Silmach

France

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IPC Class
H02N 1/00 - Electrostatic generators or motors using a solid moving electrostatic charge carrier 10
G01B 5/30 - Measuring arrangements characterised by the use of mechanical techniques for measuring the deformation in a solid, e.g. mechanical strain gauge 9
B81B 3/00 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes 6
G01D 5/04 - Mechanical means for transferring the output of a sensing memberMeans for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for convertingTransducers not specially adapted for a specific variable using mechanical means using leversMechanical means for transferring the output of a sensing memberMeans for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for convertingTransducers not specially adapted for a specific variable using mechanical means using camsMechanical means for transferring the output of a sensing memberMeans for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for convertingTransducers not specially adapted for a specific variable using mechanical means using gearing 6
G01B 7/16 - Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge 5
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Status
Pending 5
Registered / In Force 27
Found results for  patents

1.

MICROMECHANICAL TEMPERATURE DETECTION DEVICE

      
Application Number EP2024065620
Publication Number 2024/251883
Status In Force
Filing Date 2024-06-06
Publication Date 2024-12-12
Owner SILMACH (France)
Inventor
  • Pepe, Jules
  • Malapert, Julien
  • Hanifi, Loic

Abstract

The invention relates to a micromechanical temperature detection device (2) comprising: - a frame (4) comprising a first frame portion and a second frame portion; - an indicator (5); - at least one frangible junction portion connecting the indicator (5) to the first frame portion so as to hold the indicator (5) in a first initial position; - an elastic return structure (61) capable of exerting a return force on the indicator (5), wherein the movement of the second frame portion relative to the first frame portion beyond a predefined trigger distance causes the frangible junction portion to break and thereby release the indicator (5) which moves from a first initial position to a second final position as a result of the return force exerted by the elastic return structure (6).

IPC Classes  ?

  • G01K 3/00 - Thermometers giving results other than momentary value of temperature
  • G01K 3/04 - Thermometers giving results other than momentary value of temperature giving mean valuesThermometers giving results other than momentary value of temperature giving integrated values in respect of time
  • G01K 5/48 - Measuring temperature based on the expansion or contraction of a material the material being a solid
  • G01K 5/50 - Measuring temperature based on the expansion or contraction of a material the material being a solid arranged for free expansion or contraction
  • G01B 5/30 - Measuring arrangements characterised by the use of mechanical techniques for measuring the deformation in a solid, e.g. mechanical strain gauge

2.

MICROMECHANICAL IMPACT DETECTION DEVICE

      
Application Number EP2024065618
Publication Number 2024/251882
Status In Force
Filing Date 2024-06-06
Publication Date 2024-12-12
Owner SILMACH (France)
Inventor
  • Pepe, Jules
  • Malapert, Julien
  • Minotti, Patrice

Abstract

The invention relates to a micromechanical impact detection device (2) comprising: - a frame (4); - an inertial mass (5) that is movably mounted with respect to the frame (4); - an indicator (6) that is movably mounted with respect to the frame (4); - a connecting structure (7) connecting the indicator (6) to the inertial mass (5) and to the frame (4), the connecting structure (7) being configured such that a movement of the inertial mass (5) from a first initial position to a first final position brings about a correlative movement of the indicator (6) from a second initial position to a second final position; - a locking structure (8) configured such that, once it is in the locked position, the locking structure (8) prevents the inertial mass (5) from returning to the first initial position, which thereby results in the indicator (6) being kept in the second final position.

IPC Classes  ?

  • G01P 15/03 - Measuring accelerationMeasuring decelerationMeasuring shock, i.e. sudden change of acceleration by making use of inertia forces by using non-electrical means
  • G01P 15/04 - Measuring accelerationMeasuring decelerationMeasuring shock, i.e. sudden change of acceleration by making use of inertia forces for indicating maximum value
  • G01P 15/06 - Measuring accelerationMeasuring decelerationMeasuring shock, i.e. sudden change of acceleration by making use of inertia forces for indicating maximum value using members subjected to a permanent deformation
  • G01P 15/08 - Measuring accelerationMeasuring decelerationMeasuring shock, i.e. sudden change of acceleration by making use of inertia forces with conversion into electric or magnetic values

3.

METHOD FOR CONTROLLING A MICROELECTROMECHANICAL SYSTEM

      
Application Number 18562689
Status Pending
Filing Date 2022-05-20
First Publication Date 2024-08-08
Owner
  • SILMACH (France)
  • CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS) (France)
  • UNIVERSITE DE FRANCHE-COMTE (France)
Inventor
  • Sworowski, Marc
  • Vuillemin, Cédric
  • Ameur, Haythem
  • Bourbon, Gilles
  • Le Moal, Patrice

Abstract

The invention relates to a method for controlling a microelectromechanical system by means of an electrical control signal alternating between a maximum voltage value (Vmax) and a minimum voltage value (Vmin), wherein, during the transition from the maximum voltage value (Vmax) to the minimum voltage value (Vmin), the value of the voltage of the electrical control signal monotonously decreases from the maximum voltage value (Vmax) to the minimum voltage value (Vmin), which signal comprising, in sequential order: a first slope between the maximum voltage value (Vmax) and a first voltage threshold value (Vend), a second slope, having a lower absolute value than the first slope, between the first voltage threshold value (Vend) and a second voltage threshold value (Vstart), and a third slope, having a higher absolute value than the second slope, between the second voltage threshold value (Vstart) and the minimum voltage value (Vmin).

IPC Classes  ?

4.

Electromechanical Microsystem for Moving a Mechanical Part in Two Opposite Directions

      
Application Number 18562581
Status Pending
Filing Date 2022-05-20
First Publication Date 2024-07-25
Owner
  • SILMACH (France)
  • CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS) (France)
  • UNIVERSITE DE FRANCHE-COMTE (France)
Inventor
  • Côte, Thierry
  • Minotti, Patrice
  • Bourbon, Gilles
  • Le Moal, Patrice

Abstract

The invention relates to a microelectromechanical system comprising a support and an actuator, the actuator comprising a drive module comprising: a fixed drive portion (210), mounted fixedly on the support, and comprising a fixed comb (211 with fingers (213), and a movable drive portion (220), mounted movably relative to the support, and comprising a movable comb (221) with fingers (223), a latching mechanism that is movable between an initial unlatched configuration and a final latched configuration, wherein the movable comb (221) is arranged facing the fixed comb (211) so that when the latching mechanism is in the initial unlatched configuration, the fingers (223) of the movable comb (221) are not engaged between the fingers (213) of the fixed comb (211), and when the latching mechanism is in the final latched configuration, the fingers (223) of the movable comb (221) are engaged between the fingers (213) of the fixed comb (211) and the latching mechanism (500) prevent disengagement of the fingers (223) of the movable comb (221) from between the fingers (213) of the fixed comb (211).

IPC Classes  ?

  • H02N 1/00 - Electrostatic generators or motors using a solid moving electrostatic charge carrier
  • B81B 3/00 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes

5.

Microelectromechanical System for Moving a Mechanical Part in Two Opposite Directions

      
Application Number 18562630
Status Pending
Filing Date 2022-05-20
First Publication Date 2024-07-18
Owner
  • SILMACH (France)
  • CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS) (France)
  • UNIVERSITE DE FRANCHE-COMTE (France)
Inventor
  • Côte, Thierry
  • Minotti, Patrice
  • Bourbon, Gilles
  • Le Moal, Patrice

Abstract

The invention relates to a microelectromechanical system (10) comprising a drive module (200) comprising: a fixed drive portion (210), a movable drive portion (220), and a suspension (230), the movable drive portion (220) being able to be moved relative to the fixed drive portion (210) in a first direction (A), as a result of an electrostatic force, which causes an elastic deformation of the suspension (230), and the movable drive portion (220) being able to be moved relative to the fixed drive portion (210) in a second direction (B), opposite to the first direction (A), as a result of an elastic return force generated by the suspension (230), the actuator (11) also comprising a stop (24) limiting the movement of the first movable portion (220) in the second direction (B) so that the elastic force generated by the suspension (230) is not cancelled.

IPC Classes  ?

  • H02N 1/00 - Electrostatic generators or motors using a solid moving electrostatic charge carrier
  • B81B 3/00 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes

6.

METHOD FOR JOINING A FIRST PART TO A SECOND PART MADE OF SILICON

      
Application Number FR2022052087
Publication Number 2023/079251
Status In Force
Filing Date 2022-11-04
Publication Date 2023-05-11
Owner SILMACH (France)
Inventor
  • Cote, Thierry
  • Berchet, Maxime

Abstract

The invention relates to a method for joining a first part (10) to a second part (20) made of silicon, wherein the second part (20) has a receiving opening (21), a stop opening (31) separated from the receiving opening (21) by a frangible portion (32) of the second part, and a notch (33) formed in the frangible portion (32) of the second part (20), the method comprising a step of: - inserting the first part (10) into the receiving opening (21) of the second part (20) in order to join the second part (20) to the first part (10), wherein the insertion of the first part (10) into the opening (21) of the second part (20) generates mechanical stress on the frangible portion (32) of the second part (20), causing a fracture (36) to occur in the frangible portion (32) from the notch (33), the fracture (36) extending through the frangible portion (32) from the receiving opening (21) to the stop opening (31).

IPC Classes  ?

  • G04B 13/02 - WheelsPinionsSpindlesPivots
  • B81C 3/00 - Assembling of devices or systems from individually processed components

7.

METHOD FOR CONTROLLING A MICROELECTROMECHANICAL SYSTEM

      
Application Number FR2022050962
Publication Number 2022/243643
Status In Force
Filing Date 2022-05-20
Publication Date 2022-11-24
Owner
  • SILMACH (France)
  • CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS) (France)
  • UNIVERSITE DE FRANCHE-COMTE (France)
Inventor
  • Sworowski, Marc
  • Vuillemin, Cédric
  • Ameur, Haythem
  • Bourbon, Gilles
  • Le Moal, Patrice

Abstract

The invention relates to a method for controlling a microelectromechanical system by means of an electrical control signal alternating between a maximum voltage value (Vmax) and a minimum voltage value (Vmin), wherein, during the transition from the maximum voltage value (Vmax) to the minimum voltage value (Vmin), the value of the voltage of the electrical control signal monotonously decreases from the maximum voltage value (Vmax) to the minimum voltage value (Vmin), which signal comprising, in sequential order: - a first slope between the maximum voltage value (Vmax) and a first voltage threshold value (Vend), - a second slope, having a lower absolute value than the first slope, between the first voltage threshold value (Vend) and a second voltage threshold value (Vstart), and - a third slope, having a higher absolute value than the second slope, between the second voltage threshold value (Vstart) and the minimum voltage value (Vmin).

IPC Classes  ?

  • B81B 7/00 - Microstructural systems
  • B81B 3/00 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes

8.

MICROELECTROMECHANICAL SYSTEM FOR MOVING A MECHANICAL PART IN TWO OPPOSITE DIRECTIONS

      
Application Number FR2022050963
Publication Number 2022/243644
Status In Force
Filing Date 2022-05-20
Publication Date 2022-11-24
Owner
  • SILMACH (France)
  • CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS) (France)
  • UNIVERSITE DE FRANCHE-COMTE (France)
Inventor
  • Côte, Thierry
  • Minotti, Patrice
  • Bourbon, Gilles
  • Le Moal, Patrice

Abstract

The invention relates to a microelectromechanical system (10), comprising a drive module (200) comprising: - a stationary drive part (210), - a movable drive part (220), and - a suspension (230), the movable drive part (220) being capable of being moved with respect to the stationary drive part (210) in a first direction (A) when exposed to an electrostatic force which causes an elastic deformation of the suspension (230), and the movable drive part (220) being capable of being moved with respect to the stationary drive part (210) in a second direction (B), opposite to the first direction (A), when exposed to an elastic return force generated by the suspension (230), the actuator (11) further comprising an abutment (240) which limits the movement of the first movable part (220) in the second direction (B) so that the elastic force generated by the suspension (230) is not cancelled out.

IPC Classes  ?

  • G04C 3/12 - Electromechanical clocks or watches independent of other time-pieces and in which the movement is maintained by electric means wherein movement is regulated by a mechanical oscillator other than a pendulum or balance, e.g. by a tuning fork driven by piezoelectric meansElectromechanical clocks or watches independent of other time-pieces and in which the movement is maintained by electric means wherein movement is regulated by a mechanical oscillator other than a pendulum or balance, e.g. by a tuning fork driven by magnetostrictive means
  • B81B 3/00 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes

9.

ELECTROMECHANICAL MICROSYSTEM FOR MOVING A MECHANICAL PART IN TWO OPPOSITE DIRECTIONS

      
Application Number FR2022050964
Publication Number 2022/243645
Status In Force
Filing Date 2022-05-20
Publication Date 2022-11-24
Owner
  • SILMACH (France)
  • CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS) (France)
  • UNIVERSITE DE FRANCHE-COMTE (France)
Inventor
  • Côte, Thierry
  • Minotti, Patrice
  • Bourbon, Gilles
  • Le, Moal Patrice

Abstract

The invention relates to an electromechanical microsystem, comprising a stand and an actuator, the actuator comprising a drive module comprising: - a fixed drive portion (210) fixedly mounted to the stand and comprising a stationary comb (211) with fingers (213); - a movable drive portion (220) mounted so as to move relative to the stand and comprising a movable comb (221) with fingers (223); - a locking mechanism movable between an initial unlocked configuration and a final locked configuration; and wherein the movable comb (221) is arranged opposite the fixed comb (211) so that, when the locking mechanism is in the initial unlocked configuration, the fingers (223) of the movable comb (221) are not engaged between the fingers (213) of the fixed comb (211) and, when the locking mechanism is in the final locked configuration, the fingers (223) of the movable comb (221) are engaged between the fingers (213) of the fixed comb (211) and the locking mechanism (500) prevents the fingers (223) of the movable comb (221) being disengaged from between the fingers (213) of the fixed comb (211).

IPC Classes  ?

  • B81B 3/00 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
  • H02N 1/00 - Electrostatic generators or motors using a solid moving electrostatic charge carrier

10.

Mems sensor for sensing deformation by breaking contact between two electrodes

      
Application Number 17605692
Grant Number 11946741
Status In Force
Filing Date 2020-05-07
First Publication Date 2022-05-12
Grant Date 2024-04-02
Owner SILMACH (France)
Inventor
  • Sworowski, Marc
  • Haye, Charles

Abstract

The present invention relates to a MEMS deformation sensor for measuring a relative movement between two regions of a structure, the sensor comprising: —a first portion (2) and a second portion (3) that are movable with respect to one another along a direction of measurement (X); —a thrust element (4) mounted fixed with respect to the first portion; —a first electrode (A) and a second electrode (B) that are capable of being raised to different electrical potentials, each mounted fixed with respect to the second portion; —a connecting portion (I) forming an electrical link between the first electrode and the second electrode, the thrust element applying a load to the connecting portion when the first portion moves with respect to the second portion along the direction of measurement beyond a predetermined distance, the electrical link being broken under the effect of the load.

IPC Classes  ?

  • G01B 7/00 - Measuring arrangements characterised by the use of electric or magnetic techniques
  • B81B 3/00 - Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
  • G01B 7/16 - Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge

11.

MEMS SENSOR FOR SENSING DEFORMATION BY BREAKING CONTACT BETWEEN TWO ELECTRODES

      
Document Number 03138212
Status Pending
Filing Date 2020-05-07
Open to Public Date 2020-11-19
Owner SILMACH (France)
Inventor
  • Sworowski, Marc
  • Haye, Charles

Abstract

The present invention relates to a MEMS deformation sensor for measuring a relative movement between two regions of a structure, the sensor comprising: - a first portion (2) and a second portion (3) that are movable with respect to one another along a direction of measurement (X); - a thrust element (4) mounted fixed with respect to the first portion; - a first electrode (A) and a second electrode (B) that are capable of being raised to different electrical potentials, each mounted fixed with respect to the second portion; - a connecting portion (I) forming an electrical link between the first electrode and the second electrode, the thrust element applying a load to the connecting portion when the first portion moves with respect to the second portion along the direction of measurement beyond a predetermined distance, the electrical link being broken under the effect of the load.

IPC Classes  ?

  • G01B 7/16 - Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge

12.

MEMS SENSOR FOR SENSING DEFORMATION BY BREAKING CONTACT BETWEEN TWO ELECTRODES

      
Application Number EP2020062733
Publication Number 2020/229303
Status In Force
Filing Date 2020-05-07
Publication Date 2020-11-19
Owner SILMACH (France)
Inventor
  • Sworowski, Marc
  • Haye, Charles

Abstract

The present invention relates to a MEMS deformation sensor for measuring a relative movement between two regions of a structure, the sensor comprising: - a first portion (2) and a second portion (3) that are movable with respect to one another along a direction of measurement (X); - a thrust element (4) mounted fixed with respect to the first portion; - a first electrode (A) and a second electrode (B) that are capable of being raised to different electrical potentials, each mounted fixed with respect to the second portion; - a connecting portion (I) forming an electrical link between the first electrode and the second electrode, the thrust element applying a load to the connecting portion when the first portion moves with respect to the second portion along the direction of measurement beyond a predetermined distance, the electrical link being broken under the effect of the load.

IPC Classes  ?

  • G01B 7/16 - Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge

13.

Strain sensor with measurement discrimination according to the deformation direction

      
Application Number 16082142
Grant Number 10704883
Status In Force
Filing Date 2017-02-28
First Publication Date 2019-02-28
Grant Date 2020-07-07
Owner
  • ETAT FRANÇAIS REPRESENTE PAR LE DELEGUE GENERAL POUR L'ARMEMENT (France)
  • SILMACH (France)
Inventor
  • Cote, Thierry
  • Sadoulet, Vianney
  • Minotti, Patrice
  • Walter, Vincent
  • Girardin, Pascal

Abstract

A deformation passive sensor includes a system for detecting a variation in the distance between two points or regions of a structure, and a carrier having first and second parts configured to be fixed to the points or regions. The system includes a measuring assembly carried by the first part and actuatable only in one measurement direction in order to measure and store a measurement associated with at least one deformation in a measurement direction, and an actuating device including an intermediary assembly having an actuating member for actuating the measuring assembly, and an actuating assembly having a push part facing the intermediary assembly and configured such that the actuating member is moved with respect to the measuring assembly only when the second part moves in the measurement direction.

IPC Classes  ?

  • G01B 5/30 - Measuring arrangements characterised by the use of mechanical techniques for measuring the deformation in a solid, e.g. mechanical strain gauge
  • G01B 21/32 - Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring the deformation in a solid
  • G01D 5/04 - Mechanical means for transferring the output of a sensing memberMeans for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for convertingTransducers not specially adapted for a specific variable using mechanical means using leversMechanical means for transferring the output of a sensing memberMeans for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for convertingTransducers not specially adapted for a specific variable using mechanical means using camsMechanical means for transferring the output of a sensing memberMeans for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for convertingTransducers not specially adapted for a specific variable using mechanical means using gearing
  • G01L 1/00 - Measuring force or stress, in general
  • G01L 1/04 - Measuring force or stress, in general by measuring elastic deformation of gauges, e.g. of springs

14.

Method for counting events occurring during a duration T and associated mechanical event counters

      
Application Number 15510321
Grant Number 10401192
Status In Force
Filing Date 2015-09-10
First Publication Date 2017-09-14
Grant Date 2019-09-03
Owner
  • ETAT FRANCAIS REPRESENTE PAR LE DELEGUE GENERAL POUR L'ARMEMENT (France)
  • SILMACH (France)
Inventor
  • Louvigne, Pierre-Francois
  • Minotti, Patrice
  • Sadoulet, Vianney
  • Girardin, Pascal
  • Haye, Charles

Abstract

Disclosed is a method for counting events occurring during a period T carried out by a mechanical counter including two toothed wheels with the same pitch, the occurrence of an event causing the rotation of each wheel by an angle corresponding to the pitch of the teeth thereof, the method including: counting or calculating, for each wheel at the end of T, the difference in the number of teeth between the initial and final position thereof, the step being at least partially carried out either by an optical unit, requiring the presence on each wheel of at least one marker, or by a unit for measuring the angular displacement of each wheel and associated calculation unit; and calculating the number of occurred events N in accordance with the difference between the values counted or measured and in accordance with the number of teeth of the wheels.

IPC Classes  ?

  • G01D 5/04 - Mechanical means for transferring the output of a sensing memberMeans for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for convertingTransducers not specially adapted for a specific variable using mechanical means using leversMechanical means for transferring the output of a sensing memberMeans for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for convertingTransducers not specially adapted for a specific variable using mechanical means using camsMechanical means for transferring the output of a sensing memberMeans for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for convertingTransducers not specially adapted for a specific variable using mechanical means using gearing
  • G01D 5/245 - Mechanical means for transferring the output of a sensing memberMeans for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for convertingTransducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trainsMechanical means for transferring the output of a sensing memberMeans for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for convertingTransducers not specially adapted for a specific variable using electric or magnetic means generating pulses or pulse trains using a variable number of pulses in a train
  • G01D 5/26 - Mechanical means for transferring the output of a sensing memberMeans for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for convertingTransducers not specially adapted for a specific variable using optical means, i.e. using infrared, visible or ultraviolet light

15.

STRAIN SENSOR WITH MEASUREMENT DISCRIMINATION ACCORDING TO THE DEFORMATION DIRECTION

      
Document Number 03016264
Status Pending
Filing Date 2017-02-28
Open to Public Date 2017-09-08
Owner
  • ETAT FRANCAIS REPRESENTE PAR LE DELEGUE GENERAL POUR L'ARMEMENT (France)
  • SILMACH (France)
Inventor
  • Cote, Thierry
  • Sadoulet, Vianney
  • Minotti, Patrice
  • Walter, Vincent
  • Girardin, Pascal

Abstract

A passive strain sensor (C2) includes a system for detecting a variation in the distance between two points or regions of a structure, and a carrier (1) having first and second portions (1a, 1b) configured for attachment to said points or regions. Said system comprises a measuring assembly (13) carried by the first portion (1a) and actuatable only in one measurement direction to measure and store a measurement associated with at least one strain in a measurement direction, and an actuating device (12) comprising an intermediate assembly (15) with an actuating member (15c) of the measuring assembly (13), and an actuating assembly (14) having a push portion (14c) opposite the intermediate assembly (15) and configured such that the actuating member (15c) is moved relative to the measuring assembly (13) only when the second portion (1b) moves in the measurement direction.

IPC Classes  ?

  • G01B 5/14 - Measuring arrangements characterised by the use of mechanical techniques for measuring distance or clearance between spaced objects or spaced apertures
  • G01B 5/30 - Measuring arrangements characterised by the use of mechanical techniques for measuring the deformation in a solid, e.g. mechanical strain gauge

16.

STRAIN SENSOR WITH MEASUREMENT DISCRIMINATION ACCORDING TO THE DEFORMATION DIRECTION

      
Application Number FR2017000036
Publication Number 2017/149211
Status In Force
Filing Date 2017-02-28
Publication Date 2017-09-08
Owner
  • ETAT FRANÇAIS REPRESENTE PAR LE DELEGUE GENERAL POUR L'ARMEMENT (France)
  • SILMACH (France)
Inventor
  • Cote, Thierry
  • Sadoulet, Vianney
  • Minotti, Patrice
  • Xalter, Vincent
  • Girardin, Pascal

Abstract

A passive strain sensor (C2) includes a system for detecting a variation in the distance between two points or regions of a structure, and a carrier (1) having first and second portions (1a, 1b) configured for attachment to said points or regions. Said system comprises a measuring assembly (13) carried by the first portion (1a) and actuatable only in one measurement direction to measure and store a measurement associated with at least one strain in a measurement direction, and an actuating device (12) comprising an intermediate assembly (15) with an actuating member (15c) of the measuring assembly (13), and an actuating assembly (14) having a push portion (14c) opposite the intermediate assembly (15) and configured such that the actuating member (15c) is moved relative to the measuring assembly (13) only when the second portion (1b) moves in the measurement direction.

IPC Classes  ?

  • G01B 5/14 - Measuring arrangements characterised by the use of mechanical techniques for measuring distance or clearance between spaced objects or spaced apertures
  • G01B 5/30 - Measuring arrangements characterised by the use of mechanical techniques for measuring the deformation in a solid, e.g. mechanical strain gauge

17.

Amplified passive and reversible micro-sensor of deformations

      
Application Number 14901872
Grant Number 09939246
Status In Force
Filing Date 2014-07-01
First Publication Date 2016-12-22
Grant Date 2018-04-10
Owner
  • ETAT FRANCAIS REPRESENTE PAR LE DELEGUE GENERAL POUR L'ARMEMENT (France)
  • SILMACH (France)
Inventor
  • Louvigne, Pierre-Francois
  • Minotti, Patrice
  • Vescovo, Paul
  • Sadoulet, Vianney

Abstract

The disclosed micro-sensor includes: a substrate including a first portion and a second portion; a third portion and fourth portion provided between the portions and connected to the first portion and the second portion respectively by an elastic member; detection and a counter including: a counting gear, a third beam capable of meshing with the gear, an amplifier for the value of a relative movement between the portions and including: a first beam attached at one end thereof to the third portion and at the other end thereof to a plate, a second beam attached at one end thereof to the fourth portion and at the other end thereof to the plate, the third beam being attached on one side to the plate and including a tooth capable of meshing with the gear.

IPC Classes  ?

  • G01B 5/00 - Measuring arrangements characterised by the use of mechanical techniques
  • G01D 5/00 - Mechanical means for transferring the output of a sensing memberMeans for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for convertingTransducers not specially adapted for a specific variable
  • G01B 5/30 - Measuring arrangements characterised by the use of mechanical techniques for measuring the deformation in a solid, e.g. mechanical strain gauge
  • G01D 5/04 - Mechanical means for transferring the output of a sensing memberMeans for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for convertingTransducers not specially adapted for a specific variable using mechanical means using leversMechanical means for transferring the output of a sensing memberMeans for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for convertingTransducers not specially adapted for a specific variable using mechanical means using camsMechanical means for transferring the output of a sensing memberMeans for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for convertingTransducers not specially adapted for a specific variable using mechanical means using gearing

18.

METHOD FOR COUNTING EVENTS OCCURRING DURING A PERIOD T AND ASSOCIATED MECHANICAL EVENT COUNTERS

      
Document Number 02955761
Status In Force
Filing Date 2015-09-10
Open to Public Date 2016-03-17
Grant Date 2020-07-14
Owner
  • ETAT FRANCAIS REPRESENTE PAR LE DELEGUE GENERAL POUR L'ARMEMENT (France)
  • SILMACH (France)
Inventor
  • Louvigne, Pierre-Francois
  • Minotti, Patrice
  • Sadoulet, Vianney
  • Girardin, Pascal
  • Haye, Charles

Abstract

The invention relates to a method for counting events occurring during a period T carried out by a mechanical counter comprising two toothed wheels with the same pitch, the occurrence of an event causing the rotation of each wheel by an angle corresponding to the pitch of the teeth thereof, said method comprising: a first step of counting or calculating, for each wheel at the end of T, the difference in the number of teeth between the initial and final position thereof, said step being at least partially carried out either by optical means, requiring the presence on each wheel of at least one marker, or by means for measuring the angular displacement of each wheel and associated calculation means; and a second step of calculating the number of occurred events N in accordance with the difference between the values counted or measured and in accordance with the number of teeth of the wheels.

IPC Classes  ?

  • G06M 1/06 - Design features of general application for driving the stage of lowest order producing continuous revolution of the stage, e.g. with gear train

19.

METHOD FOR COUNTING EVENTS OCCURRING DURING A PERIOD T AND ASSOCIATED MECHANICAL EVENT COUNTERS

      
Application Number FR2015000181
Publication Number 2016/038256
Status In Force
Filing Date 2015-09-10
Publication Date 2016-03-17
Owner
  • ETAT FRANCAIS REPRESENTE PAR LE DELEGUE GENERAL POUR L'ARMEMENT (France)
  • SILMACH (France)
Inventor
  • Louvigné, Pierre-François
  • Minotti, Patrice
  • Sadoulet, Vianney
  • Girardin, Pascal
  • Haye, Charles

Abstract

The invention relates to a method for counting events occurring during a period T carried out by a mechanical counter comprising two toothed wheels with the same pitch, the occurrence of an event causing the rotation of each wheel by an angle corresponding to the pitch of the teeth thereof, said method comprising: a first step of counting or calculating, for each wheel at the end of T, the difference in the number of teeth between the initial and final position thereof, said step being at least partially carried out either by optical means, requiring the presence on each wheel of at least one marker, or by means for measuring the angular displacement of each wheel and associated calculation means; and a second step of calculating the number of occurred events N in accordance with the difference between the values counted or measured and in accordance with the number of teeth of the wheels.

IPC Classes  ?

  • G01D 5/04 - Mechanical means for transferring the output of a sensing memberMeans for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for convertingTransducers not specially adapted for a specific variable using mechanical means using leversMechanical means for transferring the output of a sensing memberMeans for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for convertingTransducers not specially adapted for a specific variable using mechanical means using camsMechanical means for transferring the output of a sensing memberMeans for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for convertingTransducers not specially adapted for a specific variable using mechanical means using gearing
  • G01B 5/30 - Measuring arrangements characterised by the use of mechanical techniques for measuring the deformation in a solid, e.g. mechanical strain gauge
  • G01D 5/245 - Mechanical means for transferring the output of a sensing memberMeans for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for convertingTransducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trainsMechanical means for transferring the output of a sensing memberMeans for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for convertingTransducers not specially adapted for a specific variable using electric or magnetic means generating pulses or pulse trains using a variable number of pulses in a train
  • G01P 15/03 - Measuring accelerationMeasuring decelerationMeasuring shock, i.e. sudden change of acceleration by making use of inertia forces by using non-electrical means

20.

Passive indexing of a movable element having teeth

      
Application Number 14371726
Grant Number 09882510
Status In Force
Filing Date 2013-01-11
First Publication Date 2015-01-22
Grant Date 2018-01-30
Owner SILMACH (France)
Inventor
  • Minotti, Patrice
  • Bourbon, Gilles
  • Le Moal, Patrice

Abstract

i+4) of the movable element (1), and which is connected to the actuator element (3) in order to move the driving element (2) and the first indexing finger (41) simultaneously.

IPC Classes  ?

  • H02N 1/00 - Electrostatic generators or motors using a solid moving electrostatic charge carrier
  • H02N 2/00 - Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
  • G06M 1/04 - Design features of general application for driving the stage of lowest order
  • F16H 31/00 - Other gearings with freewheeling members or other intermittently-driving members
  • G04C 3/00 - Electromechanical clocks or watches independent of other time-pieces and in which the movement is maintained by electric means

21.

AMPLIFIED PASSIVE AND REVERSIBLE MICRO-SENSOR OF DEFORMATIONS

      
Document Number 02914672
Status In Force
Filing Date 2014-07-01
Open to Public Date 2015-01-08
Grant Date 2021-02-02
Owner
  • SILMACH (France)
  • ETAT FRANCAIS REPRESENTE PAR LE DELEGUE GENERAL POUR L'ARMEMENT (France)
Inventor
  • Louvigne, Pierre-Francois
  • Minotti, Patrice
  • Vescovo, Paul
  • Sadoulet, Vianney

Abstract

The invention relates to a micro-sensor comprising: a substrate comprising a first portion and a second portion; a third portion and fourth portion provided between said portions and connected to the first portion and the second portion respectively by an elastic member; detection and counting means comprising: a counting gear, a third beam capable of meshing with the gear, means for amplifying the value of a relative movement between said portions and comprising: a first beam attached at one end thereof to the third portion and at the other end thereof to a plate, a second beam attached at one end thereof to the fourth portion and at the other end thereof to said plate, the third beam being attached on one side to the plate and comprising a tooth capable of meshing with said gear.

IPC Classes  ?

  • G01D 1/04 - Measuring arrangements giving results other than momentary value of variable, of general application giving integrated values
  • G01B 5/30 - Measuring arrangements characterised by the use of mechanical techniques for measuring the deformation in a solid, e.g. mechanical strain gauge
  • G01D 5/04 - Mechanical means for transferring the output of a sensing memberMeans for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for convertingTransducers not specially adapted for a specific variable using mechanical means using leversMechanical means for transferring the output of a sensing memberMeans for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for convertingTransducers not specially adapted for a specific variable using mechanical means using camsMechanical means for transferring the output of a sensing memberMeans for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for convertingTransducers not specially adapted for a specific variable using mechanical means using gearing
  • G06M 1/04 - Design features of general application for driving the stage of lowest order
  • G06M 3/00 - Counters with additional facilities
  • G08G 1/065 - Traffic control systems for road vehicles by counting the vehicles in a section of the road or in a parking area, i.e. comparing incoming count with outgoing count

22.

AMPLIFIED PASSIVE AND REVERSIBLE MICRO-SENSOR OF DEFORMATIONS

      
Application Number FR2014000157
Publication Number 2015/001204
Status In Force
Filing Date 2014-07-01
Publication Date 2015-01-08
Owner
  • ÉTAT FRANÇAIS représenté par LE DÉLÉGUÉ GÉNÉRAL POUR, L'ARMEMENT (France)
  • SILMACH (France)
Inventor
  • Louvigné, Pierre-François
  • Minotti, Patrice
  • Vescovo, Paul
  • Sadoulet, Vianney

Abstract

The invention relates to a micro-sensor comprising: a substrate comprising a first portion and a second portion; a third portion and fourth portion provided between said portions and connected to the first portion and the second portion respectively by an elastic member; detection and counting means comprising: a counting gear, a third beam capable of meshing with the gear, means for amplifying the value of a relative movement between said portions and comprising: a first beam attached at one end thereof to the third portion and at the other end thereof to a plate, a second beam attached at one end thereof to the fourth portion and at the other end thereof to said plate, the third beam being attached on one side to the plate and comprising a tooth capable of meshing with said gear.

IPC Classes  ?

  • G01D 1/04 - Measuring arrangements giving results other than momentary value of variable, of general application giving integrated values
  • G01D 5/04 - Mechanical means for transferring the output of a sensing memberMeans for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for convertingTransducers not specially adapted for a specific variable using mechanical means using leversMechanical means for transferring the output of a sensing memberMeans for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for convertingTransducers not specially adapted for a specific variable using mechanical means using camsMechanical means for transferring the output of a sensing memberMeans for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for convertingTransducers not specially adapted for a specific variable using mechanical means using gearing
  • G01B 5/30 - Measuring arrangements characterised by the use of mechanical techniques for measuring the deformation in a solid, e.g. mechanical strain gauge
  • G06M 1/04 - Design features of general application for driving the stage of lowest order
  • G08G 1/065 - Traffic control systems for road vehicles by counting the vehicles in a section of the road or in a parking area, i.e. comparing incoming count with outgoing count
  • G06M 3/00 - Counters with additional facilities

23.

Actuation device with a drive element actuated by crawling

      
Application Number 14091223
Grant Number 09712085
Status In Force
Filing Date 2013-11-26
First Publication Date 2014-10-02
Grant Date 2017-07-18
Owner
  • SILMACH (France)
  • CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS) (France)
  • UNIVERSITE DE FRANCHE-COMTE (France)
Inventor
  • Le Moal, Patrice
  • Bourbon, Gilles
  • Minotti, Patrice
  • Vescovo, Paul

Abstract

An actuation device (1) which includes an actuation element (3) with a fixed 10 portion (31) and a driving portion (32); wherein the fixed portion (31) includes a crawling surface (311). The driving portion (32) includes a flexible moveable blade (321) positioned in parallel and at a distance from the crawling surface (311). When a power supply voltage is applied between the moveable blade (321) and the crawling surface (311), the free end (3211) comes into contact with the crawling surface (311), and a contact area, between the moveable blade (321) and the crawling surface (311), increases by propagation of the crawling front (3213) along the moveable blade (321). The propagation of the crawling front displaces the moveable blade (321) according to a first orientation.

IPC Classes  ?

  • H02N 1/00 - Electrostatic generators or motors using a solid moving electrostatic charge carrier

24.

Passive, reversible deformation sensor

      
Application Number 14113306
Grant Number 09140584
Status In Force
Filing Date 2012-04-20
First Publication Date 2014-03-06
Grant Date 2015-09-22
Owner
  • ETAT FRANCAIS REPRESENTE PAR LE DELEGUE GENERAL POUR L'ARMEMENT (France)
  • SILMACH (France)
Inventor
  • Louvigne, Pierre-Francois
  • Minotti, Patrice
  • Vescovo, Paul
  • Walter, Vincent

Abstract

3) for distinguishing between at least two different thresholds of cycles of variations in distance.

IPC Classes  ?

  • G01D 1/00 - Measuring arrangements giving results other than momentary value of variable, of general application
  • G01D 9/00 - Recording measured values
  • G01B 5/30 - Measuring arrangements characterised by the use of mechanical techniques for measuring the deformation in a solid, e.g. mechanical strain gauge
  • G01K 7/01 - Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat using semiconducting elements having PN junctions
  • G01Q 80/00 - Applications, other than SPM, of scanning-probe techniques

25.

PASSIVE INDEXING OF A MOVABLE ELEMENT HAVING TEETH

      
Application Number EP2013050442
Publication Number 2013/104738
Status In Force
Filing Date 2013-01-11
Publication Date 2013-07-18
Owner SILMACH (France)
Inventor
  • Minotti, Patrice
  • Bourbon, Gilles
  • Le Moal, Patrice

Abstract

The invention relates to a device including: a movable element (1) comprising teeth (11; 11i, i, 11i+1, 11i+2,11i+3, 11i+4); a driving element (2) for engaging with the teeth (11; 11i, 11i+1, 11i+2,11i+3, 11i+4) of the movable element (1) so as to set the movable element (1) in motion in a direction of movement; an actuator element (3) capable of generating an alternating movement so as to move the driving element (2) according to at least two phases, i.e. a driving phase, during which the driving element (2) is engaged with a tooth (11; 11i, 11i+1, 11i+2,11i+3, 11i+4) of the movable element (1), and a return phase without driving, during which the driving element (2) is shifted with respect to the movable element (1); and a first indexing element (4), which includes a first indexing finger (41) to be positioned between two teeth (11; 11i, 11i+1, 11i+2,11i+3, 11i+4) of the movable element (1), and which is connected to the actuator element (3) in order to move the driving element (2) and the first indexing finger (41) simultaneously.

IPC Classes  ?

  • G01M 1/04 - Adaptation of bearing support assemblies for receiving the body to be tested
  • G04C 3/00 - Electromechanical clocks or watches independent of other time-pieces and in which the movement is maintained by electric means
  • H02N 1/00 - Electrostatic generators or motors using a solid moving electrostatic charge carrier
  • F16H 31/00 - Other gearings with freewheeling members or other intermittently-driving members

26.

PASSIVE, REVERSIBLE DEFORMATION SENSOR

      
Document Number 02833458
Status In Force
Filing Date 2012-04-20
Open to Public Date 2012-10-26
Grant Date 2019-04-16
Owner
  • ETAT FRANCAIS REPRESENTE PAR LE DELEGUE GENERAL POUR L'ARMEMENT (France)
  • SILMACH (France)
Inventor
  • Louvigne, Pierre-Francois
  • Minotti, Patrice
  • Vescovo, Paul
  • Walter, Vincent

Abstract

The present invention relates to the field of microsensors, and specifically to a passive, reversible deformation sensor, particularly a sensor for detecting deformation cycles in a direction OX of a structure, specifically during cycles of temperature or mechanical stresses to which said structure is subjected, said sensor comprising a means (4, 5, 6) for detecting and, preferably, counting cycles of variations in the distance between two points or areas of a structure, said means comprising a substrate having first and second portions (41, 44) capable of being attached to said two points or areas of the structure, respectively, the detection means being combined with each of said first and second portions of the substrate, characterized in that the detection means comprises means (541, 542, 543, 551, 552, 553, 561, 562, 563) for distinguishing between at least two different thresholds of cycles of variations in distance.

IPC Classes  ?

  • G01B 3/30 - Bars, blocks, or strips in which the distance between a pair of faces is fixed, although it may be preadjustable, e.g. end measure, feeler strip
  • G01B 7/16 - Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge

27.

PASSIVE, REVERSIBLE DEFORMATION SENSOR

      
Application Number FR2012000155
Publication Number 2012/143627
Status In Force
Filing Date 2012-04-20
Publication Date 2012-10-26
Owner
  • ÉTAT FRANÇAIS REPRÉSENTÉ PAR LE DÉLÉGUÉ GÉNÉRAL POUR L'ARMEMENT (France)
  • SILMACH (France)
Inventor
  • Louvigné, Pierre-François
  • Minottl, Patrice
  • Vescovo, Paul
  • Walter, Vincent

Abstract

The present invention relates to the field of microsensors, and specifically to a passive, reversible deformation sensor, particularly a sensor for detecting deformation cycles in a direction OX of a structure, specifically during cycles of temperature or mechanical stresses to which said structure is subjected, said sensor comprising a means (4, 5, 6) for detecting and, preferably, counting cycles of variations in the distance between two points or areas of a structure, said means comprising a substrate having first and second portions (41, 44) capable of being attached to said two points or areas of the structure, respectively, the detection means being combined with each of said first and second portions of the substrate, characterized in that the detection means comprises means (541, 542, 543, 551, 552, 553, 561, 562, 563) for distinguishing between at least two different thresholds of cycles of variations in distance.

IPC Classes  ?

  • G01B 3/30 - Bars, blocks, or strips in which the distance between a pair of faces is fixed, although it may be preadjustable, e.g. end measure, feeler strip
  • G01B 7/16 - Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge

28.

Method and device for moving an element to be driven using an actuating element formed by etching in a semiconductor material

      
Application Number 11886504
Grant Number 08058772
Status In Force
Filing Date 2006-03-16
First Publication Date 2009-04-16
Grant Date 2011-11-15
Owner Silmach (France)
Inventor
  • Minotti, Patrice
  • Bourbon, Gilles
  • Le Moal, Patrice
  • Joseph, Eric

Abstract

The invention concerns an element to be driven, a driving element designed to be urged into engagement with the element to be driven and an actuating element adapted to move the driving element so that it drives the element to be driven in step-by-step displacement, the driving element and the actuating element being formed by etching in a semiconductor material wafer. The invention is characterized in that it comprises elastic prestressing means for maintaining the driving element in contact with the element to be driven.

IPC Classes  ?

29.

Drive device, particularly for a clockwork mechanism

      
Application Number 11662017
Grant Number 07636277
Status In Force
Filing Date 2005-09-01
First Publication Date 2008-12-25
Grant Date 2009-12-22
Owner Silmach (France)
Inventor
  • Minotti, Patrice
  • Bourbon, Gilles
  • Le Moal, Patrice
  • Joseph, Eric

Abstract

A drive device formed by etching a wafer. The drive device includes a drive element that can sequentially mesh with a driven element and an actuating element that can displace the drive element according to a hysteresis movement thereby driving the driven element. Placement of the drive element on an outer edge of the wafer enables an interfacing of the drive element with a driven element placed opposite therefrom. A clockwork mechanism including a drive device of the aforementioned type and an input gear that can be rotationally driven by the drive device is also provided.

IPC Classes  ?

  • G04F 5/00 - Apparatus for producing preselected time intervals for use as timing standards
  • G04B 19/02 - Back-gearing arrangements between gear train and hands
  • H02N 1/00 - Electrostatic generators or motors using a solid moving electrostatic charge carrier

30.

Method and device for moving an element to be driven using an actuating element formed by etching in a semiconductor material

      
Application Number 11886512
Grant Number 07768161
Status In Force
Filing Date 2006-03-15
First Publication Date 2008-06-26
Grant Date 2010-08-03
Owner Silmach (France)
Inventor
  • Le Moal, Patrice
  • Bourbon, Gilles
  • Minotti, Patrice
  • Joseph, Eric

Abstract

A device comprising an element to be driven and a driving element designed to be urged into engagement with the element to be driven and an actuating element adapted to generate a reciprocating movement to move the driving element, the driving element and the actuating element being formed by etching in a semiconductor material block, are provided. During a first alternation (a) of the movement generated by the actuating element, the driving element is urged into engagement with the element to be driven to pull the element to be driven. During a second alternation (b) in the opposite direction generated by the actuating element, the driving element slides on the element to be driven, such that the element to be driven is displaced in a step-by-step movement by the driving element.

IPC Classes  ?

  • H02K 7/07 - Means for converting reciprocating motion into rotary motion or vice versa using pawls and ratchet wheels
  • H02N 1/00 - Electrostatic generators or motors using a solid moving electrostatic charge carrier

31.

METHOD AND DEVICE FOR MOVING AN ELEMENT TO BE DRIVEN USING AN ACTUATING ELEMENT FORMED BY ETCHING IN A SEMICONDUCTOR MATERIAL

      
Application Number EP2006060758
Publication Number 2006/097491
Status In Force
Filing Date 2006-03-15
Publication Date 2006-09-21
Owner SILMACH (France)
Inventor
  • Le Moal, Patrice
  • Bourbon, Gilles
  • Minotti, Patrice
  • Joseph, Eric

Abstract

The invention concerns a device comprising an element to be driven (10) and a driving element (250) designed to be urged into engagement with the element to be driven (10) and an actuating element (202) adapted to generate a reciprocating movement to move the driving element (250), the driving element (250) and the actuating element (202) being formed by etching in a semiconductor material block. The invention is characterized in that it is arranged such that: during a first alternation (a) of the movement generated by the actuating element (202), the driving element (250) is urged into engagement with the element to be driven (10) to pull the element to be driven (10), during a second alternation (b) in the opposite direction generated by the actuating element (202), the driving element (250) slides on the element to be driven (10), such that the element to be driven (10) is displaced in a step-by-step movement by the driving element (250).

IPC Classes  ?

  • H02N 1/00 - Electrostatic generators or motors using a solid moving electrostatic charge carrier

32.

METHOD AND DEVICE FOR MOVING AN ELEMENT TO BE DRIVEN USING AN ACTUATING ELEMENT FORMED BY ETCHING IN A SEMICONDUCTOR MATERIAL

      
Application Number EP2006060806
Publication Number 2006/097516
Status In Force
Filing Date 2006-03-16
Publication Date 2006-09-21
Owner SILMACH (France)
Inventor
  • Minotti, Patrice
  • Bourbon, Gilles
  • Le Moal, Patrice
  • Joseph, Eric

Abstract

The invention concerns an element to be driven (10), a driving element (250) designed to be urged into engagement with the element to be driven (10) and an actuating element (200) adapted to move the driving element (250) so that it drives the element to be driven (10) in step-by-step displacement, the driving element (250) and the actuating element (200) being formed by etching in a semiconductor material wafer (21). The invention is characterized in that it comprises elastic prestressing means (212) for maintaining the driving element (250) in contact with the element to be driven (10).

IPC Classes  ?

  • H02N 1/00 - Electrostatic generators or motors using a solid moving electrostatic charge carrier