A wafer polishing apparatus includes a base support; a polishing pad on the base support; a polishing head on an upper portion of the base support and configured to rotate; a polishing head support on the upper portion of the base support and connected to the polishing head, a retainer ring attached to a lower portion of the polishing head; an illumination device configured to provide light to at least a part of an inner surface of the retainer ring; and a camera device configured to capture an image of at least a part of the inner surface of the retainer ring while the polishing head rotates. The polishing head support may be configured to rotate on the base support such that the polishing head is on at least one of a treatment region or a maintenance region of the base support.
A utility box which includes a concave-shaped box having a box opening on a top end of the box and a cover plate installed on the box to cover the box opening. The box has a box body, a box shoulder, and a box opening formed on the top end of the box. A pair of lower horizontal guide surfaces are disposed parallel to each other. The box shoulder has a shoulder body and a pair of upper horizontal guide surfaces. A cover plate is formed to have a cover plate wide width portion and is installed in such a manner that the cover plate wide width portion is supported on the lower horizontal guide surfaces. A cover plate opening/closing support controls the cover plate. The box body has improved inner space utilization and a region of its cover plate has a simple structure.
A heater for a pipe, includes a heater body part having a longitudinal cutting line formed in the entire thickness section to form a pair of longitudinal cutting planes in the entire length section, a heating wire installed in the heater body part, and a restraint operating part installed at the heater body part and restraining the pair of longitudinal cutting planes not to be spaced apart from each other. Each of the longitudinal cutting planes includes: a longitudinal outer cutting area disposed in a thickness direction from an outer surface of the heater body part, a longitudinal intermediate cutting area extending from the longitudinal outer cutting area in a circumferential direction of the heater body part, and a longitudinal inner cutting area extending from the longitudinal intermediate cutting area to reach the inner surface of the heater body part in the thickness direction of the heater body part.
Disclosed herein is an identifier based communication system including: a common communication path; a center station having a center station communication module and a center station controller connected to the center station communication module and connected to the common communication path through the center station communication module; and a plurality of distribution stations each including a distribution station communication module connected to the common communication path, a distribution station controller connected to the distribution station communication module, and a distribution station memory connected to the distribution station controller and storing a determined identifier value of the distribution station, wherein the center station controller transmits an identifier setting mode command including a center transmission preliminary identifier value to the distribution stations following an identifier setting request input from the outside; each of the distribution stations includes a distribution station display displaying information on the identifier value and an identifier selection key operated to select the preliminary identifier value displayed on the distribution station display as the determined identifier value of the distribution station; and wherein in a state where either a next preliminary identifier value of the setting mode or the center transmission preliminary identifier value is displayed on a corresponding distribution station display of each distribution, when a corresponding identifier selection key of each distribution station is operated to be on, the distribution station controller stores the preliminary identifier value displayed on the corresponding distribution station display in a corresponding distribution station memory of the distribution station as a determined identifier value of the setting mode of the distribution station, the distribution station controller displays the corresponding determined identifier of the setting mode on the corresponding distribution station display in a form different from the preliminary identifier value of the setting mode, the distribution station controller stores the corresponding determined identifier of the setting mode in the corresponding distribution station memory, and then transmits to other distribution station, a next preliminary identifier value of the setting mode, which is a value increased by the number N (positive integer) from the corresponding determined identifier value of the setting mode, the distribution station controller displays the center transmission preliminary identifier value received from the center station on the corresponding distribution station display after receiving the identifier setting mode command from the center station and until the distribution station controller receives the next preliminary identifier value of the setting mode from the other distribution station, and the distribution station controller sequentially displays the next preliminary identifier value of the setting mode received from the other distribution station on the corresponding distribution station display before the corresponding determined identifier of the setting mode is stored in the corresponding distribution station memory. In this manner, the identifier (ID) based communication system in the disclosure allows the user to easily select the determined identifier value of the distribution station as needed, has a simple configuration of the common communication path, and allows the user to easily visually confirm the determined identifier value of each distribution station.
G05B 19/41 - Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by interpolation, e.g. the computation of intermediate points between programmed end points to define the path to be followed and the rate of travel along that path
G05B 19/418 - Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
Disclosed is a chemical-mechanical wafer polishing device having an elastic membrane including a circular action plate portion, a membrane circumferential wall portion extending from a circumferential edge of the action plate portion along a direction perpendicular to a plate surface, and a chamber formed between the action plate portion and the membrane circumferential wall portion. The membrane includes a cooling channel portion having an action plate bottom surface section, and a supply penetration section penetrating the action plate portion such that one end is connected to the action plate bottom surface section and the other end is exposed to the upper side of the action plate portion. The chemical-mechanical wafer polishing device includes a cooling fluid supply portion having a cooling fluid supply tube connected to a free end of the supply penetration section, and providing a cooling fluid to the cooling channel portion.
Disclosed is a pipe heater comprising a tubular heat insulating layer having a pair of separating surfaces formed over the entire length thereof, an external cover bonded to the outer surface of the heat insulating layer to enclose the heat insulating layer, a heating layer provided inside the heat insulating layer and including a heating wire therein, and an internal cover provided inside the heating layer to enclose the heating layer, wherein the heat insulating layer includes a polyimide foam layer formed of polyimide foam, and a protection layer is interposed between the heat insulating layer and the heating wire to prevent bubbles distributed in the polyimide foam layer from dissipating due to heat transferred from the heating wire.
Provided are a carrier head and a carrier head unit for sucking and securely supporting a substrate during a chemical mechanical polishing process. The carrier head using sucking force to fix a substrate includes a head main body that includes a receiving space in a central portion thereof, the receiving space being opened downward to receive the substrate, a housing part in an edge thereof to surround a side portion of the receiving space, a main passage passing through the head main body to communicate with the receiving space, and a plurality of connecting holes vertically passing through the housing part to communicate with the main passage, a retaining ring coupled to a bottom surface of the housing part of the head main body to close lower portions of the connecting holes, and a cover coupled to a top surface of the head main body to close upper portions of the connecting holes.
patents