Aspects of the present disclosure relate to a pump control unit for controlling a pump. The pump has a pump drive motor, a pump type identifier, and a pump speed rating identifier. A pump type identification circuit is configured to communicate with the pump type identifier and to output a pump type identification signal for identifying the pump type. A pump speed rating identification circuit is configured to communicate with the pump speed rating identifier and to output a pump speed rating identification signal for identifying the pump speed rating. The pump control unit has a cross-check circuit for receiving the pump type identification signal and the pump speed rating identification signal. The cross-check circuit is configured to output a mismatch signal to inhibit operation of the pump in dependence on identification of a mismatch between the identified pump type and the identified pump speed rating.
A non-contacting scroll pump (100) comprising an orbiting scroll (130), a fixed scroll (120), a drive shaft (140) coupled to the orbiting scroll, wherein the drive shaft is movable relative to the fixed scroll in an axial direction. The non-contacting scroll pump further comprises an annular bearing (160b) extending around the drive shaft for supporting and facilitating rotation of the drive shaft, and a diaphragm (180) attached to the annular bearing to support the annular bearing, wherein the diaphragm is flexible in the axial direction to allow the annular bearing to move in the axial direction, thereby facilitating the movability of the drive shaft relative to the fixed scroll in the axial direction.
F04C 18/02 - Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
F04C 29/00 - Component parts, details, or accessories, of pumps or pumping installations specially adapted for elastic fluids, not provided for in groups
A liquid ring pump operating liquid additive comprising: a hygroscopic material; and a carrier liquid in which the hygroscopic material is dispersed, the carrier liquid being non-hydrating.
Vacuum feedthrough in particular to provide an electrical connection from ambient pressure into a vacuum chamber, comprising a first wall to be at least partially connected to or part of the vacuum chamber, a second wall, wherein the first wall and the second wall are connected by one or more sidewalls, wherein by the first wall, the second wall and the one or more sidewalls an internal volume is created, a first electrical feedthrough arranged in the first wall providing one or more electrical connection through the first wall in a vacuum tight manner, a second electrical feedthrough arranged in the second wall providing one or more electrical connection through the second wall in a vacuum tight manner, wherein one or more of the electrical connections of the first electrical feedthrough are connected with respective electrical connections of the second electrical feedthrough, wherein, in use, the internal volume is maintained at a pressure below ambient pressure.
This application relates to a mist-trap for a wet-scrubber abatement system. The mist trap comprises a demisting chamber having a gas inlet for receiving mist-laden exhaust gas from the wet-scrubber abatement system, a liquid capture surface on which the mist droplets may coalesce to form a liquid, and a gas outlet through which relatively dry gas may exit the chamber. The mist trap is configured such that at least a first portion of the captured liquid exits the chamber via the gas inlet to return to the wet-scrubber abatement system. The application also relates to a water-collecting baffle, an abatement system, and a method of moderating particulate build-up in a primary flow channel of an exhaust draw amplification device.
B01D 45/06 - Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by utilising inertia by reversal of direction of flow
B01D 45/08 - Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by utilising inertia by impingement against baffle separators
6.
METHOD FOR PREDICTING A REMAINING LIFETIME OF A VACUUM PUMP
Method for operating a vacuum pump, including acquiring vibration data of the vacuum pump during normal operation, training an anomaly detection model by the acquired vibration data of the vacuum pump during normal operation, and when the anomaly detection model determines a degrading operation of the vacuum pump, predicting by a lifetime prediction model an estimated remaining lifetime of the vacuum pump on the basis of vibration data acquired during degrading operation of the vacuum pump.
F04D 19/04 - Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
F04B 37/14 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups for special use to obtain high vacuum
F04B 51/00 - Testing machines, pumps, or pumping installations
F04D 27/00 - Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
The present invention provides a system for controlling gas flow into an abatement apparatus The system comprises at least one vacuum pump configured to evacuate process gases from a process tool, an interface controller, a flow measurement device arranged downstream of the at least one vacuum pump and configured to measure the flow rate of the process gas flow and send a flow rate signal to the interface controller, an abatement apparatus arranged downstream of the flow measurement device, and an auto-tuning gas injection block arranged upstream of the abatement apparatus and configured to inject one or more gases into the process gas flow. During use, the process tool is configured to send a signal to the interface controller indicating the process step that is occurring in the tool, and the interface controller is configured to send a process step signal to the auto-tuning gas injection block to control the injection of the one or more gases according to the process step occurring in the tool. The interface controller is configured to send a flow rate signal to the auto-tuning gas injection block to control the injection of the one or more gases according to the gas flow rate measured by the flow measurement device. The present invention also provides a method for controlling gas flow into an abatement apparatus.
F23G 7/06 - Methods or apparatus, e.g. incinerators, specially adapted for combustion of specific waste or low grade fuels, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
The present invention provides an abatement inlet gas injection system for automatically controlling injection of a gas flow into a process gas stream The system comprises a gas supply configured to provide a gas flow; an injection block connected to the gas supply, the injection block being configured to inject the gas flow into an inlet head of an abatement apparatus for mixture with a process gas stream; a flow measurement device configured to substantially continuously measure the gas flow rate upstream of the injection block and send a flow rate signal to a controller; wherein the controller is configured to receive the flow rate signal from the flow measurement device, and to provide a flow control signal to a flow control device in response to a change in the flow rate signal; wherein the flow control device is configured to change the gas flow rate entering the injection block in response to the flow control signal.
F23G 7/06 - Methods or apparatus, e.g. incinerators, specially adapted for combustion of specific waste or low grade fuels, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
F23N 1/02 - Regulating fuel supply conjointly with air supply
A heat exchanger is disclosed. The heat exchanger comprises a first set of first conduits for conveying a first fluid, first conduits having a triangular cross-section portion; and a second set of second conduits for conveying a second fluid, the second conduits having a triangular cross-section portion, wherein adjacent first conduits are interspaced by an intervening second conduit. In this way, the conduits may be located closely together with a space-efficient configuration which helps to improve the exchange of heat between the first and second fluids while also providing a compact arrangement which minimises the amount of material used to construct the heat exchanger.
F28D 7/16 - Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being arranged in parallel spaced relation
10.
WORK COIL FOR INDUCTION HEATED ABATEMENT APPARATUS
An induction heated abatement apparatus includes a work coil configured to inductively heat a porous susceptor defining an abatement chamber for treating an effluent stream, wherein said work coil is hollow to define a conduit coupled with a source of reaction reagents and wherein at least one surface of said work coil defines a plurality of apertures in fluid communication with said conduit for conveying said reaction reagents from said conduit to said surface of said work coil for supply to said porous susceptor. The work coil is protected from the effects of overheating whilst also reducing wasted heat because the heat obtained by the reaction reagents used as coolant gas is recycled and is used to facilitate abatement in the porous susceptor defining an abatement chamber.
F23G 7/06 - Methods or apparatus, e.g. incinerators, specially adapted for combustion of specific waste or low grade fuels, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
H05B 6/10 - Induction heating apparatus, other than furnaces, for specific applications
11.
A PUMP, A BEARING ASSEMBLY FOR A PUMP AND A METHOD OF ASSEMBLING THE BEARING ASSEMBLY
A bearing assembly, method of assembling a bearing assembly and a pump are disclosed. The bearing assembly is for mounting a rotatable shaft of a pump, and comprises an inner ring and an outer ring and a plurality of rollable elements mounted between said inner and outer rings. The bearing assembly has a lubricant directing element extending radially outwards from an outer circumference of the inner ring. The lubricant directing element may comprise a sloped radial surface, at least a portion of the sloped radial surface facing an annular gap between the inner and outer rings, a radially inner portion of the sloped surface being closer to the rollable elements than a radially outer portion of the sloped surface.
F16C 33/66 - Special parts or details in view of lubrication
F04D 19/04 - Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
F04D 29/063 - Lubrication specially adapted for elastic fluid pumps
F16C 19/16 - Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for both radial and axial load with a single row of balls
The present invention relates to a gaseous flow line section (1) for use in a thermally controlled gaseous flow line, comprising a first generally tubular wall portion (2) defining a gaseous flow conduit (3) configured to convey a gaseous flow, a second generally tubular wall portion (4) substantially surrounding the first generally tubular wall portion (2) to define therebetween a liquid conduit (5) configured to contain a thermally controlled liquid, and a third generally tubular wall portion (6) substantially surrounding the second generally tubular wall portion (4) to define therebetween a vacuum conduit (7) configured to be evacuated.
F16L 9/18 - Double-walled pipesMulti-channel pipes or pipe assemblies
B01D 53/34 - Chemical or biological purification of waste gases
C23C 16/44 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
F16L 53/32 - Heating of pipes or pipe systems using hot fluids
F16L 59/065 - Arrangements using an air layer or vacuum using vacuum
H01L 21/00 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid-state devices, or of parts thereof
F16L 39/00 - Joints or fittings for double-walled or multi-channel pipes or pipe assemblies
A non-contacting scroll pump, the non-contacting scroll pump comprising a housing, an orbiting scroll located within the housing, and a thrust bearing assembly located within the housing for axially supporting the orbiting scroll. The thrust bearing assembly comprises a first plate fixed to the orbiting scroll, a second plate spaced apart from the first plate, a ball bearing located between the first plate and the second plate, the ball bearing being configured to roll against the first and second plates during orbiting of the orbiting scroll, and a coupling structure extending axially between the housing and the second plate to couple the housing to the second plate, wherein the coupling structure is engaged with the second plate, and wherein the coupling structure comprises a spring arranged to push the coupling structure against the second plate.
F04C 18/02 - Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
F04C 29/00 - Component parts, details, or accessories, of pumps or pumping installations specially adapted for elastic fluids, not provided for in groups
A scroll pump (100, 200, 300, 400, 500) comprising an orbiting scroll (130, 230, 330, 430), a fixed scroll (120, 220, 320, 420), and a biasing mechanism (190, 290, 390, 490) arranged to provide a biasing force to axially bias the orbiting scroll and the fixed scroll together.
F04C 18/02 - Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
F04C 27/00 - Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
F04C 29/00 - Component parts, details, or accessories, of pumps or pumping installations specially adapted for elastic fluids, not provided for in groups
F01C 21/00 - Component parts, details, or accessories, not provided for in groups
F16C 25/08 - Ball or roller bearings self-adjusting
A vacuum pumping system and method for evacuating a vacuum system. The vacuum system may be a wafer transfer station and comprises a smaller load lock vacuum chamber (30) operable to cycle between a predetermined pressure that is below atmospheric pressure and atmospheric pressure, and a larger wafer transfer vacuum chamber (40) configured to be maintained at a pressure at or close to the predetermined pressure. The vacuum pumping system comprises: first and second vacuum pumps (10, 20); a valve system (V1, V2, V3, V4, V5) configured to selectively connect and isolate the first and second vacuum pumps with the smaller and larger vacuum chambers; and control circuitry (25). The control circuitry is configured in response to determining that a pressure within the smaller vacuum chambers (30) is to fall to the predetermined pressure within a first time period, to control the valve system (V1, V2, V3, V4, V5) such that the first and second pump (10, 20) are isolated from the larger vacuum chamber (40) and are in fluid communication with the smaller vacuum chamber (30) and both contribute to evacuating the chamber. When the smaller vacuum chamber (30) is at the predetermined pressure the valve system (V1, V2, V3, V4, V5) is controlled so that the second vacuum pump (20) is isolated from the smaller vacuum chamber (30) and pumps the larger vacuum chamber (40).
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04C 28/02 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
F04D 19/04 - Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
A vacuum pump system and method for evacuating a process chamber comprising is disclosed. The system has two vacuum pumps (20, 30) each having a required pumping performance and being arranged in parallel. There is a valve system comprising respective first and second valves (V1, V2) for controlling a rate of flow of fluid into the respective two vacuum pumps. There is also control circuitry (40) configured: to control the first and second valves (V1, V2) during a first period of operation, such that each of the valves is partially open and a cumulative pumping performance of the two vacuum pumps (20, 30) provides the required pumping performance. In response to determining that one of the two vacuum pumps is to be shut down, the control circuitry (40) closes one of the first and second valves and to fully opens the other of the first and second valves, such that the pumping performance of the pump with the open valve provides the required pumping performance.
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04B 37/14 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups for special use to obtain high vacuum
F04B 49/02 - Stopping, starting, unloading or idling control
F04C 28/02 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
F04C 28/06 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
F04D 15/00 - Control, e.g. regulation, of pumps, pumping installations, or systems
The present invention provides an abatement apparatus for treating an effluent gas stream from a manufacturing processing tool. The abatement apparatus comprises a treatment chamber at least partially defined by a first porous wall, and comprising an inlet configured to enable an effluent gas stream from the manufacturing processing tool to enter the treatment chamber; a second porous wall generally surrounding the first porous wall and defining therebetween a second chamber, the second chamber being porous to allow gas flow therethrough; one or more heating elements are arranged within the second chamber and are configured to heat the gas flowing therethrough during use; a third porous wall generally surrounding the second chamber and defining therebetween a third chamber, the third chamber containing a relatively thermally insulating material, said third chamber being porous to allow gas flow; and a gas inlet. Wherein, the apparatus is configured such that, in use, a gas flow is conveyed from the gas inlet through the third chamber and the second chamber to the treatment chamber where it reacts with the effluent gas stream.
B01D 53/00 - Separation of gases or vapoursRecovering vapours of volatile solvents from gasesChemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases or aerosols
B01D 53/46 - Removing components of defined structure
B01J 12/00 - Chemical processes in general for reacting gaseous media with gaseous mediaApparatus specially adapted therefor
F23J 15/00 - Arrangements of devices for treating smoke or fumes
B01D 53/34 - Chemical or biological purification of waste gases
F23G 7/06 - Methods or apparatus, e.g. incinerators, specially adapted for combustion of specific waste or low grade fuels, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
A vacuum pump, comprising a pump assembly (110), an inlet means (120) and an outlet means (130), and an enclosure (140) for containing the pump assembly (110), the enclosure (140) comprising a first-end part (141), a second-end part (142), and sleeve means (143) arranged between the first-end part (141) and the second-end part (142), wherein the sleeve means (143) comprises a bellows means (143a) for accommodating a thermal expansion of the vacuum pump (100).
The present disclosure relates to vacuum pump 10 comprising a substantially hermetically sealed enclosure 40, a core pump assembly located within the enclosure 40, and an inert purge gas inlet 70 fluidly connected to the enclosure 40 for supplying inert purge gas to an interior of the enclosure 40 surrounding the core pump assembly. By providing a sealed enclosure 40 around the core pump assembly and supplying inert purge gas thereto via the inlet 70, an inert positive pressure can be applied to the core pump assembly that reduces leakage of process gas from the core pump assembly such that seals therein can be removed or reduced. In particular, the need for elastomer seals that may be expensive and not be suited to high temperature or corrosive process gas conditions can be removed.
A turbomolecular pump bladed disc, comprising: a central hub configured to be rotated about an axis, the axis defining an axial direction; and one or more blades radially extending from the central hub; wherein each of the one or more blades has a cross-section that: tapers to a first point in a first direction, the first direction being parallel with the axial direction, tapers to a second point in a second direction, the second direction being parallel with the axial direction and opposite to the first direction; and is substantially a parallelogram in shape.
A scroll pump and thrust bearing assembly for providing axial support for a first scroll member with respect to a second scroll member within the scroll pump are disclosed. The thrust bearing assembly comprises: at least one ball bearing and a first and second ball bearing cage for accommodating and constraining movement of the at least one ball bearing. The first and second ball bearing cages each comprise at least one aperture, the at least one aperture of the first ball bearing cage overlaps with the at least one aperture of the second ball bearing cage. The at least one ball bearing is accommodated within the respective overlapping apertures of the ball bearing cages and at least one control aperture of the first ball bearing cage is configured to have a predetermined length in one dimension that is at least 2% greater than a predetermined length in a direction perpendicular to the one dimension, such that a clearance relative to a path traced by the ball bearing in the one dimension is greater than a clearance in the perpendicular direction.
The present invention relates to a rotor for a separator apparatus. The rotor having an axis of rotation and comprising an inlet operable to receive an effluent stream, an annular skirt defining a centrifugal separator operable to separate the effluent stream, the centrifugal separator having a gas outlet in first direction and a waste outlet in a second direction. A surface of the annular skirt is angled towards the axis of rotation of the rotor, such that during rotation of the rotor, non-gaseous matter in the effluent stream is biased towards the waste outlet by contact with said surface. The invention also relates to a separator apparatus comprising such a rotor, a method of treating an effluent stream, and a method of designing a rotor.
B01D 45/14 - Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by centrifugal forces generated by rotating vanes, discs, drums or brushes
A pumping system (100) comprising: a booster pump (104) comprising a booster pump inlet (114) and a booster pump outlet (116); and a primary pump (106) comprising a primary pump inlet (120) and a primary pump outlet (122); wherein the booster pump outlet (116) is fluidly coupled to the primary pump inlet (120); a maximum capacity of the booster pump (104) is less than or equal to 40m3/hr; and a maximum capacity of the primary pump (106) is less than or equal to 5m3/hr.
F04C 23/00 - Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluidsPumping installations specially adapted for elastic fluidsMulti-stage pumps specially adapted for elastic fluids
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
An interstage plate system comprising: a first plate portion comprising a first recess in a first mating surface of the first plate portion; and a second plate portion comprising a second recess in a second mating surface of the second plate portion; wherein the first plate portion and the second plate portion are configured to be coupled together so as to form an interstage plate for a vacuum pump and such that: the first mating surface and the second mating surface abut; and the first recess and the second recess are opposing, contiguous recesses which together form an aperture through the interstage plate.
F01C 21/10 - Outer members for co-operation with rotary pistonsCasings
F04C 18/08 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
F04C 18/12 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
F04C 18/16 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
F04C 23/00 - Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluidsPumping installations specially adapted for elastic fluidsMulti-stage pumps specially adapted for elastic fluids
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
25.
PUMP ASSEMBLY AND VACUUM PUMP WITH REDUCED SEAL REQUIREMENTS
A pump assembly (100) for a vacuum pump, comprising: an inlet side (110) and an outlet side (120) and a plurality of pump chambers (130) arranged therebetween; a first assembly component (140) defining a first sealing face (141) and a second assembly component (150) defining a second sealing face (151); wherein the first assembly component (140) and the second assembly component (150) are arranged to be joined together at the first and second sealing faces (141, 151) thereby providing a seal (160) for substantially sealing the plurality of pump chambers (130) from an exterior of the pump assembly (170); wherein the seal (160) comprises a labyrinth seal.
F01C 21/10 - Outer members for co-operation with rotary pistonsCasings
F04C 23/00 - Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluidsPumping installations specially adapted for elastic fluidsMulti-stage pumps specially adapted for elastic fluids
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04C 27/00 - Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
F04D 17/16 - Centrifugal pumps for displacing without appreciable compression
F04D 19/04 - Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
A claw booster pump (104) comprising: a pair of parallel shafts (202, 204) arranged to rotate in opposite directions to each other; a pair of rotors (206, 208) secured to the pair of shafts (202, 204), respectively, the pair of rotors (206, 208) including a first rotor (206) having a claw portion (220) projecting in a radial direction and a second rotor (208) having a recess (228) into which the claw portion (220) enters in use; a pump chamber (210) accommodating the pair of rotors (206, 208); an inlet (114) formed in the pump chamber (210) on one side of a plane (232) containing axes of the pair of shafts (202, 204); and an outlet (116) formed in the pump chamber (210) on another side of the plane (232); wherein a maximum capacity of the claw booster pump (104) is less than or equal to 40m3/hr.
F04C 18/12 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
F04C 23/00 - Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluidsPumping installations specially adapted for elastic fluidsMulti-stage pumps specially adapted for elastic fluids
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
A gas separator and method are disclosed. The gas separator is for separating a target gas component from a gas mixture and comprises: a first cryogenic stage configured in a solidifying phase to receive the gas mixture at a subatmospheric pressure, to solidify a first group of gas components of the gas mixture and to exhaust a second group of gas components of the gas mixture which includes the target gas component; and a second cryogenic stage configured to receive the second group of gas components at a subatmospheric pressure, to solidify the target gas component and to exhaust a third group of gas components of the gas mixture.
B01D 53/00 - Separation of gases or vapoursRecovering vapours of volatile solvents from gasesChemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases or aerosols
F25J 3/06 - Processes or apparatus for separating the constituents of gaseous mixtures involving the use of liquefaction or solidification by partial condensation
The present invention provides a vacuum pump (1) passive magnetic bearing, the vacuum pump (1) including a stator (2) and a rotor (4) configured to rotate about a rotational axis relative to the stator (2); the passive magnetic bearing comprising a rotor bearing half (12) including one or more substantially annular rotor-side magnets (14) and an opposing and substantially concentrically radially arranged stator bearing half (16) including one or more substantially annular stator-side magnets (18); a radial gap (g) extending between the rotor and stator bearing halves (14,16); wherein at least one, preferably each, rotor-side magnet (14) has an axial extent which is from around 3.5 times to around 5.3 times the width of the radial gap (g), and a radial extent which is less than 1.2 times the axial extent of the respective magnet; and/or, wherein at least one, preferably each, stator-side magnet (18) has an axial extent which is from around 3.5 times to around 5.3 times the width of the radial gap (g), and a radial extent which is less than 1.2 times the axial extent of the respective magnet.
A vacuum pump and a method of controlling such a pump to reduce power consumption of the pump during a standby mode. The method comprises: operating the pump by driving a pumping mechanism at a nominal speed; determining that the pump is to enter a standby mode in which an exhaust non- return valve is closed; boosting a speed of the pumping mechanism for a predetermined time to reduce an amount of gas within the pump; and reducing the speed of the pumping mechanism and operating the pump in the standby mode with the exhaust non-return valve being closed.
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04C 28/06 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
F04C 28/08 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
F04C 29/12 - Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
F04C 28/02 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
F04C 18/02 - Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
31.
A VACUUM PUMP AND A PERMANENT MAGNETIC BEARING ASSEMBLY FOR A VACUUM PUMP
The present invention provides a vacuum pump (1), preferably a turbomolecular pump, comprising a rotor shaft (9) configured to have one or more rotor blades (8) coupled thereto and the rotor shaft (9) defining a bearing well (7) containing, in an interference-fit configuration, a permanent magnetic bearing, wherein the magnetic bearing insert comprises one or more permanent magnet alloy rings (3,4,5) of a rotor bearing half of a permanent magnetic bearing and a radially outwardly extending sleeve (16) coupled thereto around an outer circumference of the or each said permanent magnet alloy ring (3,4,5), and an outer surface of the permanent magnetic bearing insert (3) engages with an inward facing wall of the bearing well (7) to provide an interference fit, wherein the radially outwardly extending sleeve (16) has a coefficient of thermal expansion that is at least substantially the same as the coefficient of thermal expansion of the material of the rotor shaft (9) defining the engaged bearing well wall.
A method of manufacturing a permanent magnetic bearing insert for a vacuum pump comprising a rotor shaft defining a cavity configured to receive the magnetic bearing insert in an interference-fit configuration, the method comprising the steps of: a) providing one or more permanent magnet alloy rings of a rotor bearing half of a permanent magnetic bearing; b) masking one or more surfaces of the or each permanent magnet alloy ring which are configured to substantially interface with another surface of the permanent magnetic bearing insert and/or the rotor shaft cavity when the permanent magnetic bearing insert is received by the rotor shaft cavity; and c) applying a coating to the or each permanent magnet alloy ring; wherein step b) substantially prevents those masked surfaces from being coated during step c); and wherein step b) and step c) are carried out substantially externally from a vacuum pump.
A vacuum pump (100) comprising: a stator (102) comprising: a first end wall (110) at a first end (111) of the stator (102); a second end wall (112) at a second end (113) of the stator (102), the second end (113) of the stator (102) being opposite 5 to the first end (111) of the stator (102); and one or more side walls (114) disposed between the first end wall (110) and the second end wall (112); wherein the first end wall (110), the second end wall (112), and the one or more side walls (114) define a pumping chamber (104); the first end wall (110) comprises a first opening (116) therethrough; and the vacuum pump (100) further comprises a first end 10 plate (120) removably disposed in the first opening (116).
F04C 18/08 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
Flange assembly (100) for a vacuum pump apparatus, comprising a first flange (110) comprising a first rim (111), the first rim (111) defining a first contact face; a second flange (120) comprising a second rim (121), the second rim (121) defining a second contact face; and means for clamping the first flange (110) to the second flange (120). The means for clamping comprises a first plurality of holes (131) arranged through the first rim (111), each hole in the first plurality of holes (131) being arranged to receive a shaft (132a) of a respective bolt (132); a second plurality of holes (133) arranged in the second contact face (121a) for receiving said shafts (132a) of said respective bolts (132); wherein the first plurality of holes (131) and the respective bolts (132) define a clearance gap (160) around the shafts (132a) of the respective bolts (132), such that first and second flange axes (A, B) can be offset from each other in angle or in a first linear direction perpendicular to the flange axes (A, B).
F16L 23/02 - Flanged joints the flanges being connected by members tensioned axially
F16L 23/036 - Flanged joints the flanges being connected by members tensioned axially characterised by the tensioning members, e.g. specially adapted bolts or C-clamps
F16L 27/053 - Universal joints, i.e. with mechanical connection allowing angular movement or adjustment of the axes of the parts in any direction with partly-spherical engaging surfaces held in place by bolts passing through flanges
F16L 23/032 - Flanged joints the flanges being connected by members tensioned axially characterised by the shape or composition of the flanges
An inlet assembly includes: a combustion chamber module defining a plenum configured to supply combustion reagents to its combustion chamber, the combustion chamber module having a mount configured to interface with a common head which defines at least one gallery configured to supply the combustion reagents, the mount comprising a plurality of feed apertures positioned for fluid communication of the combustion reagents between the gallery and the plenum. In this way, a mount which is suited to its combustion chamber module interfaces with a standard or common head, which enables the combustion reagents to be supplied from the gallery of the common head via the mount and to the plenum of the combustion chamber module. This enables a common head to be used for different combustion chamber modules, which reduces the number of parts required for the assembly and maintenance of the abatement apparatus.
F23G 7/06 - Methods or apparatus, e.g. incinerators, specially adapted for combustion of specific waste or low grade fuels, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
A valve module for a vacuum pumping system, comprising: a plurality of inlets for receiving a fluid; a plurality of pressure sensors, each configured to measure a fluid pressure associated with a respective inlet; a first fluid line manifold; a second fluid line manifold; a plurality of multifurcating conduits, each connecting a respective inlet to both the first and second fluid line manifolds; a plurality of valves disposed in the multifurcating conduits; and a valve controller coupled to the sensors and the valves; wherein the valve controller is configured to control, based on pressure measurements from the sensors, the valves such that a fluid flow through a multifurcating conduit is directed to either only the first fluid line manifold or only the second fluid line manifold.
F04B 49/22 - Control of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for in, or of interest apart from, groups by means of valves
F04B 37/14 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups for special use to obtain high vacuum
38.
CIRCUIT FOR DRIVING A MOTOR OF A VACUUM PUMP, VACUUM PUMP ASSEMBLY, AND METHOD
A circuit (210) for driving a motor of a vacuum pump (220). The circuit (210) 5 comprises a filter (212) configured to receive an alternating current 'AC' electrical input power. The filter (212) is configured to supply, a filtered AC electrical power. The circuit (210) comprises an active-front-end 'AFE' rectifier (213) configured to receive the filtered AC electrical power. The AFE rectifier (213) comprises a plurality of electrically connected switching devices. The 10 plurality of switching devices are controllable, by a plurality of switching signals, to convert the filtered AC electrical power to a direct current 'DC' electrical power. The circuit (210) comprises an inverter (215) configured to receive the DC electrical power. The inverter (215) is configured to convert the DC electrical power to an AC electrical output power for driving a motor of a vacuum pump 15 (220).
H02M 1/12 - Arrangements for reducing harmonics from AC input or output
H02M 5/458 - Conversion of AC power input into AC power output, e.g. for change of voltage, for change of frequency, for change of number of phases with intermediate conversion into DC by static converters using discharge tubes or semiconductor devices to convert the intermediate DC into AC using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only
37 - Construction and mining; installation and repair services
Goods & Services
Pumps; vacuum pumps; dry vacuum pumps, booster vacuum pumps,
roots vacuum pumps, screw vacuum pumps; vacuum pump
installations; machine parts and controls for the operation
of vacuum pumps; drives for vacuum pumps; motors for vacuum
pumps; bearings for vacuum pumps; mechanical seals for
vacuum pumps; filters for vacuum pumps; rotors and shafts
for vacuum pumps; stators for vacuum pumps; parts and
fittings of the aforementioned. Installation, cleaning, repair and maintenance of pumps;
installation, cleaning, repair and maintenance of vacuum
pumps; installation, cleaning, repair and maintenance of
vacuum pump installations; reconditioning of vacuum pumps
and parts thereof; advisory, consultancy and information
services for the aforementioned.
Aspects and embodiments relate to plasma torch device component monitoring, a plasma torch device component monitoring system and a plasma torch device including such a monitoring system or suitable for use with such a system. The monitoring method comprises: collecting electromagnetic radiation generated by a plasma torch in a plasma torch device; analysing the collected electromagnetic radiation generated by the plasma torch; comparing the analysed electromagnetic radiation generated to known electromagnetic radiation associated with one or more components of the plasma torch device; and triggering one or more actions in the event that the analysed emission differs from the known emission. Such a monitoring method can allow for ameliorative action to be taken in the event that degradation of one or more components forming the device is detected.
G01N 21/73 - Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited using plasma burners or torches
An inlet head assembly for an abatement apparatus is disclosed. The inlet head assembly is for an abatement apparatus for abating an effluent stream from a semiconductor processing tool, the inlet head assembly comprises: an inlet head; a pilot nozzle extending within the inlet head and configured to supply at least one pilot combustion reagent stream to a downstream abatement chamber of the abatement apparatus; and a plurality inlet nozzles, each extending within the inlet head and configured to supply an associated effluent stream for abatement within the abatement chamber, the plurality of inlet nozzles being positioned around the pilot nozzle. In this way, the effluent streams are packed closer together around the pilot nozzle which improves the heating of the effluent stream, improving the DRE and reducing heat loss, which enables a reduction in the combustion reagents needing to be supplied.
F23G 7/06 - Methods or apparatus, e.g. incinerators, specially adapted for combustion of specific waste or low grade fuels, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
F23D 14/22 - Non-premix gas burners, i.e. in which gaseous fuel is mixed with combustion air on arrival at the combustion zone with separate air and gas feed ducts, e.g. with ducts running parallel or crossing each other
An apparatus for conveying an effluent stream from a semiconductor processing tool for plasma treatment is disclosed. The apparatus comprises: a foreline conduit defining an inlet configured to receive the effluent stream; and a mixing lance positioned within the foreline conduit, the mixing lance defining a mixing conduit coupled with a first plasma reagent conduit configured to supply a first plasma reagent to the mixing lance and with a second plasma reagent conduit configured to supply a second plasma reagent to the mixing lance, the mixing conduit being configured to support mixing of the first plasma reagent and the second plasma reagent and defining a mixing lance outlet configured to deliver mixed first and second plasma reagent into the foreline conduit for mixing with the effluent stream.
B01D 53/00 - Separation of gases or vapoursRecovering vapours of volatile solvents from gasesChemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases or aerosols
The present disclosure relates to a vacuum gauge assembly 100 for measuring gas pressure in a vacuum system. The assembly comprises a pressure sensor element 130, an orientation sensor 160 that can determine an orientation of the pressure sensing element 130, and a microcontroller 155 configured to determine a gas pressure using data received from both the pressure sensing element 130 and the orientation sensor 160. The present disclosure also relates to an associated method of correcting a gas pressure output value in a vacuum gauge assembly 100.
G01L 21/12 - Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filamentsVacuum gauges of the Pirani type
37 - Construction and mining; installation and repair services
Goods & Services
Installation, cleaning, repair and maintenance of machinery;
installation of vacuum pump installations, equipment and
apparatus; maintenance of vacuum pump installations,
equipment and apparatus; repair of vacuum pump
installations, equipment and apparatus; cleaning of vacuum
pump installations, equipment and apparatus; advisory,
consultancy and information services relating to the
aforementioned.
A cryopump (10) includes a housing (12) having an inlet (16) to be connected to a vacuum chamber (18), a cold head (20) arranged in the housing (12) for generating a temperature for condensation of gases or vapors, a cold panel (30) connected to the cold head (20) and a non-evaporable getter (NEG) element (36) connected to the cold panel (30).
F04B 37/02 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups for evacuating by absorption or adsorption
F04B 37/04 - Selection of specific absorption or adsorption materials
F04B 37/08 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
An inlet assembly includes an inlet nozzle configured to deliver an effluent stream into a combustion chamber of an abatement apparatus; and a reagent nozzle configured to deliver a reagent into the combustion chamber of the abatement apparatus, the reagent nozzle being located concentrically with respect to the inlet nozzle, the reagent nozzle being configured to deliver the reagent in different quantities at different positions around its perimeter.
F23G 7/06 - Methods or apparatus, e.g. incinerators, specially adapted for combustion of specific waste or low grade fuels, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
A vacuum pump comprising: a stator (114), the stator comprising one or more stator walls (122,124,126) defining a pumping chamber (118); and a heat transfer device (130) coupled to the one or more stator walls (122,124,126), the heat transfer device (130) comprising: a thermally conductive body (126;500); and a conduit (132) through the thermally conductive body and through which, in use, a purge gas is passed whereby to heat the purge gas.
A vacuum pump stator (114) comprising: one or more walls (122, 124, 126) defining a pumping chamber (118); and a heat exchanger (130) comprising a conduit (132) through at least one of the one or more walls (122, 124, 126) which, in use, a purge gas is passed through whereby to heat the purge gas.
A gas capture element for capturing gas within a non-evaporable getter pump, said gas capture element comprising a surface structure comprising a plurality of structure elements formed from NEG material as pillars or microvilli gener- ated by additive manufacturing.
B01D 53/02 - Separation of gases or vapoursRecovering vapours of volatile solvents from gasesChemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases or aerosols by adsorption, e.g. preparative gas chromatography
B01D 53/04 - Separation of gases or vapoursRecovering vapours of volatile solvents from gasesChemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases or aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
F04B 37/02 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups for evacuating by absorption or adsorption
B33Y 80/00 - Products made by additive manufacturing
An inlet nozzle assembly, an abatement apparatus and a method are disclosed. The inlet nozzle assembly is for an abatement apparatus for treating an effluent stream from a semiconductor processing tool, the inlet nozzle assembly comprises: an inlet nozzle configured to deliver the effluent stream into an abatement chamber; a head defining an aperture for receiving the inlet nozzle; and an insulating mount configured to retain the inlet nozzle within the aperture. In this way, the thermal path between the inlet nozzle and the head is interrupted by the insulating mount which helps to prevent the inlet nozzle being cooled by the head, which helps to prevent condensates gathering as powder or particulates on the inlet nozzle.
F23G 7/06 - Methods or apparatus, e.g. incinerators, specially adapted for combustion of specific waste or low grade fuels, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
An abatement apparatus includes a combustion chamber formed by a foraminous sleeve defining an upstream portion of the combustion chamber for treating an effluent stream, the upstream portion of the combustion chamber having an inlet for receiving the effluent stream and a wetted sleeve fluidly coupled with foraminous sleeve, the wetted sleeve defining a downstream portion of the combustion chamber, wherein the foraminous sleeve is configured to provide a foraminous axial surface facing downstream towards the downstream portion of the combustion chamber. In this way, the foraminous surface not only faces inwards towards the upstream portion of the combustion chamber, but also faces downstream, towards the downstream portion of the combustion chamber.
F23G 7/06 - Methods or apparatus, e.g. incinerators, specially adapted for combustion of specific waste or low grade fuels, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
A scroll pump 10' includes an inlet (28), an outlet, and two scroll members comprising a fixed scroll (12) and an orbiting scroll (14) interleaving with the fixed scroll (12) and mounted such that rotation of a motor imparts an orbital motion to the orbiting scroll (14) relative to the fixed scroll (12). Each scroll member has a base (16, 20) from which an involute wall (18, 22) extends to define a pumping chamber for conveying fluid from the inlet (28) to the outlet and which, with orbital movement of the orbiting scroll (14), transitions from an open configuration, in which the pumping chamber receives fluid from the inlet along a first flow path, to a closed configuration, in which the pumping chamber is isolated from the inlet. A base of one of the scroll members includes a channel (34) in fluid communication with the inlet and positioned so that, when the pumping chamber is in an open configuration, the pumping chamber receives fluid from the inlet along an additional flow path passing through the channel (34).
F04C 15/06 - Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
F04C 18/02 - Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
F04C 23/00 - Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluidsPumping installations specially adapted for elastic fluidsMulti-stage pumps specially adapted for elastic fluids
37 - Construction and mining; installation and repair services
Goods & Services
Pumps, namely, vacuum pumps; vacuum pumps; dry vacuum pumps, booster vacuum pumps, roots vacuum pumps, screw vacuum pumps; vacuum pump installations; machine parts and controls, namely, valves, pipe fittings and flanges specifically adapted for the operation of vacuum pumps; drives for vacuum pumps; motors for vacuum pumps; shaft bearings for vacuum pumps; mechanical seals for vacuum pumps; filters for vacuum pumps; rotors and shafts for vacuum pumps; stators for vacuum pumps; and structural parts therefor Installation, cleaning, repair and maintenance of pumps; installation, cleaning, repair and maintenance of vacuum pumps; installation, cleaning, repair and maintenance of vacuum pump installations; reconditioning of vacuum pumps and parts thereof; advisory, consultancy and information services for the aforementioned.
37 - Construction and mining; installation and repair services
Goods & Services
Installation, cleaning, repair and maintenance of machinery; installation of vacuum pump installations, equipment and apparatus; maintenance of vacuum pump installations, equipment and apparatus; repair of vacuum pump installations, equipment and apparatus; cleaning of vacuum pump installations, equipment and apparatus; advisory, consultancy and information services relating to the aforementioned.
A modular abatement apparatus is for abatement of an effluent stream from a semiconductor processing tool and comprises: a housing defining a common housing chamber; a plurality of combustion chamber modules positionable within the common housing chamber for treating the effluent stream, each combustion chamber module containing a foraminous sleeve defining a combustion chamber therewithin. In this way, multiple combustion chambers may be provided within a single, common housing, each of which may be configured to treat a particular effluent stream flow. Accordingly, the number of combustion chambers can be selected to match the different types and flowrates of the effluent stream expected from any particular processing tool. This provides an architecture which is readily scalable to suit the needs of different effluent gas stream types and flowrates while retaining a common housing which may interface with upstream and downstream components.
F23G 7/06 - Methods or apparatus, e.g. incinerators, specially adapted for combustion of specific waste or low grade fuels, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
B01D 53/00 - Separation of gases or vapoursRecovering vapours of volatile solvents from gasesChemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases or aerosols
An inlet nozzle assembly includes: a delivery nozzle configured to deliver an effluent stream into an abatement chamber; and a mount configured to couple with an enclosure defining the abatement chamber, the mount being further configured to receive the delivery nozzle, wherein the delivery nozzle is configured to extend from the mount distal from the abatement chamber. In this way, the height of the mount and the location of the abatement chamber can remain fixed for different length delivery nozzles and different amounts of the delivery nozzle extend from the mount, dependent on the length of that nozzle.
F23G 7/06 - Methods or apparatus, e.g. incinerators, specially adapted for combustion of specific waste or low grade fuels, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
A wet electrostatic precipitator includes an ancillary component cleaning device with a cleaning assembly moveably supportable within an electrostatic precipitator; the cleaning assembly having a scraper configurable to abut an ancillary component of the electrostatic precipitator, such that movement of the cleaning assembly within the electrostatic precipitator causes movement of the scraper with respect to the ancillary component and wherein the ancillary component includes a component of a separation assembly provided in the wet electrostatic precipitator to maintain electrical isolation between the discharge and collection electrodes.
A multistage rotary vane vacuum pump (100) comprising: a first pumping stage (104) comprising: a first pump chamber (108); and a first rotor (112) rotatably mounted within the first pump chamber (108); a second pumping stage (106) comprising: a second pump chamber (110); and a second rotor (114) rotatably mounted within the second pump chamber (110); a first fluid passage (124) between the first pump chamber (108) and the second pump chamber (110) for allowing fluid to be pumped from the first pump chamber (108) to the second pump chamber (110); a second fluid passage (132) between the first pumping stage (104) and the second pumping stage (106) for allowing the fluid to be pumped from the second pumping stage (106) back to the first pumping stage (104); and a valve (134) disposed within the second fluid passage (132).
F04C 18/344 - Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups , , , , , or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group or and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
F04C 23/00 - Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluidsPumping installations specially adapted for elastic fluidsMulti-stage pumps specially adapted for elastic fluids
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04C 28/26 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves using bypass channels
F04C 29/12 - Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
A connector (16) for use in a vacuum pumping system (2) having a plurality of pumping modules (4), each pumping module (4) comprising a first vacuum pump (12) and a second vacuum pump (14). The connector (16) comprises: a conduit (50) having a first conduit portion (51) comprising a first opening (61) and a second opening (62); a second conduit portion (52) extending from the first conduit portion (51) at a branching point (54) between the first opening (61) and the second opening (62), the second conduit portion (52) comprising a third opening (63) at an end distal from the branching point (54); a first valve (71) disposed along the first conduit portion (51) between the branching point (54) and the second opening (62); and a second valve (72) disposed along the second conduit portion (52) between the branching point (54) and the third opening (63).
F04B 25/00 - Multi-stage pumps specially adapted for elastic fluids
F04B 37/14 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups for special use to obtain high vacuum
F04C 23/00 - Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluidsPumping installations specially adapted for elastic fluidsMulti-stage pumps specially adapted for elastic fluids
A pump monitoring system includes a controller and a microphone for detecting sound waves. The controller is configured to receive an audio signal from the microphone representing sound waves generated by the vacuum pump. The controller processes the received audio signal to generate a frequency domain representation of the audio signal. The frequency domain representation of the audio signal is analysed to identify at least one fault condition frequency component indicative of a fault condition. A fault condition signal is output to identify the fault condition in dependence on the identification of the at least one fault condition frequency component. In a further embodiment, the pump monitoring system comprises a vibration sensor for detecting vibrations. The present invention also relate to a vacuum pump; a method of monitoring a vacuum pump; and a nontransitory computer-readable medium.
At least a part of a stator for a vacuum pump, comprising: a first wall and one or more sidewalls extending therefrom, the first wall and the one or more sidewalls define an internal cavity, and an outlet channel formed through a sidewall of the one or more sidewalls, the outlet channel having an opening at an internal surface of one or more of the sidewalls, the outlet channel being for allowing a fluid to flow from the internal cavity to an outside of the at least a part of the stator. The internal surface of the first wall is contiguous with the opening. Thus, liquid and particulate matter within the at least a part of a stator will tend to flow, due to gravity, out of the stator via the outlet channel.
F04C 28/26 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves using bypass channels
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04C 29/12 - Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
At least a part of a stator for a vacuum pump, comprising: a plurality of walls defining therebetween at least a part of a pumping chamber; a channel formed within one or more of the walls of the plurality of walls, the channel comprising a first opening at a first end of the channel and a second opening at a second end of the channel, the first opening being an opening in an internal surface of the one or more of the walls and being in fluid communication with the pumping chamber; and a pressure relief valve disposed within the channel.
F04C 18/12 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04C 28/24 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves
F04C 28/26 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves using bypass channels
A fluid routing module for a vacuum pumping system, the fluid routing module comprising: a first fluid inlet; a second fluid inlet; a fluid outlet; a first fluid line coupled between the first fluid inlet and the fluid outlet; a second fluid line coupled between the second fluid inlet and the fluid outlet; a first restrictor configured to restrict a flow of the fluid therethrough, the first restrictor being disposed along the first fluid line; a vacuum pump disposed along the second fluid line; and one or more valves configured to selectably direct a fluid flow through either the first fluid line or the second fluid line.
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
A system comprising: a semiconductor processing tool (102) comprising a process chamber (108); a valve module (104) configured to receive a fluid from the process chamber (108) and to selectably direct a flow of said fluid; and a cooling apparatus (402) configured to supply a flow of a cooling fluid to the process chamber (108); wherein the valve module (104) and the cooling apparatus (402) are arranged in a stacked configuration.
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
C23C 16/44 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
A channel seal (200, 300) for a scroll pump (100). The channel seal comprises an inner portion (210, 310) and an outer portion (220, 320) located around the periphery of the inner portion. The outer portion is formed from a more wear resistant material than the inner portion. A surface of the inner portion which is subject to wear during operation of the scroll pump is axially offset from a surface of the outer portion which is subject to wear during operation of the scroll pump.
F04C 18/02 - Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
F04C 27/00 - Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
66.
CONNECTOR FOR CONNECTING A VACUUM PUMP AND/OR ABATEMENT APPARATUS TO A FLUID LINE
A vacuum pump and/or abatement system connector (50) for connecting a vacuum pump and/or abatement apparatus (16) to a fluid line (6), the vacuum pump and/or abatement system connector (50) comprising: a conduit (56) for permitting the flow therethrough of a fluid, the conduit (56) having a first end (60) and a second end (64) opposite to the first end (60), the conduit (56) being expandable and compressible such that a length of the conduit (56) between the first end (60) and the second end (64) may be varied; a first flange (52) at or proximate to the first end (60) of the conduit (56); a second flange (54) at or proximate to the second end (64) of the conduit (56); and a pin (58); wherein the pin (58) is fixedly coupled to the first flange (52) and is received in an opening (62) through the second flange (54), thereby to substantially prevent or oppose lateral movement of the flanges (52, 54) with respect to each other.
F16L 23/02 - Flanged joints the flanges being connected by members tensioned axially
F16L 27/111 - Adjustable jointsJoints allowing movement comprising a flexible connection only the ends of the pipe being interconnected by a flexible sleeve the sleeve having the form of a bellows with multiple corrugations the bellows being reinforced
Aspects relate to monitorable plasma torch device components and in particular to monitoring and predictive maintenance of one or more such monitorable plasma torch device components. One aspect provides a monitorable plasma torch device component, the component comprising: a component body and a sacrificial component located in an erosion zone of the component body. The sacrificial component comprises material which differs from the plasma torch device component body and which, on exposure to a plasma torch in a plasma torch device, generates electromagnetic radiation distinct from that of the plasma torch device component body. The distinct electromagnetic radiation generated is indicative of erosion of the monitorable plasma torch device component in the erosion zone. Such a monitorable plasma torch device component can facilitate effective component monitoring which allows for ameliorative action to be taken in the event that degradation of the device component is detected.
A vacuum chamber (10) includes a housing (12) and a tube (16) connected to the housing (12). A side wall of the tube (16) intersects a side wall of the housing (12) to define an interface (25) through which gas passes between the housing (12) and the tube (16).
F04B 37/14 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups for special use to obtain high vacuum
H01J 49/24 - Vacuum systems, e.g. maintaining desired pressures
69.
SCROLL PUMP AND ANTI-ROTATION DEVICE FOR A SCROLL PUMP
A scroll pump anti-rotation device for resisting relative rotational movement between two scrolls and a scroll pump comprising such an anti-rotation device are disclosed. The anti-rotation device (50) comprises: a body portion (53) from which two perpendicular arms (56,58) extend, a first arm (56) being configured for connection in a fixed relation to one of the two scrolls and a second arm (58) being configured for connection in a fixed relation to the other of the two scrolls. The first arm is configured to flex to allow movement of the one scroll relative to the other scroll in a first direction and the second arm being configured to flex to allow movement of the other scroll in a second direction generally orthogonal to the first direction; wherein at least one of the two arms is mounted within the body portion (53).
F01C 17/06 - Arrangements for drive of co-operating members, e.g. for rotary piston and casing using cranks, universal joints, or similar elements
F04C 18/02 - Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
A method of cooling an abatement apparatus for abatement of an effluent stream from a semiconductor processing tool includes: providing at least one modular cooling assembly having a cooling capacity; determining a cooling requirement of an abatement apparatus; and incorporating into the abatement apparatus a number of the modular cooling assemblies whose cumulative cooling capacity at least matches the cooling requirement of the abatement apparatus. In this way, multiple modular cooling assemblies may be incorporated into the abatement apparatus, each of which provides cooling capacity. The number of modular cooling assemblies can be selected to suit the cooling requirement of the abatement apparatus.
F23G 7/06 - Methods or apparatus, e.g. incinerators, specially adapted for combustion of specific waste or low grade fuels, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
A support structure (200) for a rotor shaft (140) of a turbomolecular pump (100), comprising a central section (200a, 300a, 400a, 500a) for coupling to the rotor shaft of the turbomolecular pump, the central section having a centre point through which a rotation axis of the rotor shaft passes when the rotor shaft is coupled to the central section, and a leg (200b, 300b, 400b, 500b) extending from the central section, wherein the leg is for coupling the central section to a housing of the turbomolecular pump, wherein the leg extends tangentially relative to the central section.
A scroll pump inlet valve and scroll pump are disclosed. The scroll pump inlet valve comprises: a valve seat formed by at least one of a stator and an inlet cover of the scroll pump; and a sealing mechanism, mounted to the stator or the inlet cover. The sealing mechanism comprises an actuator configured to move the sealing mechanism between an open position in which a scroll mechanism and an inlet port of the scroll pump are fluidly connected and a closed position in which the sealing mechanism engages the valve seat to seal the scroll mechanism from the inlet port.
F04C 28/06 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
F04C 29/12 - Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04C 18/02 - Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
The present discloses a pump apparatus having a first pump and at least one controller. The at least one controller is suitable for generating a first control signal for controlling the first pump. The at least one controller is suitable for generating a second control signal for controlling operation of a second pump. The second pump is external to the pump apparatus. One or more pump connection port is provided in the pump apparatus for outputting the second control signal to the second pump. The present disclosure also relates to a vacuum system comprising a pump apparatus of the type described herein.
Multistage vacuum pump and stator for such a pump comprising: two half shell components (10) defining a void for receiving two rotors and forming a plurality of pumping chambers. An outer casing (20) is provided to surround and enclose the two half shell components (10) in a substantially gas tight manner. The outer casing (20) has two end plates (22) configured to be mounted at either end of the two half shell components (10), at least one of which comprises apertures (25) for receiving shafts of the two rotors.
F01C 21/10 - Outer members for co-operation with rotary pistonsCasings
F04C 18/12 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04C 27/00 - Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
F04C 23/00 - Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluidsPumping installations specially adapted for elastic fluidsMulti-stage pumps specially adapted for elastic fluids
A sealing gasket (20) for a vacuum pump comprising: a first sealing member (22) defining a closed shape (preferably a rounded square or rounded rectangle) and comprising: a first surface (30); a second surface (32) opposite the first surface (30); a first inner surface (34); and a first outer surface (36) opposite to the first inner surface (34), wherein the first inner surface (34) and the first outer surface (36) are disposed between the first surface (30) and the second surface (32); a second sealing member (24) defining a closed shape (preferably a rounded square) and comprising: a third surface (40); a fourth surface (42) opposite the third surface (40); a second inner surface (44); and a second outer surface (46) opposite to the second inner surface (44), wherein the second inner surface (44) and the second outer surface (46) are disposed between the third surface (40) and the fourth surface (42); a first longitudinal sealing member (26) connected between the first outer surface (36) and the second outer surface (46); and a second longitudinal sealing member (28) connected between the first outer surface (36) and the second outer surface (46).
A sealing gasket (20) for a vacuum pump, the sealing gasket (20) comprising: a first surface (30, 40); a second surface (32, 42) opposite to the first surface (30, 40); opposing side walls (34, 36; 44, 46) disposed between the first surface (30, 40) and the second surface (32, 42); and one or more protrusions (48a, 48b, 48c, 48d) extending from the first surface.
A vacuum pump shell stator (12, 14) comprising: a seal groove (50, 52) formed in a surface of the shell stator (12, 14), the seal groove (50, 52) being defined by a first side wall (60), a second side wall (62) opposite to the first side wall (60), and a bottom surface (64) disposed between the first side wall (60) and the second side wall (62), the bottom surface (64) being opposite to an opening of the seal groove (50, 52); wherein the seal groove (50, 52) comprises: a protrusion (68) formed in the first side wall (60) and extending towards the second side wall (62); and an indentation (69) formed in the second side wall (62) opposite to the protrusion (68).
A monitoring apparatus includes: input reception circuitry configured to receive a signal indicative of a characteristic of rotating assembly rotation; and bearing wear monitoring circuitry configured to analyze the signal characteristic of rotating assembly rotation. The bearing wear monitoring circuitry is also configured to identify one or more signal features indicative of bearing wear. Bearing wear produces variation in rolling friction of the bearing and therefore is one cause of variation in shaft torque. Aspects recognise that variations in shaft torque can be indirectly monitored, measured and/or determined by appropriate measurement or monitoring of operational characteristics of a pump motor and that it may be possible to distinguish variations in shaft torque which can be attributed to bearing wear from those variations in shaft torque caused by one or more other factors.
A vacuum pressure gauge assembly includes a body, a pressure transducer received within the body, a microcontroller received within the body and configured to receive a signal indicative of a pressure from the pressure transducer, and at least one light emitting device in communication with the microcontroller. The microcontroller is configured to process the signal from the pressure transducer to determine the pressure, and to control the at least one light emitting device to display a first light pattern when the pressure is within a first pressure range and a second light pattern different from the first light pattern when the pressure is within a second pressure range different from the first pressure range. At least one of the first light pattern and the second light pattern varies in intensity over time.
The present invention relates to an exhaust treatment system for NOx abatement of an exhaust stream. The exhaust treatment system comprises at least one NOx adsorber configured to adsorb NOx from the exhaust stream, and a NOx reactor operable in an offline configuration and an online configuration. When the NOx reactor is in an offline configuration, the NOx reactor is fluidly disconnected from the exhaust stream and the NOx adsorber, and the NOx adsorber is fluidly connected to the exhaust stream such that NOx contained in the exhaust stream may be adsorbed by the NOx adsorber. When the NOx reactor is in an online configuration, the NOx reactor is fluidly connected to the NOx adsorber such that NOx adsorbed by the NOx adsorber may be treated by the NOx reactor.
B01J 20/04 - Solid sorbent compositions or filter aid compositionsSorbents for chromatographyProcesses for preparing, regenerating or reactivating thereof comprising inorganic material comprising compounds of alkali metals, alkaline earth metals or magnesium
Aspects of the present invention relate to a power supply unit (31) configured to be integrated into a vacuum pressure gauge (1). The vacuum pressure gauge (1) having a vacuum pressure sensor (3). The power supply unit (31) includes a motherboard (55) and a daughterboard (65). The motherboard (55) has a first surface and a second surface. A transformer (37) having a primary coil (W1) and a secondary coil (W2) is mounted to the motherboard (55). The daughterboard (65) has one or more first electrical connectors (41-n) for supplying power to the vacuum pressure sensor (3). At least a portion of the first surface of the motherboard (55) and at least a portion of the daughterboard (65) are encapsulated in an electrical potting compound. Aspects of the present invention relate to vacuum pressure gauge (1) including a power supply unit (31); a mounting arrangement of a power supply (31) to a vacuum pressure sensor (31); and a method of manufacturing a power supply unit (31).
G01L 21/30 - Vacuum gauges by making use of ionisation effects
G01L 19/00 - Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
M22B135 19 ABSTRACT VACUUM PRESSURE GAUGE Aspects of the present invention relate to a vacuum pressure gauge (1) for measuring a 5 vacuum pressure in a vacuum system component. The vacuum pressure gauge (1) has a base for mounting the vacuum pressure gauge (1) to the vacuum system component. A vacuum pressure sensor (3) is fastened to the base. A control unit (35) is provided to control the vacuum pressure sensor (3). A power supply unit (31) is provided for supplying power to the vacuum pressure sensor (3). The power supply unit (31) and the vacuum pressure sensor 10 (3) have complementary electrical connectors for connecting the power supply unit (31) to the vacuum pressure sensor (3). The power supply unit (31) is removably mounted to the vacuum pressure sensor (3). [FIGURE 1] 15
G01L 19/00 - Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
Aspects of the present invention relate to a power supply unit (31) configured to be integrated into a vacuum pressure gauge, the vacuum pressure gauge (1) comprising an ionization vacuum pressure sensor (3) having an anode (7) and a cathode (9). The power supply unit (31) includes a motherboard (55) and a daughterboard (65). The motherboard (55) has a first surface (57A) and a second surface (57B). A transformer (37) having a primary coil (W1) and a secondary coil (W2) is mounted to the motherboard (55). The daughterboard (65) has one or more first electrical connectors (41-n) for supplying power to the ionization vacuum pressure sensor (3), the one or more first electrical connectors (41-n) including a high voltage (HV) first electrical connector (41-1) which is electrically connected to the secondary coil (W2) of the transformer (37). The high voltage (HV) first electrical connector (41-1) is configured to be connected to the anode (7) of the ionization vacuum pressure sensor (3). The daughterboard (65) is mounted to the first surface of the motherboard (55), the one or more first electrical connectors (41-n) on the daughterboard (65) being spaced apart from the first surface of the motherboard (55). Aspects of the present invention relate to vacuum pressure gauge (1) including a power supply unit (31); a mounting arrangement of a power supply (31) to a vacuum pressure sensor (31); and a method of manufacturing a power supply unit (31).
G01L 21/30 - Vacuum gauges by making use of ionisation effects
G01L 19/00 - Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
An induction heated abatement apparatus for treating an effluent stream from a semiconductor processing tool is disclosed. The induction heated abatement apparatus comprises: a work coil configured to inductively heat a porous susceptor defining an abatement chamber for treating said effluent stream, wherein said work coil is hollow to define a conduit coupled with a source of reaction reagents and wherein at least one surface of said work coil defines a plurality of apertures in fluid communication with said conduit for conveying said reaction reagents from said conduit to said surface of said work coil for supply to said porous susceptor. In this way, the work coil can be protected from the effects of overheating whilst also reducing wasted heat because the heat obtained by the reaction reagents used as coolant gas can be recycled and used to facilitate abatement in the porous susceptor defining an abatement chamber. This arrangement can obviate the need for a separate supply of reaction reagents to the abatement chamber.
A scroll pump includes an inlet and an outlet, a fixed scroll and an orbiting scroll intermeshed with each other, wherein the fixed scroll and orbiting scroll define a space therebetween. The scroll pump further includes a biasing apparatus configured to bias the orbiting scroll against the fixed scroll, a fluid recirculation channel which extends from the space to the inlet through either the fixed scroll or the orbiting scroll, and a fluid recirculation valve disposed in the fluid recirculation channel. The fluid recirculation valve is configured to permit flow of fluid from the space to the inlet through the fluid recirculation channel or to block flow of fluid through the fluid recirculation channel. The fluid recirculation valve is configured to switch from a closed state to an open state when a pressure differential across the fluid recirculation valve is equal to or exceeds a certain threshold value.
F04C 18/02 - Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
F04C 27/00 - Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
F04C 28/24 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves
F04C 29/00 - Component parts, details, or accessories, of pumps or pumping installations specially adapted for elastic fluids, not provided for in groups
F04C 29/12 - Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
The present invention provides a wet scrubber for gas abatement, comprising a scrubbing vessel defining a chamber, a gas inlet for supplying a gas to be scrubbed, and a gas outlet for allowing the egress of a scrubbed gas; the inlet and outlet being in fluid communication with one another; one or more scrubbing fluid supply ports; the wet scrubber comprising at least one distribution element connected to a scrubbing fluid supply port for distributing a scrubbing fluid inside the chamber; wherein at least one said distribution element is a distribution plate comprising a cavity and a plurality of apertures arranged to allow scrubbing fluid to flow from the cavity.
The present disclosure relates to a thermal conductivity vacuum gauge assembly. The assembly comprises a body defining an internal chamber for receiving working gas and a heater element disposed within the chamber. The body is defined by a wall having an outer facing wall surface and an opposing inner facing wall surface. A thermal compensation element and a thermal equalisation element are in thermal communication with the body. The body is made of a material with a first thermal conductivity, and the thermal equalisation element is made of a material with a second thermal conductivity that is higher than the first thermal conductivity. The present disclosure also relates to a thermal conductivity vacuum gauge including the assembly.
G01L 21/12 - Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filamentsVacuum gauges of the Pirani type
G01L 19/04 - Means for compensating for effects of changes of temperature
The present disclosure relates to a thermal conductivity vacuum gauge assembly. The assembly comprises a body defining an internal chamber for receiving working gas and a heater element disposed within the chamber. The body is defined by a wall having an outer facing wall surface and an opposing inner facing wall surface. A thermal compensation element is enclosed within the wall between the outer and inner facing wall surfaces. The present disclosure also relates to a thermal conductivity vacuum gauge including the assembly.
G01L 21/12 - Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filamentsVacuum gauges of the Pirani type
90.
METHOD FOR DETECTION OF A BEARING CONDITION OF A VACUUM PUMP
Method for detection of a bearing condition of a vacuum pump, comprising: Detection of a bearing temperature of the bearing of the vacuum pump; Detec- tion of at least one second temperature of the vacuum pump; and Determining a bearing condition on the basis of the bearing temperature and the second temperature.
Oil feed nut for providing a lubricant to a bearing of a vacuum pump comprising a first end and an opposite second end and being configured to be connected to a shaft of the vacuum pump. Further, the oil feed nut comprising an oil feeding element extending between the first end and the second end, wherein the oil feeding element has an increasing diameter towards the second end to create an increasing rotational force acting on the lubricant in order to convey the lubricant towards the second end, and a bearing journal element having a cylindrical surface configured to be received in a back-up bearing of the vacuum pump. Therein, the back-up bearing is arranged in a cartridge of an oil reservoir.
A plasma abatement apparatus includes: a plasma device configured to generate a plasma stream from a plasma gas; an effluent stream aperture configured to convey the effluent stream into the plasma stream for treatment by the plasma stream; a first aperture positioned to deliver a reducing reactant to a first region of the plasma stream; and a second aperture positioned to deliver an oxidising reactant to a second region of the plasma stream, wherein the second region is located at a position of the plasma stream which is cooler than the first region.
Magnetic bearing hub (21) for a vacuum pump comprising: a base element (24) to be connected to the housing (10) of the vacuum pump and a trunnion (20) extending from the base element (24), wherein the trunnion (20) is configured to receive a static magnetic element of the magnetic bearing (18), wherein the trunnion (20) has a predetermined breaking point (28).
An abatement system (104) for treatment of exhaust gases of a vacuum processing system (100), the abatement system (104) comprising: an inlet manifold (200), the inlet manifold (200) comprising: a single fluid inlet (224) for receiving an exhaust gas stream from the vacuum processing system (102); and a plurality of fluid outlets (226) coupled to the fluid inlet (224); and a plurality of abatement devices (202) arranged to, in use, receive the exhaust gas stream from the inlet manifold (200); wherein each abatement device (202) of the plurality of abatement devices (202) is coupled to a respective fluid outlet (226) of the inlet manifold (200).
B01D 53/32 - Separation of gases or vapoursRecovering vapours of volatile solvents from gasesChemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases or aerosols by electrical effects other than those provided for in group
The present invention provides a foraminous burner liner for a gas abatement system. The burner liner comprises a hollow body defined by a wall, the wall comprising a plurality of interconnected substantially concentric layers. Each layer of the wall comprises a substantially regular openwork mesh; wherein the substantially regular openwork mesh of each layer is configured such that it is out of phase with one or more adjacent layers, and wherein the wall comprises sufficient layers arranged such that the wall is optically opaque when viewed externally in any radially inward direction normal to the wall.
A fluid routing module (104) for a vacuum pumping system (100) comprises: a first fluid inlet (110a); a first fluid outlet (114a); a first fluid line (200) coupled between the first fluid inlet (110a) and the fluid outlet (114a); and a restrictor module (212) disposed along the first fluid line (200) between the first fluid inlet (110a) and the first fluid outlet (114a), wherein the restrictor module (212) is configured to variably restrict a flow of fluid between the first fluid inlet (110a) and the first fluid outlet (114a).
F04B 37/14 - Pumps specially adapted for elastic fluids and having pertinent characteristics not provided for in, or of interest apart from, groups for special use to obtain high vacuum
F04B 49/22 - Control of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for in, or of interest apart from, groups by means of valves
F04D 27/00 - Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
F04C 28/26 - Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves using bypass channels
F04D 19/04 - Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
H01L 21/02 - Manufacture or treatment of semiconductor devices or of parts thereof
A separator for separating contaminants suspended within an effluent stream is disclosed. The separator comprises: an inlet conduit configured to receive from an abatement apparatus the effluent stream containing contaminants flowing in a first major direction from a lower portion of said separator towards an upper portion of said separator; a spray nozzle configured to spray an entraining fluid within the inlet conduit in the first major direction to entrain the contaminants within the effluent stream; a first flow redirection structure located downstream of the inlet conduit; and a first separation conduit located downstream of the first flow redirection structure, wherein the first flow redirection structure is configured to redirect flow of the effluent stream and the entraining fluid from an axial flow from the inlet conduit to a circumferential flow in a second major direction opposing the first major direction within the first separation conduit. In this way, separation of the contaminants entrained by the entraining fluid from the effluent stream is encouraged since the change in the direction of flow helps to create a longer flow path while keeping the footprint and dimensions of the separator to a minimum. Also, this can provide a separator that exhausts effluent containing less entraining fluid than conventional venturi-ejector scrubbers. This can obviate the need for additional downstream apparatus such as cyclone separators which add to the cost and size of the apparatus.
B01D 45/06 - Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by utilising inertia by reversal of direction of flow
B01D 45/16 - Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by centrifugal forces generated by the winding course of the gas stream
A multi-stage vacuum pump (400) includes a stator assembly defining at least three chambers (104a-104f), a rotor assembly (110) having at least three rotors housed in respective ones of the chambers to define at least three pump stages (100a-100f), and a shaft (114) rotatable about a central axis and on which the rotors are mounted. The pump stages provide at least an inlet stage (100a) and an outlet stage (100f). The shaft is supported by a moveable bearing (120) that is axially moveable relative to the stator assembly to allow axial expansion of the rotor assembly during operation, and a fixed bearing (130) that is fixed in axial position relative to the stator assembly to react against the axial expansion of the rotor assembly during operation. The outlet stage (100f) is positioned closer to the fixed bearing (130) than the inlet stage (100a), and the inlet stage is positioned closer to the fixed bearing than at least one of the other pump stages (100b-100e).
F04C 18/12 - Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
F04C 25/02 - Adaptations for special use of pumps for elastic fluids for producing high vacuum
F04C 23/00 - Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluidsPumping installations specially adapted for elastic fluidsMulti-stage pumps specially adapted for elastic fluids
The present disclosure relates to a rotor blade (104) for a turbomolecular vacuum pump. The rotor blade has a blade angle of 0º at the root (106), which increases continuously along substantially the entire span S of the rotor blade (106). The rotor blade (104) tapers from a maximum thickness (116) at the root (106) to a point of minimum thickness (118) over a portion of its span S, and is made of a polymer material reinforced with short fibres. This provides a rotor blade (104) with a more complex geometry that has reduced weight and improved performance and cost- effectiveness. The present disclosure also relates to a rotor (100) comprising the rotor blade (104), a mould for injection moulding the rotor blade (104) or rotor (100), and a method of injection moulding the rotor blade (104) or rotor (100).
The present invention provides a dry absorber canister for an exhaust gas abatement system. The canister comprises a hollow chamber configured to retain particulate absorption media. The chamber having a cross-sectional area defined by a longitudinally extending wall, and the chamber having a gas inlet at a first end and a gas outlet at a second end. The cross-sectional area of the chamber varies between the first end and the second end. The cross-sectional area of the chamber increases from the gas inlet to a maximum cross-sectional area.
B01D 53/04 - Separation of gases or vapoursRecovering vapours of volatile solvents from gasesChemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases or aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
