JPK Instruments AG

Germany

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        World 12
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IPC Class
G01Q 30/02 - Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope 4
G01Q 60/42 - Functionalisation 4
G01Q 10/00 - Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe 3
G01Q 10/06 - Circuits or algorithms therefor 3
G01Q 30/06 - Display or data processing devices for error compensation 3
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NICE Class
09 - Scientific and electric apparatus and instruments 2
40 - Treatment of materials; recycling, air and water treatment, 2
42 - Scientific, technological and industrial services, research and design 2

1.

Method and apparatus for the combined analysis of a sample with objects to be analyzed

      
Application Number 12670570
Grant Number 08898809
Status In Force
Filing Date 2008-07-24
First Publication Date 2010-10-14
Grant Date 2014-11-25
Owner
  • BRUKER NANO GMBH (Germany)
  • JPK INSTRUMENTS AG (Germany)
Inventor
  • Müller, Torsten
  • Poole, Kathryn Anne
  • Knebel, Detlef
  • Jähnke, Torsten

Abstract

The invention relates to a method for the combined analysis of a sample with objects to be analyzed, in particular a sample with biological objects, in which measurement results for one or more of the objects to be analyzed in the sample are obtained by analyzing the one or more objects to be analyzed by an imaging method of measurement, probe-microscopic measurement results are obtained for the one or more objects to be analyzed by analyzing the one or more objects to be analyzed by a probe-microscopic method of measurement, and the measurement results and the probe-microscopic measurement results are assigned to one another, after optional prior intermediate processing. Furthermore, the invention relates to an apparatus for carrying out combined analysis of a sample with objects to be investigated, in particular a sample with biological objects.

IPC Classes  ?

  • G01Q 60/00 - Particular types of SPM [Scanning-Probe Microscopy] or apparatus thereforEssential components thereof
  • G01Q 30/04 - Display or data processing devices
  • G01Q 30/02 - Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
  • G01Q 60/42 - Functionalisation
  • B82Y 35/00 - Methods or apparatus for measurement or analysis of nanostructures
  • G01N 21/64 - FluorescencePhosphorescence

2.

Measuring probe device for a probe microscope, measuring cell and scanning probe microscope

      
Application Number 12670561
Grant Number 08505109
Status In Force
Filing Date 2008-07-24
First Publication Date 2010-10-14
Grant Date 2013-08-06
Owner
  • BRUKER NANO GMBH (Germany)
  • JPK INSTRUMENTS AG (Germany)
Inventor
  • Jähnke, Torsten
  • Müller, Torsten
  • Poole, Kathryn Anne
  • Knebel, Detlef

Abstract

The invention relates to a measuring probe device for a probe microscope, in particular a scanning probe microscope, with a measuring probe holder and a measuring probe arranged on the measuring probe holder, which is set up for a probe microscopic investigation of a sample, wherein on the measuring probe holder, a measuring probe chamber is formed, which receives the measuring probe at least partially and is open on a side away from the measuring probe holder, and is configured to receive a liquid surrounding the measuring probe. The invention also relates to a measuring cell for receiving a liquid sample for a probe microscope, a scanning probe microscope with a measuring probe device and a scanning probe microscope with a measuring cell.

IPC Classes  ?

3.

Method and apparatus for characterizing a sample with two or more optical traps

      
Application Number 12602151
Grant Number 08415613
Status In Force
Filing Date 2008-05-30
First Publication Date 2010-09-30
Grant Date 2013-04-09
Owner
  • BRUKER NANO GMBH (Germany)
  • JPK INSTRUMENTS AG (Germany)
Inventor
  • Heyn, Sven-Peter
  • Kerssemakers, Jacob
  • Knebel, Detlef
  • Eggert, Helge
  • Jaehnke, Torsten
  • Kamps, Joern

Abstract

The present invention relates to a method for investigating a sample using scanning probe photon microscopy or optical force microscopy, and to an apparatus which is designed accordingly. The method or the apparatus provides for two optical traps which can be moved in a local region of the sample, wherein in at least one of the two traps a probe is held. The sample is scanned using the two traps and the measured data from the two traps are captured separately and evaluated by correlation. In particular interference signals resulting from an interaction between sample and light trap can be eliminated by the method.

IPC Classes  ?

  • H01S 1/00 - Masers, i.e. devices using stimulated emission of electromagnetic radiation in the microwave range
  • H01S 3/00 - Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
  • H05H 3/02 - Molecular or atomic-beam generation, e.g. resonant beam generation

4.

Apparatus and method for examining a specimen by means of probe microscopy

      
Application Number 12377709
Grant Number 09063335
Status In Force
Filing Date 2007-08-20
First Publication Date 2010-09-09
Grant Date 2015-06-23
Owner
  • BRUKER NANO GMBH (Germany)
  • JPK INSTRUMENTS AG (Germany)
Inventor
  • Sommer, Gunnar
  • Kamps, Jörn

Abstract

The invention relates to an apparatus and a method for examining a specimen by means of probe microscopy, in particular scanning probe microscopy. The apparatus comprises a probe microscope device which has a specimen holder for holding a specimen to be examined, a measurement probe and a displacement unit which is configured to displace the specimen holder and the measurement probe relative to one another for an examination of the specimen by means of probe microscopy, and comprises a condenser illumination and also an optical system which is arranged downstream of the condenser illumination and is configured to project condenser light, which is emitted by the condenser illumination in a condenser light path, into the region of the specimen holder for optical microscopy of the specimen to be examined, while at least partially maintaining condenser light parameters with which the condenser light is emitted by the condenser illumination.

IPC Classes  ?

  • G01Q 60/06 - SNOM [Scanning Near-field Optical Microscopy] combined with AFM [Atomic Force Microscopy]
  • G02B 21/08 - Condensers
  • B82Y 35/00 - Methods or apparatus for measurement or analysis of nanostructures
  • G02B 21/00 - Microscopes
  • G01Q 30/02 - Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope

5.

Method for examining a test sample using a scanning probe microscope, measurement system and a measuring probe system

      
Application Number 12600289
Grant Number 08381311
Status In Force
Filing Date 2008-05-16
First Publication Date 2010-08-26
Grant Date 2013-02-19
Owner
  • BRUKER NANO GMBH (Germany)
  • JPK INSTRUMENTS AG (Germany)
Inventor Jähnke, Torsten

Abstract

The invention relates to a method and to a device for examining a test sample using a scanning probe microscope. According to the method a first and a second measurement using a scanning probe microscope are carried out on the test sample using a measuring probe system in which a measuring probe and another measuring probe are formed on a common measuring probe receptacle. During the first measurement, in relation to the test sample, the measuring probe is held in a first measurement position and the other measuring probe is held in another non-measurement position, and the test sample is examined with the measuring probe using a scanning probe microscope. After the first measurement, by displacing in relation to the test sample, the measuring probe is displaced from the measurement position into a non-measurement position and the other measuring probe from the other non-measurement position into another measurement position. During the second measurement, in relation to the test sample, the measuring probe is held in the non-measurement position and the other measuring probe is held in the other measurement position, and the test sample is examined with the other measuring probe using a scanning probe microscope. The invention also relates to a measuring sensor system of a scanning probe microscope.

IPC Classes  ?

  • G01Q 10/00 - Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe

6.

Method for examining a measurement object, and apparatus

      
Application Number 12083303
Grant Number 08769711
Status In Force
Filing Date 2006-06-30
First Publication Date 2009-08-13
Grant Date 2014-07-01
Owner
  • BRUKER NANO GMBH (Germany)
  • JPK INSTRUMENTS AG (Germany)
Inventor Jähnke, Torsten

Abstract

The invention relates to a method for examining a measurement object (2, 12), in which the measurement object (2, 12) is examined by means of scanning probe microscopy using a measurement probe (10) of a scanning probe measurement device, and in which at least one subsection (1) of the measurement object (2, 12) is optically examined by an optical measurement system in an observation region associated with the optical measurement system, wherein a displacement of the at least one subsection (1) of the measurement object (2, 12) out of the observation region which is brought about by the examination by means of scanning probe microscopy is corrected in such a way that the at least one displaced subsection (1) of the measurement object (2, 12) is arranged back in the observation region by means of a readjustment device which processes data signals that characterize the displacement.

IPC Classes  ?

  • G01Q 60/24 - AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes

7.

METHOD AND APPARATUS FOR THE COMBINED ANALYSIS OF A SAMPLE WITH OBJECTS TO BE ANALYSED

      
Application Number DE2008001203
Publication Number 2009/012766
Status In Force
Filing Date 2008-07-24
Publication Date 2009-01-29
Owner JPK INSTRUMENTS AG (Germany)
Inventor
  • Jähnke, Torsten
  • Müller, Torsten
  • Poole, Kathryn, Anne
  • Knebel, Detlef

Abstract

The invention relates to a method for the combined analysis of a sample with objects to be analysed, in particular a sample with biological objects, in which measurement results are recorded for one or more of the objects to be analysed in the sample by analysing the one or more objects to be analysed using an imaging measurement method, probe microscopy measurement results are recorded for the one or more objects to be analysed by analysing the one or more objects to be analysed using a probe microscopy measurement method, and the measurement results and the probe microscopy measurement results are assigned to one another following optional previous intermediate processing. Furthermore, the invention relates to an apparatus for carrying out a combined analysis of a sample with objects to be analysed, in particular a sample with biological objects.

IPC Classes  ?

  • G01Q 30/02 - Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
  • G01Q 30/04 - Display or data processing devices
  • G01Q 60/42 - Functionalisation

8.

MEASUREMENT PROBE APPARATUS FOR A PROBE MICROSCOPE, MEASUREMENT CELL AND SCANNING PROBE MICROSCOPE

      
Application Number DE2008001202
Publication Number 2009/012765
Status In Force
Filing Date 2008-07-24
Publication Date 2009-01-29
Owner JPK INSTRUMENTS AG (Germany)
Inventor
  • Jähnke, Torsten
  • Müller, Torsten
  • Poole, Kathryn, Anne
  • Knebel, Detlef

Abstract

The invention relates to a measurement probe apparatus for a probe microscope, in particular a scanning probe microscope, having a measurement probe holder and a measurement probe which is arranged on the measurement probe holder and is designed for a probe-microscopic investigation of a sample, wherein, at the measurement probe holder, a measurement probe chamber is formed, which at least partly holds the measurement probe, is open at a face which is remote from the measurement probe holder, and is configured for holding the liquid surrounding the measurement probe. Furthermore, the invention relates to a measurement cell for holding a liquid sample for a probe microscope, a scanning probe microscope with a measurement probe apparatus and a scanning probe microscope with a measurement cell.

IPC Classes  ?

  • B01L 3/00 - Containers or dishes for laboratory use, e.g. laboratory glasswareDroppers
  • G01Q 30/14 - Liquid environment
  • G01Q 60/42 - Functionalisation

9.

Method for the operation of a measurement system with a scanning probe microscope and a measurement system

      
Application Number 12160039
Grant Number 08368017
Status In Force
Filing Date 2006-12-21
First Publication Date 2008-12-18
Grant Date 2013-02-05
Owner
  • BRUKER NANO GMBH (Germany)
  • JPK INSTRUMENTS AG (Germany)
Inventor
  • Jahnke, Torsten
  • Haggerty, Michael Richard

Abstract

The invention relates to a method for operating a measurement system containing a scanning probe microscope, in particular an atomic force microscope, and to a measurement system for examining a measurement sample using a scanning probe microscope and for optically examining said sample. In the method, an optical image of a measurement section of a measurement sample to be examined, said image being recorded with the aid of an optical recording device, is displayed on a display apparatus, a choice of a position in the optical image is detected, and, for a scanning probe measurement, a measurement probe which is configured for the scanning probe measurement is moved, using a movement apparatus which moves the measurement probe and the measurement sample relative to one another, to a measurement position, which is assigned to the selected position in the optical image in accordance with coordinate transformation, by virtue of the movement apparatus being controlled in accordance with the coordinate transformation, wherein a previously determined assignment between a coordinate system of the optical image and a coordinate system of a space covered by movement positions of the measurement probe and the measurement sample is formed with the coordinate transformation, wherein the movement positions comprise the measurement position.

IPC Classes  ?

  • G01N 23/00 - Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups , or

10.

METHOD AND DEVICE FOR EXAMINING A SAMPLE WITH A PROBE MICROSCOPE

      
Application Number DE2008000894
Publication Number 2008/145108
Status In Force
Filing Date 2008-05-30
Publication Date 2008-12-04
Owner JPK INSTRUMENTS AG (Germany)
Inventor
  • Kerssemakers, Jacob
  • Knebel, Detlef

Abstract

The invention relates to a method for examining a sample with a probe microscope, in particular for examining with a scanning probe microscope, to a method in which a sample is examined with a probe microscope by means of a multi-part measurement probe that consists of a probe element and a guide element that guides the probe element when examining with a probe microscope. Said method consists of the following steps: Noise measurement signals for the measurement probe are detected in a non-measurement configuration, in which the probe element is separated from the guide element; measurement signals for the measurement probe are detected in a measurement configuration in which the probe element is guided by the guide element and the measurement signals are evaluated such that the measurement signals are assigned at least partially to the noise measurement signals. The invention also relates to a device for examining a sample with a probe microscope.

IPC Classes  ?

  • G02B 21/32 - Micromanipulators structurally combined with microscopes
  • G01Q 10/06 - Circuits or algorithms therefor
  • G01Q 30/06 - Display or data processing devices for error compensation
  • G01Q 60/00 - Particular types of SPM [Scanning-Probe Microscopy] or apparatus thereforEssential components thereof
  • G21K 1/00 - Arrangements for handling particles or ionising radiation, e.g. focusing or moderating

11.

METHOD AND APPARATUS FOR CHARACTERIZING A SAMPLE WITH TWO OR MORE OPTICAL TRAPS

      
Application Number DE2008000897
Publication Number 2008/145110
Status In Force
Filing Date 2008-05-30
Publication Date 2008-12-04
Owner JPK INSTRUMENTS AG (Germany)
Inventor
  • Heyn, Sven-Peter
  • Kerssemakers, Jacob
  • Knebel, Detlef
  • Eggert, Helge
  • Jähnke, Torsten
  • Kamps, Jörn

Abstract

The present invention relates to a method for investigating a sample (5, 6) using scanning probe photon microscopy or optical force microscopy, and to an apparatus which is designed accordingly. The method or the apparatus provides for two optical traps (1, 2) which can be moved in a local region of the sample (5, 6), wherein in at least one of the two traps (1, 2) a probe (3, 4) is held. The sample (5, 6) is scanned using the two traps (1, 2) and the measured data from the two traps (1, 2) are captured separately and evaluated by correlation. In particular interference signals resulting from an interaction between sample and light trap can be eliminated by the method.

IPC Classes  ?

  • G02B 21/32 - Micromanipulators structurally combined with microscopes
  • G01Q 10/06 - Circuits or algorithms therefor
  • G01Q 30/06 - Display or data processing devices for error compensation
  • G01Q 60/00 - Particular types of SPM [Scanning-Probe Microscopy] or apparatus thereforEssential components thereof
  • G21K 1/00 - Arrangements for handling particles or ionising radiation, e.g. focusing or moderating

12.

METHOD FOR EXAMINING A TEST SAMPLE USING A SCANNING PROBE MICROSCOPE, MEASUREMENT SYSTEM AND A MEASURING SENSOR SYSTEM

      
Application Number DE2008000824
Publication Number 2008/138329
Status In Force
Filing Date 2008-05-16
Publication Date 2008-11-20
Owner JPK INSTRUMENTS AG (Germany)
Inventor Jaehnke, Torsten

Abstract

The invention relates to a method and to a device for examining a test sample using a scanning probe microscope. According to the method, a first and a second measurement using a scanning probe microscope is carried out on the test sample using the measurement sensor system, in which a measurement sensor and another measurement sensor are embodied on a common measurement sensor receptacle. During the first measurement, in relation to the test sample, the measurement sensor is held in a first measurement position and the other measurement sensor is held in another non-measurement position, and the test sample is examined by a measurement sensor using a scanning probe microscope. After the first measurement, by displacing in relation to the test sample, the measurement sensor is displaced from the measurement position into a non-measurement position and the other measurement sensor is displaced from the other non-measurement position into another measurement position and during the second measurement, in relation to the test sample, the measurement sensor is held in the non-measurement position and the other measurement sensor is held in the other measurement position and the test sample is examined by the other measurement sensor using a scanning probe microscope. The invention also relates to a measuring sensor system of a scanning probe microscope.

IPC Classes  ?

13.

APPARATUS AND A METHOD FOR EXAMINING A SPECIMEN WITH A PROBE MICROSCOPE

      
Application Number DE2007001468
Publication Number 2008/019679
Status In Force
Filing Date 2007-08-20
Publication Date 2008-02-21
Owner JPK INSTRUMENTS AG (Germany)
Inventor
  • Sommer, Gunnar
  • Kamps, Jörn

Abstract

The invention relates to an apparatus and to a method for examining a specimen with a probe microscope, in particular with a scanning probe microscope. The apparatus comprises a probe-microscope device having a specimen holder for holding a specimen to be examined, a measuring probe and a displacement unit which is configured for displacing the specimen holder and the measuring probe relative to one another for a probe-microscopy examination of the specimen, and a condenser illumination and an optical system which is arranged downstream of the condenser illumination and is configured for projecting condenser light, which is emitted into a condenser light path by the condenser illumination, into the region of the specimen holder for optical microscopy of the specimen to be examined, while maintaining, at least partially, condenser light parameters with which the condenser light is emitted by the condenser illumination.

IPC Classes  ?

  • G02B 21/08 - Condensers
  • G01Q 30/02 - Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope

14.

DEVICE AND METHOD FOR A PROBE MICROSCOPIC EXAMINATION OF A SAMPLE

      
Application Number DE2007001342
Publication Number 2008/011879
Status In Force
Filing Date 2007-07-27
Publication Date 2008-01-31
Owner JPK INSTRUMENTS AG (Germany)
Inventor Haggerty, Michael

Abstract

The invention relates to a device for a probe microscopic examination of a sample (30), particularly a scanning probe microscopic examination, having a measuring probe (6) and a displacement mechanism (10, 12), which is configured in such a manner to move the measuring probe (6) from an initial position into an end position by means of a relative movement between the measuring probe (6) and a sample-holder, wherein the measuring probe (6)is in a measuring position, at least in the end position relative to a sample (3) disposed in the sample-holder, wherein the measuring probe (6) is in a measuring position at least in the end position relative to a probe (3) that is disposed in the sample-holder, wherein the displacement mechanism (10, 12) comprises a displacement device (10), which is configured to perform a partial displacement of the measuring probe (6) relative to the sample-holder in a relative movement, relative movement, and a further displacement device (12), which is configured to perform a further partial displacement of the measuring probe (6) relative to the sample-holder in a relative movement, and wherein the displacement device (10) and the further displacement device (12) are coupled to a control device, which is configured to provide a target value deviation for the partial displacement processing a control signal for the performance of the further partial displacement by means of the further displacement device (12).

IPC Classes  ?

15.

METHOD FOR OPERATING A MEASURING ARRANGEMENT HAVING A SCANNING PROBE MICROSCOPE DEVICE AND A MEASURING ARRANGEMENT

      
Application Number DE2006001648
Publication Number 2008/011849
Status In Force
Filing Date 2006-09-19
Publication Date 2008-01-31
Owner JPK INSTRUMENTS AG (Germany)
Inventor
  • Poole, Kate
  • Knebel, Detlef
  • Jähnke, Torsten

Abstract

The invention relates to a method for operating a measuring arrangement having a scanning probe microscope device, in which method a measuring probe (1), loaded in a measuring probe section with at least one probe substance (10, 20), of the scanning probe microscope device and a retainer for a probe (4; 30), with which the at least one probe substance (10, 20) interacts in a scanning probe microscope measurement, are moved in relation to one another using a displacement device (50, 52) within a displacement area which is defined by a plurality of relative positions, which can be assumed using the displacement device (50, 52), of measuring probe (1) and retainer, and the measuring probe (1) is cleaned in a manner in which it remains in the displacement area in the scanning probe microscope measurement after use.

IPC Classes  ?

  • G01Q 10/00 - Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
  • G01Q 10/02 - Coarse scanning or positioning
  • G01Q 30/14 - Liquid environment
  • G01Q 60/42 - Functionalisation

16.

JPK Instruments

      
Application Number 928519
Status Registered
Filing Date 2007-05-21
Registration Date 2007-05-21
Owner JPK Instruments AG (Germany)
NICE Classes  ?
  • 09 - Scientific and electric apparatus and instruments
  • 40 - Treatment of materials; recycling, air and water treatment,
  • 42 - Scientific, technological and industrial services, research and design

Goods & Services

Analysis apparatus (not for medical purposes), material testing instruments and machines, measuring apparatus, measuring instruments, precision measuring apparatus, microscopes, objectives (optics), optical apparatus and instruments, apparatus and instruments for physics, computer operating programs (recorded), computer software (recorded), data processing apparatus. Material treatment. Technical measurement, scientific analysis, material testing, physics research, scientific research, technical research, design of programs for data processing.

17.

METHOD FOR OPERATING A MEASUREMENT SYSTEM CONTAINING A SCANNING PROBE MICROSCOPE, AND MEASUREMENT SYSTEM

      
Application Number DE2006002298
Publication Number 2007/076828
Status In Force
Filing Date 2006-12-21
Publication Date 2007-07-12
Owner JPK INSTRUMENTS AG (Germany)
Inventor
  • Jähnke, Torsten
  • Haggerty, Michael

Abstract

The invention relates to a method for operating a measurement system containing a scanning probe microscope, in particular an atomic force microscope, and to a measurement system for examining a measurement sample using a scanning probe microscope and for optically examining said sample. In the method, an optical image of a measurement section of a measurement sample to be examined, said image being recorded with the aid of an optical recording device, is displayed on a display apparatus, a choice of a position in the optical image is detected, and, for a scanning probe measurement, a measurement probe which is configured for the scanning probe measurement is moved, using a movement apparatus which moves the measurement probe and the measurement sample relative to one another, to a measurement position, which is assigned to the selected position in the optical image in accordance with coordinate transformation, by virtue of the movement apparatus being controlled in accordance with the coordinate transformation, wherein a previously determined assignment between a coordinate system of the optical image and a coordinate system of a space covered by movement positions of the measurement probe and the measurement sample is formed with the coordinate transformation, wherein the movement positions comprise the measurement position.

IPC Classes  ?

  • G01Q 30/06 - Display or data processing devices for error compensation
  • G01Q 10/00 - Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
  • G01Q 40/00 - Calibration, e.g. of probes

18.

JPK INSTRUMENTS

      
Serial Number 79040129
Status Registered
Filing Date 2007-05-21
Registration Date 2008-07-22
Owner JPK Instruments AG (Germany)
NICE Classes  ?
  • 09 - Scientific and electric apparatus and instruments
  • 40 - Treatment of materials; recycling, air and water treatment,
  • 42 - Scientific, technological and industrial services, research and design

Goods & Services

Analysis apparatus in the nature of sample testing instruments, namely, precision laser measuring apparatus, microscopes, scanning probe microscopes, spectrometers; computer operating programs; computer software for use in data processing; and data processors [ Treatment of materials by laser beam and scanning probe microscopes ] [ Technical measurements of sample properties in the field of nanotechnology; scientific research; material testing; physics research, technical research in the field of nanotechnology; and design of computer programs for data processing ]

19.

METHOD FOR EXAMINING A MEASUREMENT OBJECT, AND APPARATUS

      
Application Number DE2006001131
Publication Number 2007/041976
Status In Force
Filing Date 2006-06-30
Publication Date 2007-04-19
Owner JPK INSTRUMENTS AG (Germany)
Inventor Jähnke, Torsten

Abstract

The invention relates to a method for examining a measurement object (2, 12), in which the measurement object (2, 12) is examined by means of scanning probe microscopy using a measurement probe (10) of a scanning probe measurement device and in which at least one subsection (1) of the measurement object (2, 12) is optically examined, in an observation region associated with an optical measurement system, using the optical measurement system, wherein displacement of the at least one subsection (1) of the measurement object (2, 12) from the observation region, said displacement being caused by the examination by means of scanning probe microscopy, is corrected in such a manner that the at least one displaced subsection (1) of the measurement object (2, 12) is arranged in the observation region again with the aid of an adjusting device which processes data signals which characterize the displacement.

IPC Classes  ?

  • G01Q 60/02 - Multiple-type SPM, i.e. involving two or more SPM techniques
  • G01Q 60/18 - SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes

20.

METHOD AND DEVICE FOR POSITIONING A MOVABLE PART IN A TEST SYSTEM

      
Application Number DE2006001722
Publication Number 2007/036222
Status In Force
Filing Date 2006-09-29
Publication Date 2007-04-05
Owner JPK INSTRUMENTS AG (Germany)
Inventor
  • Knebel, Detlef
  • Jähnke, Torsten

Abstract

The invention relates to a method and a device for positioning a movable part in a test system, particularly a measuring system or analysis system. According to said method, the movable part is displaced from a starting position into a final position with the aid of an actuating element that is coupled to the movable part by moving the actuating element by means of a driving force, and the movable part is impinged upon by a locking force that locks the movable part in the final position via a locking part connected to the movable part by dipping the locking part at least in part into a supply of a medium and fixing the locking part in the medium by converting the medium from a liquid state into a solid state, the medium being converted from the liquid state into the solid state by impinging the same with a manipulated variable.

IPC Classes  ?

  • G01N 1/00 - SamplingPreparing specimens for investigation
  • G01Q 10/04 - Fine scanning or positioning
  • G01Q 70/04 - Probe holders with compensation for temperature or vibration induced errors
  • G12B 5/00 - Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereofCompensating for the effects of tilting or acceleration, e.g. for optical apparatus