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2022
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Invention
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Wafer polishing apparatus and method of detecting defect of retainer ring included in the wafer p... |
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2020
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Invention
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Heater system for pipe. A heater system for a pipe for controlling a temperature of a heater inst... |
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Invention
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Apparatus for sensing wafer loading state using sound wave sensor.
Disclosed herein is an appara... |
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Invention
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Heater for pipe. A heater for a pipe, includes a heater body part having a longitudinal cutting l... |
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Invention
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Utility box. A utility box which includes a concave-shaped box having a box opening on a top end ... |
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2019
|
Invention
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Identifier (id) based communication system. Disclosed herein is an identifier based communication... |
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2016
|
Invention
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Chemical-mechanical wafer polishing device. Disclosed is a chemical-mechanical wafer polishing de... |
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2015
|
Invention
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Pipe heater. Disclosed is a pipe heater comprising a tubular heat insulating layer having a pair ... |
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2012
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Invention
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Carrier head and carrier head unit. Provided are a carrier head and a carrier head unit for sucki... |
