number of patents in this class: 4

10-year publication summary

1
1
0
1
0
0
0
0
0
0
2017 2018 2019 2020 2021 2022 2023 2024 2025 2026

Principal owners for this class

Owner
All patents
This class
LG Electronics Inc.
74619
2
Applied Materials, Inc.
19849
1
Axcelis Technologies, Inc.
431
1
Other owners 0