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2024
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Invention
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Micromechanical temperature detection device. The invention relates to a micromechanical temperat... |
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Invention
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Micromechanical impact detection device. The invention relates to a micromechanical impact detect... |
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2022
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Invention
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Method for joining a first part to a second part made of silicon. The invention relates to a meth... |
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Invention
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Method for controlling a microelectromechanical system.
The invention relates to a method for co... |
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Invention
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Electromechanical microsystem for moving a mechanical part in two opposite directions.
The inven... |
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Invention
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Microelectromechanical system for moving a mechanical part in two opposite directions.
The inven... |
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Invention
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Method for controlling a microelectromechanical system. The invention relates to a method for con... |
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Invention
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Microelectromechanical system for moving a mechanical part in two opposite directions. The invent... |
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Invention
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Electromechanical microsystem for moving a mechanical part in two opposite directions. The invent... |
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2020
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Invention
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Mems sensor for sensing deformation by breaking contact between two electrodes. The present inven... |
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2017
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Invention
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Strain sensor with measurement discrimination according to the deformation direction. A deformati... |
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Invention
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Strain sensor with measurement discrimination according to the deformation direction. A passive s... |
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2015
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Invention
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Method for counting events occurring during a duration t and associated mechanical event counters... |
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Invention
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Method for counting events occurring during a period t and associated mechanical event counters. ... |
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2014
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Invention
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Amplified passive and reversible micro-sensor of deformations. The disclosed micro-sensor include... |
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Invention
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Amplified passive and reversible micro-sensor of deformations. The invention relates to a micro-s... |
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2013
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Invention
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Actuation device with a drive element actuated by crawling. An actuation device (1) which include... |
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Invention
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Passive indexing of a movable element having teeth. i+4) of the movable element (1), and which is... |
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Invention
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Passive indexing of a movable element having teeth. The invention relates to a device including: ... |
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2012
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Invention
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Passive, reversible deformation sensor. 3) for distinguishing between at least two different thre... |
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Invention
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Passive, reversible deformation sensor. The present invention relates to the field of microsensor... |
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2006
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Invention
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Method and device for moving an element to be driven using an actuating element formed by etching... |
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2005
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Invention
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Drive device, particularly for a clockwork mechanism. A drive device formed by etching a wafer. T... |
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Invention
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Drive device, particularly for a clockwork mechanism. The invention relates to a drive device (10... |
