Patent holdings for IPC class H01J 37/067

Total number of patents in this class: 20

10-year publication summary

0
3
2
2
2
0
1
1
1
0
2017 2018 2019 2020 2021 2022 2023 2024 2025 2026

Principal owners for this class

Owner
All patents
This class
Hitachi High-Technologies Corporation
1994
2
Varian Semiconductor Equipment Associates, Inc.
1213
2
Mapper Lithography IP B.V.
132
2
Aquasium Technology Limited
18
2
Mitsubishi Heavy Industries, Ltd.
8962
1
Axcelis Technologies, Inc.
429
1
Denka Company Limited
2674
1
FEI Company
1016
1
JEOL Ltd.
610
1
KLA-Tencor Corporation
2525
1
Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.V.
1824
1
Leybold GmbH
294
1
Ralf Edinger
4
1
Carl Zeiss MultiSEM GmbH
159
1
Hitachi High-Tech Corporation
5573
1
Thales Deutschland GmbH Electron Devices
5
1
Other owners 0