The present invention relates to a fixing-type anti-loosening fastening structure capable of fixing a first member and a second member that are same as or different from each other, and in order to prevent the coupling force from being reduced because a fixing bolt coupling the members is loosened during operation, a locking cap is coupled to the fixing bolt. In particular, a fixing-type anti-loosening fastening structure of a shower head for plasma and a gas distribution plate can be provided, the fixing-type anti-loosening fastening structure being capable of being applied to a fastening structure of a shower head for plasma and a gas distribution plate, included in a semiconductor manufacturing apparatus, so as to prevent a decrease in fastening force because a distribution plate fixing bolt coupling together a shower head portion and a gas distribution portion is loosened during operation.
F16B 39/10 - Locking of screws, bolts, or nuts in which the locking takes place after screwing down by a plate or ring immovable with regard to the bolt or object
F16B 37/04 - Devices for fastening nuts to surfaces, e.g. sheets, plates
F16B 39/24 - Locking of screws, bolts, or nuts in which the locking takes place during screwing down or tightening by means of washers, spring washers, or resilient plates that lock against the object
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
The present invention relates to a sliding-type anti-loosening fastening structure between a first member and a second member, wherein an unlocking cap slides to prevent a fixing bolt coupling the first member and the second member from loosening and exerting decreased fastening force during work, and thus machining and assembly errors can be reduced. The present invention can be applied to a plasma shower head and a gas distribution plate, which are semiconductor manufacturing devices.
F16B 39/10 - Locking of screws, bolts, or nuts in which the locking takes place after screwing down by a plate or ring immovable with regard to the bolt or object
F16B 37/04 - Devices for fastening nuts to surfaces, e.g. sheets, plates
F16B 39/24 - Locking of screws, bolts, or nuts in which the locking takes place during screwing down or tightening by means of washers, spring washers, or resilient plates that lock against the object
F16B 39/12 - Locking of screws, bolts, or nuts in which the locking takes place after screwing down by means of locknuts
F16B 39/28 - Locking of screws, bolts, or nuts in which the locking takes place during screwing down or tightening by special members on, or shape of, the nut or bolt
3.
ASSEMBLY-TYPE PROFILE UPPER ELECTRODE AND PLASMA PROCESSING APPARATUS INCLUDING SAME
The present invention relates to a replaceable profile upper electrode and a plasma processing apparatus including same, wherein the upper electrode includes a lower surface in contact with plasma, and includes a first region and a second region respectively having a first thickness and a second thickness, and the lower surface of the upper electrode in contact with plasma is formed as a continuous surface that changes from the second region to the first region, and the second region includes a fastening structure so as to be separated from the upper electrode. Accordingly, the uniformity of plasma formed inside the plasma processing apparatus can be improved, and the replacement cycle of the upper electrode can be increased simultaneously.
The present invention relates to an interlocking fastening upper electrode assembly having an improved fastening force in which a bush inserted into a silicon electrode protrudes above the silicon electrode, and the protruding portion is inserted into and coupled to an anodizing plate so as to suppress rotation of the bush, the assembly comprising: an inner and outer tab composite nut coupled to an assembly groove of the silicon electrode and an anodizing plate so as to prevent rotation; an inner and outer tab nut assembled in the assembly groove of the silicon electrode and fitted to the outside of the inner and outer tab composite nut; and an assembly module coupled through the inside of a through part of the anodizing plate and assembled with the inner and outer tab composite nut in order to fix the anodizing plate provided above the silicon electrode.
F16B 39/12 - Locking of screws, bolts, or nuts in which the locking takes place after screwing down by means of locknuts
F16B 39/24 - Locking of screws, bolts, or nuts in which the locking takes place during screwing down or tightening by means of washers, spring washers, or resilient plates that lock against the object
The present invention relates to a coupling-type focus ring whereby the focus ring is separated into a plurality of portions and assembled so as to enable the replacement of only a portion which has been used up as a result of etching by being exposed to plasma, the coupling-type focus ring comprising: an upper plasma exposure ring placed on the outer side of the upper portion of an electrostatic chuck; a lower thermal conduction support ring assembled on the lower portion of the upper plasma exposure ring so as to tightly adhere thereto; a coupling ring assembled on the outer side of the lower thermal conduction support ring; a first coupling part for coupling the upper plasma exposure ring with the lower thermal conduction support ring; and a second coupling part for coupling the upper plasma exposure ring with the coupling ring.
H01L 21/67 - Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereofApparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
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