Abstract

Methods and apparatus for obtaining extremely high sensitivity chemical composition maps with spatial resolution down to a few nanometers. In some embodiments these chemical composition maps are created using a combination of three techniques: (1) Illuminating the sample with IR radiation than is tuned to an absorption band in the sample; and (2) Optimizing a mechanical coupling efficiency that is tuned to a specific target material; (3) Optimizing a resonant detection that is tuned to a specific target material. With the combination of these steps it is possible to obtain (1) Chemical composition maps based on unique IR absorption; (2) spatial resolution that is enhanced by extremely short-range tip-sample interactions; and (3) resonant amplification tuned to a specific target material. In other embodiments it is possible to take advantage of any two of these steps and still achieve a substantial improvement in spatial resolution and/or sensitivity.

IPC Classes  ?

• G01Q 30/02 - Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
• G01Q 60/32 - AC mode
• G01N 21/3563 - Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing solidsPreparation of samples therefor

Abstract

An AFM 2 based technique has been demonstrated for performing highly localized IR spectroscopy 13 on a sample surface 3. Such a technique implemented in a commercially viable analytical instrument would be extremely useful. Various aspects of the experimental set-up have to be changed to create a commercial version. The invention addresses many of these issues thereby producing a version of the analytical technique that can be made generally available to the scientific community.

IPC Classes  ?

• G01Q 30/02 - Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
• G01Q 60/32 - AC mode
• G01N 21/35 - Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
• G01Q 60/38 - Probes, their manufacture or their related instrumentation, e.g. holders

Abstract

A system and method for automatic analysis of temperature transition data over an area of a sample surface 8. The system relies on the use of a microf abricated probe, 4, which can be rapidly heated and cooled 22 and has a sharp tip 6 to provide high spatial resolution. The system also has fast x- y-z positioners, 18, 20, data collection 29, 30, and algorithms that allow automatic analysis of and visualization 32 of temperature transition data.

IPC Classes  ?

• G01Q 60/58 - SThM [Scanning Thermal Microscopy] or apparatus therefor, e.g. SThM probes
• G01Q 30/04 - Display or data processing devices

Abstract

An AFM based technique has been demonstrated for performing highly localized IR spectroscopy on a sample surface. Such a technique implemented in a commercially viable analytical instrument would be extremely useful. Various aspects of the experimental set-up have to be changed to create a commercial version. The invention addresses many of these issues thereby producing a version of the analytical technique that can be made generally available to the scientific community.

IPC Classes  ?

• G01J 3/30 - Measuring the intensity of spectral lines directly on the spectrum itself